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    Method for focusing of disk-shaped objects with patterned surfaces during imaging
    1.
    发明授权
    Method for focusing of disk-shaped objects with patterned surfaces during imaging 失效
    在成像期间用盘状物体聚焦图案化表面的方法

    公开(公告)号：US06696679B1

    公开(公告)日：2004-02-24

    申请号：US09446463

    申请日：2000-04-12

    申请人： Michael Graef ,  Uwe Graf ,  Joachim Wienecke ,  Guenter Hoffmann ,  Karl-Heinz Franke ,  Lutz Jakob

    发明人： Michael Graef ,  Uwe Graf ,  Joachim Wienecke ,  Guenter Hoffmann ,  Karl-Heinz Franke ,  Lutz Jakob

    IPC分类号： G02B2740

    CPC分类号： G02B21/244 ,  G01N21/8851 ,  G01N21/9506

    摘要： A method for focusing on disk-shaped objects with patterned and unpatterned surfaces includes imaging of the patterned and unpatterned surfaces on a disk-shaped object for defect detection and defect classification by using various preset values of a focus regulation system to acquire the image sequence. At least one preset value is learned on the basis of an image sequence at least at one position in a substantially flat reference region of the surface of the disk-shaped object. A regulated adjustment is provided of a measurable distance from a carrier plane to a reference plane, wherein the carrier plane serves as a support for the disk-shaped objects. The distance is adjusted by applying the at least one preset value, which is overlaid on the regulation system, a focus state is evaluated by an image processor according to at least one rule, and the at least one preset value is ascertained therefrom.

    摘要翻译： 用于聚焦在具有图案化和未图案化表面的盘形物体的方法包括通过使用聚焦调节系统的各种预设值来获取图像序列，将用于缺陷检测和缺陷分类的图案化和未图案化表面成像在盘形物体上。 基于至少在盘状物体的表面的基本上平坦的参考区域的一个位置处的图像序列来学习至少一个预设值。 提供了从载体平面到参考平面的可测量距离的调节调节，其中载体平面用作盘形物体的支撑。 通过应用覆盖在调节系统上的至少一个预设值来调整距离，根据至少一个规则由图像处理器评估聚焦状态，并且从其确定至少一个预设值。

    Method for detection of defects in the inspection of structured surfaces
    2.
    发明授权
    Method for detection of defects in the inspection of structured surfaces 失效
    检测结构化表面缺陷的方法

    公开(公告)号：US6075880A

    公开(公告)日：2000-06-13

    申请号：US395668

    申请日：1995-02-28

    申请人： Dietmar Kollhof ,  Joachim Wienecke ,  Karl-Heinz Franke ,  Michael Graef ,  Heiko Kempe

    发明人： Dietmar Kollhof ,  Joachim Wienecke ,  Karl-Heinz Franke ,  Michael Graef ,  Heiko Kempe

    IPC分类号： G01B11/24 ,  G01B11/30 ,  G01N21/88 ,  G01R31/308 ,  G06T1/00 ,  G06T7/00 ,  H01L21/66 ,  G06K9/00

    CPC分类号： G06T7/0004 ,  G01N21/8851 ,  G01R31/308 ,  G06T2207/20076 ,  G06T2207/30141 ,  G06T2207/30148

    摘要： The object of a method for detecting defects in the inspection of structured surfaces is to ensure a detection of defects which is not dependent on the number of structuring planes and includes structure features in real-time operation for separating defects from good structures. From image point classification in which zones of a recorded image which have similar image point features are assembled, a gray-value intermediate image containing edge structures and corner structures is generated from the image and the behavior of the image point features of every image point in the intermediate image is analyzed with respect to its neighboring image points. The method is used predominantly in statistical process control in the production process of masks, LCD's, printed circuit boards and semiconductor wafers.

    摘要翻译： 用于检测结构化表面检查中的缺陷的方法的目的是确保检测不依赖于结构平面数量的缺陷，并且包括用于将缺陷与良好结构分离的实时操作中的结构特征。 从具有类似图像点特征的记录图像的区域的图像点分类，从图像生成包含边缘结构和角结构的灰度值中间图像，并且从每个图像点的图像点特征的行为生成 相对于其相邻图像点分析中间图像。 该方法主要用于掩模，LCD，印刷电路板和半导体晶片的生产过程中的统计过程控制。

    Optical data bus for a vehicle
    7.
    发明授权
    Optical data bus for a vehicle 失效
    汽车光数据总线

    公开(公告)号：US06501577B1

    公开(公告)日：2002-12-31

    申请号：US09360158

    申请日：1999-07-26

    申请人： Michael Graef

    发明人： Michael Graef

    IPC分类号： H04B1000

    CPC分类号： H04B10/25

    摘要： In an optical data bus for a vehicle with transmit/receive units (TRUs) that exchange data messages over optical connecting lines and are supplied with electrical energy, the receiving TRU can be deactivated to reduce energy consumption and then reactivated for a short time. The transmitting TRU emits a light pulse whose length is greater than the duration of its resting phase.

    摘要翻译： 在具有通过光学连接线交换数据消息并且被提供有电能的发射/接收单元（TRU）的车辆的光学数据总线中，可以停用接收TRU以减少能量消耗，然后在短时间内重新激活。 发射TRU发出长度大于其静止阶段持续时间的光脉冲。