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公开(公告)号：US06421409B1
公开(公告)日：2002-07-16
申请号：US09496879
申请日：2000-02-02
申请人： Michael J. Paulus , Hamed Sari-Sarraf , Kenneth William Tobin, Jr. , Shaun S. Gleason , Clarence E. Thomas, Jr.
发明人： Michael J. Paulus , Hamed Sari-Sarraf , Kenneth William Tobin, Jr. , Shaun S. Gleason , Clarence E. Thomas, Jr.
IPC分类号： A61B603
CPC分类号： G01T1/29 , Y10S378/901
摘要： A method for ultra-high resolution computed tomography imaging, comprising the steps of: focusing a high energy particle beam, for example x-rays or gamma-rays, onto a target object; acquiring a 2-dimensional projection data set representative of the target object; generating a corrected projection data set by applying a deconvolution algorithm, having an experimentally determined a transfer function, to the 2-dimensional data set; storing the corrected projection data set; incrementally rotating the target object through an angle of approximately 180°, and after each the incremental rotation, repeating the radiating, acquiring, generating and storing steps; and, after the rotating step, applying a cone-beam algorithm, for example a modified tomographic reconstruction algorithm, to the corrected projection data sets to generate a 3-dimensional image. The size of the spot focus of the beam is reduced to not greater than approximately 1 micron, and even to not greater than approximately 0.5 microns.
摘要翻译： 一种用于超高分辨率计算机断层摄影成像的方法，包括以下步骤：将高能粒子束（例如x射线或γ射线）聚焦到目标物体上; 获取代表目标对象的二维投影数据集; 通过将具有实验确定的传递函数的去卷积算法应用于所述二维数据集来生成校正投影数据集; 存储校正的投影数据集; 逐渐旋转目标物体大约180°的角度，并且在每次增量旋转之后，重复辐射，获取，产生和存储步骤; 并且在旋转步骤之后，将锥束算法（例如修改的断层摄影重建算法）应用于校正的投影数据集以生成三维图像。 光束的焦点尺寸减小到不大于约1微米，甚至不大于约0.5微米。
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2.发明授权Automated defect spatial signature analysis for semiconductor manufacturing process 失效半导体制造工艺自动缺陷空间特征分析
公开(公告)号：US5982920A
公开(公告)日：1999-11-09
申请号：US780569
申请日：1997-01-08
CPC分类号： G06T7/0004 , G06T2207/30148
摘要： An apparatus and method for performing automated defect spatial signature alysis on a data set representing defect coordinates and wafer processing information includes categorizing data from the data set into a plurality of high level categories, classifying the categorized data contained in each high level category into user-labeled signature events, and correlating the categorized, classified signature events to a present or incipient anomalous process condition.
摘要翻译： 对表示缺陷坐标和晶片处理信息的数据集执行自动缺陷空间特征分析的装置和方法包括将数据集中的数据分类为多个高级类别，将包含在每个高级类别中的分类数据分类为用户 - 标记的签名事件，并将分类的分类签名事件与当前或初始的异常过程条件相关联。
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3.发明授权Method for non-referential defect characterization using fractal encoding and active contours 有权使用分形编码和主动轮廓的非参考缺陷表征方法公开(公告)号：US07218772B2
公开(公告)日：2007-05-15
申请号：US10166296
申请日：2002-06-10
IPC分类号： G06K9/00
CPC分类号： G06K9/6207 , G06T7/0004 , G06T7/12 , G06T7/149 , G06T7/73 , G06T2207/10056 , G06T2207/30148
摘要： A method for identification of anomalous structures, such as defects, includes the steps of providing a digital image and applying fractal encoding to identify a location of at least one anomalous portion of the image. The method does not require a reference image to identify the location of the anomalous portion. The method can further include the step of initializing an active contour based on the location information obtained from the fractal encoding step and deforming an active contour to enhance the boundary delineation of the anomalous portion.
