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公开(公告)号：US20190189814A1
公开(公告)日：2019-06-20
申请号：US16217041
申请日：2018-12-11
Inventor： Minghao Qu , Xiaoning Ru , Yihuan Wang , Yi Shu , Pengchen Hu , Yongyuan Xu
IPC: H01L31/032 , H01L31/0392
CPC classification number: H01L31/0322 , C23C14/0042 , C23C14/14 , C23C14/543 , H01L31/03923 , H01L31/0749 , Y02P70/521
Abstract: This disclosure provides a method for preparing a CIGS thin film solar cell, including placing a substrate formed with a barrier layer into a sputtering chamber, and forming a doping layer on the barrier layer by sputtering, wherein the doping layer is sodium doped a hetero-molybdenum layer; detecting sodium ion content, and introducing water vapor into the sputtering chamber according to the sodium ion content when the doping layer is formed by sputtering. The method for preparing the CIGS thin film solar cell of the present disclosure introduces water vapor into the sputtering chamber according to the content of sodium ions. The water vapor may ensure the stability after sodium ion sputtering, and the content of water vapor is adjusted according to the sodium ion content.
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公开(公告)号：US20190189830A1
公开(公告)日：2019-06-20
申请号：US16133319
申请日：2018-09-17
Inventor： Pengjian Zhu , Hongxia Sun , Chao HU , Yi Shu , Deng Pan , Fan Chen , Guojun Xu
IPC: H01L31/18 , C23C14/34 , H01L31/0216
CPC classification number: H01L31/1868 , C23C14/044 , C23C14/34 , C23C14/3464 , C23C14/352 , H01J37/3414 , H01J37/3417 , H01J37/3423 , H01J37/3435 , H01J37/3447 , H01J37/347 , H01L31/02167
Abstract: The present disclosure discloses a sputter coating device and method for a solar cell. The sputter coating device includes a target for sputtering to a substrate, a blocking unit between the target and the substrate, and the orthographic projection of the blocking unit on the substrate partially coincides with the orthographic projection of the target on the substrate.
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