公开(公告)号：US06696679B1

公开(公告)日：2004-02-24

申请号：US09446463

申请日：2000-04-12

申请人： Michael Graef ,  Uwe Graf ,  Joachim Wienecke ,  Guenter Hoffmann ,  Karl-Heinz Franke ,  Lutz Jakob

发明人： Michael Graef ,  Uwe Graf ,  Joachim Wienecke ,  Guenter Hoffmann ,  Karl-Heinz Franke ,  Lutz Jakob

IPC分类号： G02B2740

CPC分类号： G02B21/244 ,  G01N21/8851 ,  G01N21/9506

摘要： A method for focusing on disk-shaped objects with patterned and unpatterned surfaces includes imaging of the patterned and unpatterned surfaces on a disk-shaped object for defect detection and defect classification by using various preset values of a focus regulation system to acquire the image sequence. At least one preset value is learned on the basis of an image sequence at least at one position in a substantially flat reference region of the surface of the disk-shaped object. A regulated adjustment is provided of a measurable distance from a carrier plane to a reference plane, wherein the carrier plane serves as a support for the disk-shaped objects. The distance is adjusted by applying the at least one preset value, which is overlaid on the regulation system, a focus state is evaluated by an image processor according to at least one rule, and the at least one preset value is ascertained therefrom.

摘要翻译： 用于聚焦在具有图案化和未图案化表面的盘形物体的方法包括通过使用聚焦调节系统的各种预设值来获取图像序列，将用于缺陷检测和缺陷分类的图案化和未图案化表面成像在盘形物体上。 基于至少在盘状物体的表面的基本上平坦的参考区域的一个位置处的图像序列来学习至少一个预设值。 提供了从载体平面到参考平面的可测量距离的调节调节，其中载体平面用作盘形物体的支撑。 通过应用覆盖在调节系统上的至少一个预设值来调整距离，根据至少一个规则由图像处理器评估聚焦状态，并且从其确定至少一个预设值。

公开(公告)号：US06504608B2

公开(公告)日：2003-01-07

申请号：US09748339

申请日：2000-12-26

申请人： Klaus Hallmeyer ,  Joachim Wienecke ,  Guenter Hoffmann

发明人： Klaus Hallmeyer ,  Joachim Wienecke ,  Guenter Hoffmann

IPC分类号： G01J400

CPC分类号： G03F9/7034 ,  G01B11/0641 ,  G01N21/211

摘要： An optical measurement arrangement includes an ellipsometer (45) and a device for ascertaining and correcting directional deviations between the line normal to the specimen surface and the angle bisector (25) between the incident and return beams (23, 24) of the ellipsometer (45). A measurement arrangement includes a mirror objective and a device for ascertaining directional deviations between the line normal to the specimen surface and the optical axis of the mirror objective, which has a deflection element in the unused aperture space of the mirror objective. A direction monitoring beam (30) is directed onto the specimen (P). An optical element for imaging the return reflection of the direction monitoring beam (30) onto an area detector that is connected to an evaluation circuit (46) is also provided. Positioning commands for a specimen stage (12) are available at the outputs of the evaluation circuit (46). By way of the control commands, the specimen stage is caused to tilt until the return reflection on the area detector has assumed the position at which the direction of the normal line corresponds to the direction of the angle bisector (25).

摘要翻译： 光学测量装置包括椭偏仪（45）和用于确定和校正与样品表面垂直的线与椭圆偏振仪（45）的入射和返回光束（23,24）之间的角度平分线（25）之间的方向偏差的装置， ）。 测量装置包括镜面物镜和用于确定在垂直于样品表面的线与反射镜物镜的光轴之间的方向偏差的装置，其在镜面物镜的未使用的孔径空间中具有偏转元件。 方向监测光束（30）被引导到样本（P）上。 还提供了用于将方向监视光束（30）的反射成像到连接到评估电路（46）的区域检测器上的光学元件。 在评估电路（46）的输出处提供用于样品台（12）的定位命令。 通过控制命令，使样本台倾斜直到区域检测器上的返回反射已经假定法线方向对应于角平分线（25）的方向的位置。

公开(公告)号：USPP5312P

公开(公告)日：1984-10-30

申请号：US477944

申请日：1983-03-23

申请人： Guenter Hoffmann

发明人： Guenter Hoffmann

摘要： A new geranium cultivar is distinguished by its pure white color, short and compact plant, more basil branching, close internodes, small leaves and short flower stems with the flowers positioned immediately atop the foliage. The new cultivar is further distinguished by its early flowering and its floriferousness as compared with commonly grown zonal geraniums.