摘要翻译： 用于识别诸如缺陷的异常结构的方法包括提供数字图像并应用分形编码以识别图像的至少一个异常部分的位置的步骤。 该方法不需要参考图像来识别异常部分的位置。 该方法还可以包括基于从分形编码步骤获得的位置信息来初始化活动轮廓并使活动轮廓变形以增强异常部分的边界描绘的步骤。
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4.发明授权Context-based automated defect classification system using multiple morphological masks 失效基于上下文的自动缺陷分类系统使用多种形态掩模公开(公告)号：US06456899B1
公开(公告)日：2002-09-24
申请号：US09454568
申请日：1999-12-07
IPC分类号： G06F1900
CPC分类号： G03F7/7065 , G05B19/41875 , G05B2219/32186 , G05B2219/32196 , G05B2219/45031 , Y02P90/22 , Y10S706/90
摘要： Automatic detection of defects during the fabrication of semiconductor wafers is largely automated, but the classification of those defects is still performed manually by technicians. This invention includes novel digital image analysis techniques that generate unique feature vector descriptions of semiconductor defects as well as classifiers that use these descriptions to automatically categorize the defects into one of a set of pre-defined classes. Feature extraction techniques based on multiple-focus images, multiple-defect mask images, and segmented semiconductor wafer images are used to create unique feature-based descriptions of the semiconductor defects. These feature-based defect descriptions are subsequently classified by a defect classifier into categories that depend on defect characteristics and defect contextual information, that is, the semiconductor process layer(s) with which the defect comes in contact. At the heart of the system is a knowledge database that stores and distributes historical semiconductor wafer and defect data to guide the feature extraction and classification processes. In summary, this invention takes as its input a set of images containing semiconductor defect information, and generates as its output a classification for the defect that describes not only the defect itself, but also the location of that defect with respect to the semiconductor process layers.
摘要翻译： 在制造半导体晶片期间自动检测缺陷大部分是自动化的，但是这些缺陷的分类仍由技术人员手动执行。 本发明包括生成半导体缺陷的唯一特征向量描述的新型数字图像分析技术以及使用这些描述来自动将缺陷分类为一组预定义类别的分类器。 使用基于多焦点图像，多缺陷掩模图像和分段半导体晶片图像的特征提取技术来创建关于半导体缺陷的独特的基于特征的描述。 这些基于特征的缺陷描述随后由缺陷分类器分类为依赖于缺陷特性和缺陷上下文信息的类别，即与缺陷接触的半导体处理层。 系统的核心是存储和分发历史半导体晶圆和缺陷数据的知识数据库，用于指导特征提取和分类过程。 总而言之，本发明将其包含半导体缺陷信息的图像作为其输入，并且作为其输出生成不仅描述缺陷本身的缺陷的分类，还产生相对于半导体处理层的该缺陷的位置 。
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公开(公告)号：US06399951B1
公开(公告)日：2002-06-04
申请号：US09496880
申请日：2000-02-02
IPC分类号： G01T1161
CPC分类号： A61B6/482 , A61B6/032 , A61B6/037 , A61B6/4035 , A61B6/4092 , A61B6/4241 , A61B6/4417 , A61B6/508 , A61B6/5235 , G01T1/1648
摘要： A method for simultaneous transmission x-ray computed tomography (CT) and single photon emission tomography (SPECT) comprises the steps of: injecting a subject with a tracer compound tagged with a &ggr;-ray emitting nuclide; directing an x-ray source toward the subject; rotating the x-ray source around the subject; emitting x-rays during the rotating step; rotating a cadmium zinc telluride (CZT) two-sided detector on an opposite side of the subject from the source; simultaneously detecting the position and energy of each pulsed x-ray and each emitted &ggr;-ray captured by the CZT detector; recording data for each position and each energy of each the captured x-ray and &ggr;-ray; and, creating CT and SPECT images from the recorded data. The transmitted energy levels of the x-rays lower are biased lower than energy levels of the &ggr;-rays. The x-ray source is operated in a continuous mode. The method can be implemented at ambient temperatures.
