Electrodeless lamp system with controllable spectral output
    2.
    发明授权
    Electrodeless lamp system with controllable spectral output 失效
    无极灯系统,具有可控光谱输出

    公开(公告)号:US4978891A

    公开(公告)日:1990-12-18

    申请号:US344863

    申请日:1989-04-17

    申请人: Michael G. Ury

    发明人: Michael G. Ury

    摘要: An electrodeless lamp system and method for providing light output having a controlled spectral distribution. A lamp having a fill which is not fully vaporized at the lamp operating temperature and which emits in a characteristic region of the spectrum is used. A function generator generates a function signal, and the magnitude of the lamp output in the characteristic region or the ratio of such magnitude and a magnitude in a different characteristic region is compared with the function signal. The difference signal is used to control the amount of cooling gas which is incident on the lamp bulb to control the spectral distribution of the radiation which is emitted by the lamp.

    摘要翻译: 一种用于提供具有受控光谱分布的光输出的无电极灯系统和方法。 使用具有在灯工作温度下未完全蒸发并且在特征区域中发射的填充物的灯。 功能发生器产生功能信号,将特征区域中的灯输出的大小或不同特征区域中的这种幅度和幅度的比值与功能信号进行比较。 差分信号用于控制入射到灯泡上的冷却气体的量,以控制由灯发射的辐射的光谱分布。

    Lamp having improved image resolution
    3.
    发明授权
    Lamp having improved image resolution 失效
    灯具有改善的图像分辨率

    公开(公告)号:US4794503A

    公开(公告)日:1988-12-27

    申请号:US100064

    申请日:1987-09-23

    IPC分类号: F21K99/00 F21V7/09 F21V7/12

    CPC分类号: F21V7/09

    摘要: A lamp including a reflector and a light source for illuminating a target area in which the light rays on the target and have a small average local divergence. The reflector and light source are configured so that the predominant portion of the light rays which strike the target area do not cross the axis of the reflector. The reflector may be segmented and the light source is located so that various points on the target receive radiation which is reflected from a different number of segments with points near the periphery of the target area receiving radiation from a greater number of segments than those near the center of the target.

    摘要翻译: 一种灯,包括反射器和用于照射目标区域的光源,其中目标区域上的光线具有小的平均局部散度。 反射器和光源被配置为使得撞击目标区域的光线的主要部分不与反射器的轴线交叉。 反射器可以被分割并且光源被定位成使得目标上的各个点接收从不同数量的段反射的辐射,其中靠近目标区域的周边的点接收来自更接近 目标中心。

    Method and apparatus for ultraviolet curing of three dimensional objects
without rotation
    4.
    发明授权
    Method and apparatus for ultraviolet curing of three dimensional objects without rotation 失效
    无旋转的三维物体紫外线固化的方法和装置

    公开(公告)号:US4208587A

    公开(公告)日:1980-06-17

    申请号:US719209

    申请日:1976-08-31

    IPC分类号: B41F23/00 B41M7/00 A61K27/02

    CPC分类号: B41F23/005 B41M7/0081

    摘要: A method and apparatus for curing three dimensional objects such as cylindrical two piece cans with ultraviolet light without having to rotate the cans, at conventional can line speeds and using a minimum number of lamp units. In a first embodiment, the cans are moved, without rotation, between at least a pair of ultraviolet lamp units so that the closest surfaces to the lamp units are substantially within the focal planes thereof. The lamp units are parallel to the direction of can movement or are rotated from that direction by a small angle with the lamp units of each pair being rotated by the same angle but in opposite senses. In a further embodiment, each lamp unit, instead of being faced by another lamp unit, is faced by a reflector to increase the cure speed attainable with the same number of lamp units.

    摘要翻译: 一种用于固化三维物体的方法和装置,例如具有紫外线的圆柱形两件式罐,而不必以常规罐线速度和使用最少数量的灯单元旋转罐。 在第一实施例中,罐在不旋转的情况下在至少一对紫外灯单元之间移动,使得最接近灯单元的表面基本上在其焦平面内。 灯单元平行于罐的运动方向或从该方向旋转小角度,每对灯的灯单元旋转相同的角度,但是以相反的方向旋转。 在另一实施例中,每个灯单元而不是面对另一个灯单元,面向反射器以增加用相同数量的灯单元可达到的固化速度。

    Plasma process and apparatus
    5.
    发明授权
    Plasma process and apparatus 有权
    等离子体工艺和设备

    公开(公告)号:US06897615B2

    公开(公告)日:2005-05-24

    申请号:US10004523

    申请日:2001-11-01

    CPC分类号: H05H1/46

    摘要: An apparatus and process for enhancing the ignition of a gas to form a plasma in a plasma tool. The apparatus and process includes the use of a plasma tube to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or in otherwise difficult gases to ignite. The plasma tube includes at least one conductive fiber secured to the tube. A process for enhancing the local electric field includes coupling the plasma tube to an energy source such as microwave energy, radiofrequency energy, or a combination comprising at least one of the foregoing energy sources.

