摘要:
An inert ultraviolet light reaction chamber is provided with a flow of liquid on its light transmitting wall surface. The fluid prevents the build up of light blocking deposits, controls the temperature, and filters out undesired portions of the spectrum.
摘要:
An electrodeless lamp system and method for providing light output having a controlled spectral distribution. A lamp having a fill which is not fully vaporized at the lamp operating temperature and which emits in a characteristic region of the spectrum is used. A function generator generates a function signal, and the magnitude of the lamp output in the characteristic region or the ratio of such magnitude and a magnitude in a different characteristic region is compared with the function signal. The difference signal is used to control the amount of cooling gas which is incident on the lamp bulb to control the spectral distribution of the radiation which is emitted by the lamp.
摘要:
A lamp including a reflector and a light source for illuminating a target area in which the light rays on the target and have a small average local divergence. The reflector and light source are configured so that the predominant portion of the light rays which strike the target area do not cross the axis of the reflector. The reflector may be segmented and the light source is located so that various points on the target receive radiation which is reflected from a different number of segments with points near the periphery of the target area receiving radiation from a greater number of segments than those near the center of the target.
摘要:
A method and apparatus for curing three dimensional objects such as cylindrical two piece cans with ultraviolet light without having to rotate the cans, at conventional can line speeds and using a minimum number of lamp units. In a first embodiment, the cans are moved, without rotation, between at least a pair of ultraviolet lamp units so that the closest surfaces to the lamp units are substantially within the focal planes thereof. The lamp units are parallel to the direction of can movement or are rotated from that direction by a small angle with the lamp units of each pair being rotated by the same angle but in opposite senses. In a further embodiment, each lamp unit, instead of being faced by another lamp unit, is faced by a reflector to increase the cure speed attainable with the same number of lamp units.
摘要:
An apparatus and process for enhancing the ignition of a gas to form a plasma in a plasma tool. The apparatus and process includes the use of a plasma tube to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or in otherwise difficult gases to ignite. The plasma tube includes at least one conductive fiber secured to the tube. A process for enhancing the local electric field includes coupling the plasma tube to an energy source such as microwave energy, radiofrequency energy, or a combination comprising at least one of the foregoing energy sources.
摘要:
In a microwave powered electrodeless lamp, a single rotary motor is used to a) rotate the bulb and b) provide rotary motion to a blower or pump means for providing cooling fluid to the magnetron and/or to a forced gas cooling for providing cooler gas to the bulb. The blower may consist of only of an impeller without the usual blower housing. The motor, bulb stem and bulb, or motor, bulb stem, bulb and blower may be formed as an integral unit so as to facilitate replacement.
摘要:
The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp which is operated at a pressure of at least about 1 atmosphere contains a low ionization potential substance in the fill. Characteristics which are improved are one or more of spatial color uniformity, extinguishing characteristics, and bulb starting reliability. Particular substances which are added to the fill are alkalai metal containing substances, III B metal containing substances, and alkaline earth metal containing substances. When light is reflected back into the bulb, the light which is re-emitted is stronger in the higher wavelengths.
摘要:
An apparatus for rapidly stripping a photoresist which utilizes an oxidizing fluid such as ozone. A very thin layer of oxidizing fluid of four millimeters or less is flowed over the photoresist. The fluid flows at high velocity over the resist, while the resist is heated. Additionally, the resist may be irradiated with ultraviolet radiation at an irradiance of at least about 800 milliwatts/cm.sup.2.
摘要:
An electrodeless lamp bulb comprises of a quartz envelope and a fill containing mercury in a ratio of from 0.5-0.9 microliters per milliliter of envelope volume at room temperature. A lamp including such bulb which is powered by microwaves.