公开(公告)号：US07163587B2

公开(公告)日：2007-01-16

申请号：US10071908

申请日：2002-02-08

Applicant: David William Kinnard ,  David Ferris

Inventor： David William Kinnard ,  David Ferris

IPC: C23C16/48 ,  C23F1/10 ,  H01L21/306 ,  C23C16/52 ,  C23F1/00

CPC classification number: C23C16/45504 ,  C23C16/455

Abstract: A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity.

Abstract translation: 用于处理基板的反应器组件和处理方法通常包括基座单元，卡盘组件，处理室，入口歧管组件和出口歧管组件。 入口歧管组件与处理室的第一开口流体连通，其中入口歧管组件包括流动成形部分，其适于将气体和/或反应物流侧向伸长到处理室中。 排气歧管组件与处理室的第二开口流体连通并且与入口歧管组件径向相对。 该方法包括使气体和/或反应物质沿着与基底表面平面的方向流动到反应器组件的处理室中，提供改进的均匀性和增加的反应性。

公开(公告)号：US06897615B2

公开(公告)日：2005-05-24

申请号：US10004523

申请日：2001-11-01

Applicant: Alan C. Janos ,  David Ferris ,  Ivan Berry ,  Michael G. Ury

Inventor： Alan C. Janos ,  David Ferris ,  Ivan Berry ,  Michael G. Ury

IPC: H01J61/54 ,  H01J65/04 ,  H01J7/24 ,  H05B32/26

CPC classification number: H05H1/46

Abstract: An apparatus and process for enhancing the ignition of a gas to form a plasma in a plasma tool. The apparatus and process includes the use of a plasma tube to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or in otherwise difficult gases to ignite. The plasma tube includes at least one conductive fiber secured to the tube. A process for enhancing the local electric field includes coupling the plasma tube to an energy source such as microwave energy, radiofrequency energy, or a combination comprising at least one of the foregoing energy sources.

Abstract translation: 一种用于增强气体点燃以在等离子体工具中形成等离子体的装置和方法。 该装置和方法包括使用等离子体管来局部地增强所施加的电场，使得等离子体可以在较高的压力，较低的电场和/或另外难于燃烧的气体中起动。 等离子体管包括固定到管的至少一个导电纤维。 用于增强局部电场的方法包括将等离子体管耦合到诸如微波能量，射频能量或包括前述能量源中的至少一个的组合的能量源。

公开(公告)号：US06244025B1

公开(公告)日：2001-06-12

申请号：US09384534

申请日：1999-08-27

Applicant: David Ferris ,  William Shea ,  Henry Nordberg

Inventor： David Ferris ,  William Shea ,  Henry Nordberg

IPC: A01D3403

CPC classification number: A01D34/64 ,  A01D2101/00 ,  B60B33/0005 ,  B60B33/0015 ,  B60B33/0021 ,  B60B33/0039 ,  B60B33/0057 ,  B60B33/0068 ,  B60B33/0073 ,  B60G3/01 ,  B60G3/18 ,  B60G11/16 ,  B60G2200/144 ,  B60G2204/124 ,  B60G2204/148 ,  B60G2204/4232 ,  B60G2206/50 ,  B60G2300/084 ,  Y10S56/03

Abstract: A lawn mower includes a front wheel suspension system as well as a rear wheel suspension system. A load compensation adjuster is employed as part of the rear wheel suspension system that compensates for riders having significantly differing weights, as well as for weight changes occurring during the mowing operation, such as from grass clippings accumulating in a grass catcher bag.