    摘要翻译: 一种用于增强气体点燃以在等离子体工具中形成等离子体的装置和方法。 该装置和方法包括使用等离子体管来局部地增强所施加的电场,使得等离子体可以在较高的压力,较低的电场和/或另外难于燃烧的气体中起动。 等离子体管包括固定到管的至少一个导电纤维。 用于增强局部电场的方法包括将等离子体管耦合到诸如微波能量,射频能量或包括前述能量源中的至少一个的组合的能量源。

    Microwave lamp with multi-purpose rotary motor
    6.
    发明授权
    Microwave lamp with multi-purpose rotary motor 失效
    带多功能旋转电机的微波灯

    公开(公告)号:US5866990A

    公开(公告)日:1999-02-02

    申请号:US592477

    申请日:1996-01-26

    CPC分类号: H01J61/52 H01J65/044

    摘要: In a microwave powered electrodeless lamp, a single rotary motor is used to a) rotate the bulb and b) provide rotary motion to a blower or pump means for providing cooling fluid to the magnetron and/or to a forced gas cooling for providing cooler gas to the bulb. The blower may consist of only of an impeller without the usual blower housing. The motor, bulb stem and bulb, or motor, bulb stem, bulb and blower may be formed as an integral unit so as to facilitate replacement.

    摘要翻译: 在微波供电的无电极灯中,使用单个旋转电动机来a)旋转灯泡,并且b)向鼓风机或泵装置提供旋转运动,以将冷却流体提供给磁控管和/或向强制气体冷却提供较冷气体 到灯泡 鼓风机可以仅由没有通常鼓风机壳体的叶轮组成。 电动机,灯泡杆和灯泡,或电动机,灯泡杆,灯泡和鼓风机可以形成为一体的单元,以便于更换。

    Lamp with controllable spectral output
    7.
    发明授权
    Lamp with controllable spectral output 失效
    具有可控光谱输出的灯

    公开(公告)号:US5804922A

    公开(公告)日:1998-09-08

    申请号:US488278

    申请日:1995-06-07

    摘要: The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp which is operated at a pressure of at least about 1 atmosphere contains a low ionization potential substance in the fill. Characteristics which are improved are one or more of spatial color uniformity, extinguishing characteristics, and bulb starting reliability. Particular substances which are added to the fill are alkalai metal containing substances, III B metal containing substances, and alkaline earth metal containing substances. When light is reflected back into the bulb, the light which is re-emitted is stronger in the higher wavelengths.

    摘要翻译: 通过改变填充物质的密度来控制放电灯的光谱能量特性。 通过改变填充物的密度,可以使光谱特性基本保持其形状而移动。 在至少约1个大气压下工作的含硫或硒的放电灯在填充物中含有低电离势物质。 改进的特征是空间颜色均匀性,熄灭特性和灯泡启动可靠性中的一个或多个。 添加到填充物中的特定物质是含碱金属的物质,含IIIB族金属的物质和含碱土金属的物质。 当光被反射回灯泡时,再发射的光在较高波长下更强。

    Apparatus for photoresist stripping
    8.
    发明授权
    Apparatus for photoresist stripping 失效
    光刻胶剥离装置

    公开(公告)号:US4885047A

    公开(公告)日:1989-12-05

    申请号:US141856

    申请日:1988-01-11

    IPC分类号: G03F7/42

    CPC分类号: G03F7/42 Y10S134/902

    摘要: An apparatus for rapidly stripping a photoresist which utilizes an oxidizing fluid such as ozone. A very thin layer of oxidizing fluid of four millimeters or less is flowed over the photoresist. The fluid flows at high velocity over the resist, while the resist is heated. Additionally, the resist may be irradiated with ultraviolet radiation at an irradiance of at least about 800 milliwatts/cm.sup.2.

    摘要翻译: 用于快速剥离利用氧化液体如臭氧的光致抗蚀剂的装置。 4毫米或更小的非常薄的氧化流体层流过光致抗蚀剂。 当抗蚀剂加热时,流体以高速流过抗蚀剂。 另外,可以以至少约800毫瓦/ cm2的辐照度的紫外线照射抗蚀剂。

    Deep UV lamp bulb with improved fill
    9.
    发明授权
    Deep UV lamp bulb with improved fill 失效
    深紫外灯灯泡具有改进的填充

    公开(公告)号:US4859906A

    公开(公告)日:1989-08-22

    申请号:US433069

    申请日:1982-10-06

    IPC分类号: G03F7/20 H01J65/04 H01K1/50

    CPC分类号: G03F7/70016 H01J65/044

    摘要: An electrodeless lamp bulb comprises of a quartz envelope and a fill containing mercury in a ratio of from 0.5-0.9 microliters per milliliter of envelope volume at room temperature. A lamp including such bulb which is powered by microwaves.

    摘要翻译: 无电极灯泡包括石英外壳和含有汞的填充物,其比例为室温下每毫升包络体积的0.5-0.9微升。 包括由微波供电的灯泡的灯。