Apparatus and methods of automated wafer-grinding using grinding surface position monitoring
    6.
    发明授权
    Apparatus and methods of automated wafer-grinding using grinding surface position monitoring 有权
    使用研磨表面位置监测的自动晶片磨削的装置和方法

    公开(公告)号:US06572444B1

    公开(公告)日:2003-06-03

    申请号:US09655002

    申请日:2000-08-31

    IPC分类号: B24B4900

    CPC分类号: B24B7/228 B24B47/22 B24B49/00

    摘要: Apparatus and methods of automated wafer-grinding using grinding surface position monitoring. In one embodiment, an apparatus for grinding a working surface includes a grinding surface engageable with at least a portion of the working surface, and a feed mechanism that controllably adjusts a position of the grinding surface. The apparatus further includes a position sensor that senses a position of the grinding surface along an axis approximately normal to the working surface and a controller that receives a position signal from the position sensor and transmits a control signal to the feed mechanism in response to the position signal. In alternate embodiments, the position sensor may be an acoustic sensor, an optical sensor, or another type of sensor. The grinding surface may include a grinding material suspended in a binder, the grinding material being worn during grinding. In an alternate embodiment, an apparatus further includes a supplemental sensor that senses an operating characteristic and outputs a characteristic signal. The controller receives the characteristic signal and transmits the control signal to the feed mechanism based on at least one of the position signal or the characteristic signal. In alternate embodiments, the characteristic signal may include a pressure of the grinding surface on the working surface, a shaft speed of a drive shaft, or a current drawn by a drive motor.

    摘要翻译: 使用研磨表面位置监测的自动晶片磨削的装置和方法。 在一个实施例中,用于研磨工作表面的设备包括可与工作表面的至少一部分接合的研磨表面以及可调节地调节研磨表面的位置的进给机构。 该装置还包括位置传感器,其沿着大致垂直于工作表面的轴感测研磨表面的位置;以及控制器,其接收来自位置传感器的位置信号,并响应于该位置向控制信号传送控制信号 信号。 在替代实施例中,位置传感器可以是声学传感器,光学传感器或另一种类型的传感器。 研磨表面可以包括悬浮在粘合剂中的研磨材料,研磨材料在研磨期间磨损。 在替代实施例中,装置还包括检测操作特性并输出特征信号的补充传感器。 控制器接收特征信号,并且基于位置信号或特征信号中的至少一个将控制信号发送到馈送机构。 在替代实施例中,特征信号可以包括工作表面上的研磨表面的压力,驱动轴的轴速度或由驱动马达吸取的电流。