Abstract translation: 割草机包括前轮悬挂系统以及后轮悬挂系统。 使用负载补偿调节器作为后轮悬架系统的一部分，其补偿具有显着不同重量的车手以及在割草操作期间发生的重量变化，例如积聚在草地捕捉袋中的草屑。

公开(公告)号：US08864561B2

公开(公告)日：2014-10-21

申请号：US12547619

申请日：2009-08-26

Applicant: Dirk Weichholdt ,  Rico Priesnitz ,  Friedrich K Lauer ,  Oliver Klein ,  Chad Allen Dow ,  Joel David Ferris

Inventor： Dirk Weichholdt ,  Rico Priesnitz ,  Friedrich K Lauer ,  Oliver Klein ,  Chad Allen Dow ,  Joel David Ferris

IPC: A01F12/40 ,  A01D41/12

CPC classification number: A01D41/1243

Abstract: The invention concerns a harvested crop residue chopper and distribution arrangement for a combine (10) with a straw chopper (60) with a rotor (74) that can be brought into rotation about a horizontal axis (98) with chopper blades (76) fastened thereto that define an outer envelope (96), and with at least one impeller blower (82) arranged downstream of the straw chopper (60) with impeller blades (84) that can rotate about an axis of rotation (88) that extends vertically, in which the impeller blades (84) are provided with outer edges (94) that conform to the envelope (96) of the chopper knives (76) and follow it very closely and are not in contact with it.

Abstract translation: 本发明涉及一种收获的作物残渣切碎机和一种具有秸杆斩波器（60）的联合收割机（10）的分配布置，其具有转子（74），所述转子可绕着水平轴线（98）旋转，切断刀片（76）被紧固 限定外封套（96）的至少一个叶轮鼓风机（82），以及布置在秸秆切碎机（60）下游的叶轮鼓风机（82），叶轮叶片（84）可围绕垂直延伸的旋转轴线（88）旋转， 其中所述叶轮叶片（84）设置有与所述切碎刀（76）的外壳（96）一致的外边缘（94），并且非常接近并且不与其接触。

公开(公告)号：US08146336B2

公开(公告)日：2012-04-03

申请号：US12547604

申请日：2009-08-26

Applicant: Dirk Weichholdt ,  Rico Priesnitz ,  Friedrich K Lauer ,  Oliver Klein ,  Chad Allen Dow ,  Joel David Ferris

Inventor： Dirk Weichholdt ,  Rico Priesnitz ,  Friedrich K Lauer ,  Oliver Klein ,  Chad Allen Dow ,  Joel David Ferris

IPC: A01F12/40

CPC classification number: A01D41/1243 ,  A01F12/40

Abstract: A harvested crop residue chopper-and distribution arrangement for a combine (10) has a straw chopper (60) with an outlet (80) arranged in the plane of the outlet (96), with at least one impeller blower (82) arranged downstream of the outlet (80) of the straw chopper (60) with impeller blades (84) that can be rotated in the plane of the impeller blower (98) about an axis of rotation (88), where the plane of the impeller blower (98) may be inclined relative to the plane of the outlet (96). The impeller blades (84) may be connected with a central body (92) that is connected to a cone (94) facing the outlet (80) of the straw chopper (60).

Abstract translation: 用于组合（10）的收获的作物残渣斩波器和分配装置具有秸秆切碎机（60），排出口（80）布置在出口（96）的平面中，至少一个叶轮鼓风机（82）布置在下游 （84）的叶轮（84）的出口（80）的出口（80），叶轮叶片（84）可绕叶轮鼓风机（98）的平面围绕旋转轴线（88）旋转，叶轮鼓风机 98）可以相对于出口（96）的平面倾斜。 叶轮叶片（84）可以与连接到面向秸秆切碎机（60）的出口（80）的锥体（94）连接的中心体（92）连接。

公开(公告)号：US07449416B2

公开(公告)日：2008-11-11

申请号：US11217247

申请日：2005-09-01

Applicant: Alan F. Becknell ,  Philip Hammar ,  David Ferris

Inventor： Alan F. Becknell ,  Philip Hammar ,  David Ferris

IPC: H01L21/302

CPC classification number: H01L21/31138 ,  G03F7/427 ,  H01J37/32192 ,  H01J37/32449 ,  H01J37/32522 ,  H01J2237/3342 ,  H01L21/0206 ,  H01L21/76814

