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    Transmission line driven slot waveguide mach-zehnder interferometers
    1.
    发明授权
    Transmission line driven slot waveguide mach-zehnder interferometers 有权
    传输线驱动槽波导马赫 - 泽德干涉仪

    公开(公告)号：US08818141B1

    公开(公告)日：2014-08-26

    申请号：US13169882

    申请日：2011-06-27

    申请人： Michael J. Hochberg ,  Tom Baehr-Jones ,  Jeremy Witzens

    发明人： Michael J. Hochberg ,  Tom Baehr-Jones ,  Jeremy Witzens

    IPC分类号： G02F1/035 ,  G02F1/225

    CPC分类号： H04B10/505

    摘要： A Mach-Zehnder interferometer useful for analog or digital optical signal manipulation. In one example, the MZI is configured as an optical device that provides a balanced output. In another example, the MZI is configured as an optical device that provides a single ended output. Each device uses a silicon split or slotted wave guide having an electro-optically active material present within the slot. The balanced output device uses two slotted wave guides in push-pull configuration.

    摘要翻译： 用于模拟或数字光信号操作的马赫 - 曾德干涉仪。 在一个示例中，MZI被配置为提供平衡输出的光学设备。 在另一个示例中，MZI被配置为提供单端输出的光学器件。 每个器件使用具有存在于槽内的电光活性材料的硅分裂或开槽波导。 平衡输出设备采用推拉式配置的两个槽形波导。

    Silicon-graphene waveguide photodetectors, optically active elements and microelectromechanical devices
    4.
    发明授权
    Silicon-graphene waveguide photodetectors, optically active elements and microelectromechanical devices 有权
    硅 - 石墨烯波导光电探测器，光学活性元件和微机电器件

    公开(公告)号：US08554022B1

    公开(公告)日：2013-10-08

    申请号：US12974932

    申请日：2010-12-21

    申请人： Michael J. Hochberg ,  Jeremy Witzens

    发明人： Michael J. Hochberg ,  Jeremy Witzens

    IPC分类号： G02F1/01

    CPC分类号： H01L29/808 ,  B82Y10/00 ,  G02F1/218 ,  G02F1/35 ,  G02F2203/15 ,  H01L29/1606 ,  H01L29/66977 ,  H01L29/7781 ,  H01L29/84 ,  H01L31/028 ,  Y02E10/547

    摘要： Systems and methods for modulating light with light in high index contrast waveguides clad with graphene. Graphene exhibits a large nonlinear electro-optic constant χ3. Waveguides fabricated on SOI wafers and clad with graphene are described. Systems and methods for modulating light with light are discussed. Optical logic gates are described. Waveguides having closed loop structures such as rings and ovals, Mach-Zehnder interferometer, grating, and Fabry-Perot configurations, are described. Optical signal processing methods, including optical modulation at Terahertz frequencies, are disclosed. Optical detectors are described. Microelectromechanical and nanoelectromechanical systems using graphene on silicon substrates are described.

    摘要翻译： 用石墨烯包覆的高折射率对比波导中用光调制光的系统和方法。 石墨烯表现出大的非线性电光常数chi3。 描述了在SOI晶片上制造并用石墨烯包覆的波导。 讨论了用光调制光的系统和方法。 描述光逻辑门。 描述了具有闭环结构的波导如环和椭圆形，马赫 - 曾德干涉仪，光栅和法布里 - 珀罗配置。 公开了包括在太赫兹频率下的光调制的光信号处理方法。 描述光学检测器。 描述了在硅衬底上使用石墨烯的微机电和纳米机电系统。

    Fabricating waveguides in conjunction with interconnect fabrication in back-ends of integrated circuits and structures thereof
    5.
    发明授权
    Fabricating waveguides in conjunction with interconnect fabrication in back-ends of integrated circuits and structures thereof 失效
    结合集成电路后端的互连制造及其结构制造波导

    公开(公告)号：US08761552B1

    公开(公告)日：2014-06-24

    申请号：US12963488

    申请日：2010-12-08

    申请人： Michael J. Hochberg ,  Jeremy Witzens

    发明人： Michael J. Hochberg ,  Jeremy Witzens

    IPC分类号： G02B6/12 ,  G02B6/122

    CPC分类号： G02B6/1225 ,  G02B6/12 ,  G02B6/136 ,  H01L21/76801 ,  H01L21/76838

    摘要： Methods for fabricating waveguides in conjunction with interconnect fabrication in back-ends of integrated circuits and structures thereof are disclosed. One method for forming a waveguide in accordance with one embodiment of the disclosure comprises selectively etching a dielectric layer and forming of a core region of a waveguide at a back-end of an integrated circuit. The dielectric layer is material deposited during a cycle of fabrication of the back-end of the integrated circuit. The method further includes depositing a material having a dielectric constant that is suitable to be the core region of the waveguide cladded by the dielectric layer over the dielectric layer and into the etched feature for the core region of the waveguide, and planarizing a surface of the material.