Abstract: A plasma ashing process for removing photoresist material and post etch residues from a substrate comprising carbon, hydrogen, or a combination of carbon and hydrogen, wherein the substrate comprises a low k dielectric layer, the process comprising forming a plasma from an essentially oxygen free and nitrogen free gas mixture; introducing the plasma into a process chamber, wherein the process chamber comprises a baffle plate assembly in fluid communication with the plasma; flowing the plasma through the baffle plate assembly and removing photoresist material, post etch residues, and volatile byproducts from the substrate; periodically cleaning the process chamber by introducing an oxygen plasma into the process chamber; and cooling the baffle plate assembly by flowing a cooling gas over the baffle plate assembly. A process chamber adapted for receiving downstream plasma, the process chamber comprising an upper baffle plate comprising at least one thermally conductive standoff in thermal communication with a wall of the process chamber; and a lower baffle plate spaced apart from the upper baffle plate.

Abstract translation: 一种用于去除光致抗蚀剂材料并从包括碳，氢或碳和氢的组合的衬底后蚀刻残留物的等离子体灰化过程，其中所述衬底包括低k电介质层，所述方法包括从基本上不含氧形成等离子体， 无氮气体混合物; 将等离子体引入处理室，其中处理室包括与等离子体流体连通的挡板组件; 使等离子体流过挡板组件并从衬底去除光致抗蚀剂材料，后蚀刻残余物和挥发性副产物; 通过将氧等离子体引入处理室来定期清洁处理室; 并通过将冷却气体流过挡板组件来冷却挡板组件。 处理室适于接收下游等离子体，所述处理室包括上挡板，所述上挡板包括与所述处理室的壁热连通的至少一个导热支座; 以及与上挡板间隔开的下挡板。

公开(公告)号：US06460318B1

公开(公告)日：2002-10-08

申请号：US09359537

申请日：1999-07-22

Applicant: David Ferris ,  Todd B. Gordon ,  Henry Nordberg

Inventor： David Ferris ,  Todd B. Gordon ,  Henry Nordberg

IPC: A01D3403

CPC classification number: A01D34/64 ,  A01D2101/00 ,  B60G3/01 ,  B60G2200/144 ,  B60G2204/124 ,  B60G2204/148 ,  B60G2204/4232 ,  B60G2206/50 ,  B60G2300/084 ,  Y10S56/10

Abstract: A lawn mower includes a front wheel suspension system as well as a rear wheel suspension system. The front wheel suspension system includes upper and lower suspension struts that are pivotably connected between a main frame of the lawn mower and a longitudinal suspension strut that is connected to a front wheel. A spring is connected between an extension of the upper suspension strut and a front transverse member of the main frame. The rear wheel suspension system includes upper and lower links that are pivotably connected between vertical struts that are connected between upper and lower frame members of the main frame and a motor mount. A spring is connected between a spring bracket extending from the upper frame member and either the motor mount or a motor mounted in the motor mount. In order to prevent scalping while turning, a floating cutter deck is suspended from the front and rear wheel suspension systems rather than from the main frame or chassis of the mower. An alternative embodiment includes a hinged pivoting subframe with springs between the main frame and the left and right halves of the subframe. In this alternative embodiment, the front of the cutter deck is suspended from the main frame while the rear of the cutter deck is suspended from the rear wheel suspension system.

Abstract translation: 割草机包括前轮悬挂系统以及后轮悬挂系统。 前轮悬挂系统包括上和下悬架支杆，其可枢转地连接在割草机的主框架和连接到前轮的纵向悬架支柱之间。 弹簧连接在上悬架支柱的延伸部和主框架的前横向构件之间。 后轮悬挂系统包括上连杆和下连杆，其可枢转地连接在连接在主框架的上框架构件和下框架构件之间的垂直支柱和马达座之间。 在从上框架构件延伸的弹簧支架和安装在电动机支架中的电动机支架或电动机之间连接弹簧。 为了防止在转动时发生烫伤，浮动的切割机板从前轮和后轮悬挂系统而不是从割草机的主机架或底盘悬挂起来。 替代实施例包括铰链枢转子框架，其具有在主框架和子框架的左半部和右半部之间的弹簧。 在该替代实施例中，刀架的前部从主框架悬挂，而刀架的后部从后轮悬挂系统悬挂。

公开(公告)号：US20050241767A1

公开(公告)日：2005-11-03

申请号：US10836516

申请日：2004-04-30

Applicant: David Ferris ,  Aseem Srivastava ,  Maw Tun

Inventor： David Ferris ,  Aseem Srivastava ,  Maw Tun

IPC: C23F1/00 ,  H01J37/00 ,  H01J37/32

CPC classification number: H01J37/32623 ,  H01J37/3244 ,  H01J37/32633

Abstract: A plasma processing system includes at least one multi-piece baffle plate. The multi-piece baffle plate assembly generally comprises at least one annular shaped ring portion having an opening and an insert portion dimensioned to sit within the opening. The individual pieces can be formed of a ceramic material. The effects caused by thermal gradients in the plate during plasma processing are minimized.

Abstract translation: 等离子体处理系统包括至少一个多件挡板。 多件式挡板组件通常包括至少一个环形环部分，其具有开口和尺寸适于位于开口内的插入部分。 各个片可以由陶瓷材料形成。 在等离子体处理期间由板中的热梯度引起的影响被最小化。

公开(公告)号：US06510678B2

公开(公告)日：2003-01-28

申请号：US09879800

申请日：2001-06-12

Applicant: David Ferris ,  William Shea ,  Henry Nordberg

Inventor： David Ferris ,  William Shea ,  Henry Nordberg

IPC: A01D3403

CPC classification number: A01D34/64 ,  A01D2101/00 ,  B60B33/0005 ,  B60B33/0015 ,  B60B33/0039 ,  B60B33/0049 ,  B60B33/0057 ,  B60B33/0068 ,  B60B33/0073 ,  B60G3/01 ,  B60G3/18 ,  B60G11/16 ,  B60G2200/144 ,  B60G2204/124 ,  B60G2204/148 ,  B60G2204/4232 ,  B60G2206/50 ,  B60G2300/084 ,  Y10S56/03

Abstract: A lawn mower includes a front wheel suspension system as well as a rear wheel suspension system. A load compensation adjuster is employed as part of the rear wheel suspension system that compensates for riders having significantly differing weights, as well as for weight changes occurring during the mowing operation, such as from grass clippings accumulating in a grass catcher bag.

公开(公告)号：US20110053668A1

公开(公告)日：2011-03-03

申请号：US12547604

申请日：2009-08-26

Applicant: Dirk Weichholdt ,  Rico Priesnitz ,  Friedrich K Lauer ,  Oliver Klein ,  Chad Allen Dow ,  Joel David Ferris

Inventor： Dirk Weichholdt ,  Rico Priesnitz ,  Friedrich K Lauer ,  Oliver Klein ,  Chad Allen Dow ,  Joel David Ferris

IPC: A01F12/40

CPC classification number: A01D41/1243 ,  A01F12/40

Abstract: A harvested crop residue chopper—and distribution arrangement for a combine (10) has a straw chopper (60) with an outlet (80) arranged in the plane of the outlet (96), with at least one impeller blower (82) arranged downstream of the outlet (80) of the straw chopper (60) with impeller blades (84) that can be rotated in the plane of the impeller blower (98) about an axis of rotation (88), where the plane of the impeller blower (98) may be inclined relative to the plane of the outlet (96). The impeller blades (84) make be connected with a central body (92) that is connected to a cone (94) facing the outlet (80) of the straw chopper (60).

Abstract translation: 用于组合（10）的收获的作物残渣斩波器和分配装置具有秸秆切碎机（60），排出口（80）布置在出口（96）的平面中，至少一个叶轮鼓风机（82）布置在下游 （84）的叶轮（84）的出口（80）的出口（80），叶轮叶片（84）可绕叶轮鼓风机（98）的平面围绕旋转轴线（88）旋转，叶轮鼓风机 98）可以相对于出口（96）的平面倾斜。 叶轮叶片84与中心体92连接，该中心体连接到面向秸秆切碎机60的出口（80）的锥体（94）。