    摘要翻译： 公开了结合集成电路后端的互连制造及其结构的波导制造方法。 根据本公开的一个实施例的用于形成波导的一种方法包括在集成电路的后端选择性地蚀刻介电层和形成波导的芯区域。 电介质层是在集成电路的后端的制造周期期间材料沉积的。 该方法还包括沉积具有介电常数的材料，该介电常数适合于由电介质层包覆的波导的芯区域在介电层上并进入用于波导芯部区域的蚀刻特征，并平坦化 材料。

    Integrated control system for laser and Mach-Zehnder interferometer
    7.
    发明授权
    Integrated control system for laser and Mach-Zehnder interferometer 有权
    激光和马赫 - 策德尔干涉仪的集成控制系统

    公开(公告)号：US07916377B2

    公开(公告)日：2011-03-29

    申请号：US12611584

    申请日：2009-11-03

    申请人： Jeremy Witzens ,  Behnam Analui ,  Sina Mirsaidi ,  Thiruvikraman Sadagopan ,  Brian Welch ,  Adithyaram Narasimha

    发明人： Jeremy Witzens ,  Behnam Analui ,  Sina Mirsaidi ,  Thiruvikraman Sadagopan ,  Brian Welch ,  Adithyaram Narasimha

    IPC分类号： G02B26/00 ,  G02B26/08 ,  G02B6/10

    CPC分类号： G02F1/0123 ,  G02F1/225 ,  H04B10/50575

    摘要： An integrated control system for a laser and Mach-Zehnder interferometer are disclosed and may include configuring a bias point for low-speed control of an optical modulator utilizing control circuitry integrated on the same CMOS die. The optical modulator may be differentially monitored. A laser source for the modulator may be controlled utilizing monitor photodiodes via optical taps on outputs of the modulator, or utilizing a monitor photodiode on one output port of the modulator, which may comprise a Mach-Zehnder interferometer. An error signal may be generated by subtracting monitor photodiode signals from optical taps on output ports of the modulator. The bias point of the modulator may be adjusted by minimizing the error signal. Calibration time of the bias point may be reduced utilizing electronic data inversion. An output of the modulator may comprise a Y-junction and a single monitor photodiode may measure both branches of the modulator.

    摘要翻译： 公开了一种用于激光和马赫 - 策德尔干涉仪的集成控制系统，并且可以包括使用集成在同一CMOS芯片上的控制电路来配置用于低速控制光调制器的偏置点。 可以差别地监视光学调制器。 用于调制器的激光源可以通过调制器的输出端上的光学抽头利用监视器光电二极管来控制，或者利用调制器的一个输出端口上的监视器光电二极管，该监视器光电二极管可以包括马赫 - 曾德干涉仪。 可以通过从调制器的输出端口上的光学抽头减去监视器光电二极管信号来产生误差信号。 可以通过使误差信号最小化来调整调制器的偏置点。 使用电子数据反演可以减少偏置点的校准时间。 调制器的输出可以包括Y结，并且单个监视器光电二极管可以测量调制器的两个分支。

    INTEGRATED CONTROL SYSTEM FOR LASER AND MACH-ZEHNDER INTERFEROMETER
    8.
    发明申请
    INTEGRATED CONTROL SYSTEM FOR LASER AND MACH-ZEHNDER INTERFEROMETER 有权
    用于激光和MACH-ZEHNDER干涉仪的集成控制系统

    公开(公告)号：US20100128336A1

    公开(公告)日：2010-05-27

    申请号：US12611584

    申请日：2009-11-03

    申请人： Jeremy Witzens ,  Behnam Analui ,  Sina Mirsaidi ,  Thiruvikraman Sadagopan ,  Brian Welch ,  Adithyaram Narasimha

    发明人： Jeremy Witzens ,  Behnam Analui ,  Sina Mirsaidi ,  Thiruvikraman Sadagopan ,  Brian Welch ,  Adithyaram Narasimha

    IPC分类号： G02F1/015

    CPC分类号： G02F1/0123 ,  G02F1/225 ,  H04B10/50575

    摘要： An integrated control system for a laser and Mach-Zehnder interferometer are disclosed and may include configuring a bias point for low-speed control of an optical modulator utilizing control circuitry integrated on the same CMOS die. The optical modulator may be differentially monitored. A laser source for the modulator may be controlled utilizing monitor photodiodes via optical taps on outputs of the modulator, or utilizing a monitor photodiode on one output port of the modulator, which may comprise a Mach-Zehnder interferometer. An error signal may be generated by subtracting monitor photodiode signals from optical taps on output ports of the modulator. The bias point of the modulator may be adjusted by minimizing the error signal. Calibration time of the bias point may be reduced utilizing electronic data inversion. An output of the modulator may comprise a Y-junction and a single monitor photodiode may measure both branches of the modulator.

    摘要翻译： 公开了一种用于激光和马赫 - 策德尔干涉仪的集成控制系统，并且可以包括使用集成在同一CMOS芯片上的控制电路来配置用于低速控制光调制器的偏置点。 可以差别地监视光学调制器。 用于调制器的激光源可以通过调制器的输出端上的光学抽头利用监视器光电二极管来控制，或者利用调制器的一个输出端口上的监视器光电二极管，该监视器光电二极管可以包括马赫 - 曾德干涉仪。 可以通过从调制器的输出端口上的光学抽头减去监视器光电二极管信号来产生误差信号。 可以通过使误差信号最小化来调整调制器的偏置点。 使用电子数据反演可以减少偏置点的校准时间。 调制器的输出可以包括Y结，并且单个监视器光电二极管可以测量调制器的两个分支。