摘要翻译： 用于同时透射x射线计算机断层摄影（CT）和单光子发射断层摄影（SPECT）的方法包括以下步骤：用标有伽马射线放射核素的示踪剂化合物注射受试者; 将x射线源引导到受试者; 围绕主体旋转x射线源; 在旋转步骤期间发射X射线; 在来自对象的另一侧旋转碲化锌碲化镉（CZT）双面检测器; 同时检测每个脉冲X射线的位置和能量以及由CZT检测器捕获的每个发射的γ射线; 记录每个位置的数据和每个捕获的X射线和γ射线的每个能量; 并从记录的数据创建CT和SPECT图像。 x射线的透射能级低于伽马射线的能级。 x射线源以连续模式运行。 该方法可以在环境温度下实现。
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6.发明授权Method for identification of cotton contaminants with x-ray microtomographic image analysis 失效用x射线显微图像分析鉴定棉花污染物的方法公开(公告)号：US06870897B2
公开(公告)日：2005-03-22
申请号：US10294034
申请日：2002-11-14
申请人： Hamed Sari-Sarraf , Eric F. Hequet , Ajay Pai
发明人： Hamed Sari-Sarraf , Eric F. Hequet , Ajay Pai
CPC分类号： G01N23/046 , G01N33/362 , G01N2223/419
摘要： A cotton sample is subjected to noninvasive x-ray microtomographic image analysis in order to recognize cotton contaminants in the cotton sample. The cotton contaminants are detected and classified using an x-ray microtomographic system. Once the cotton contaminants in the cotton sample are detected and classified, the cotton sample may be graded based on the type and amount of cotton contaminants present.
摘要翻译： 对棉花样品进行无创X射线显微图像分析，以识别棉花样品中的棉花污染物。 使用x射线显微镜系统检测和分类棉花污染物。 一旦棉花样本中的棉花污染物被检测和分类，棉花样品可以根据存在的棉花污染物的类型和数量进行分级。
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公开(公告)号：US06553133B1
公开(公告)日：2003-04-22
申请号：US09401102
申请日：1999-09-22
IPC分类号： G06K900
CPC分类号： G06T7/0004 , G01N21/89 , G06T2207/20064 , G06T2207/30124
摘要： A method and apparatus are provided by which a sheet-forming web may be characterized in four dimensions. Light images of the web are recorded at a point adjacent the initial stage of the web, for example, near the headbox in a paperforming operation. The images are digitized, and the resulting data is processed by novel algorithms to provide a four-dimensional measurement of the web. The measurements include two-dimensional spatial information, the intensity profile of the web, and the depth profile of the web. These measurements can be used to characterize the web, predict its properties and monitor production events, and to analyze and quantify headbox flow dynamics.
摘要翻译： 提供了一种方法和装置，通过该方法和装置可以在四维上表征片材形成纤维网。 在纸张的初始阶段，例如在造纸操作中的流浆箱附近，在幅材的光图像被记录。 图像被数字化，并且通过新颖的算法处理所得到的数据以提供网络的四维测量。 测量包括二维空间信息，幅材的强度分布以及幅材的深度分布。 这些测量可用于表征网络，预测其属性并监控生产事件，并分析和量化流浆箱流动动态。
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公开(公告)号：US07601978B2
公开(公告)日：2009-10-13
申请号：US10411359
申请日：2003-04-11
IPC分类号： G01L5/04
CPC分类号： D06H3/08 , G01N21/8903 , G01N21/8983
摘要： Fabric wrinkles are automatically evaluated using a reliable, accurate, affordable, and efficient system. Two algorithms are used, the facet model algorithm and the plane-cutting algorithm, to extract features for evaluating wrinkles in fabrics. These algorithms eliminate the need for independent evaluation of a fabric specimen by a technician.
摘要翻译： 使用可靠，准确，经济实惠的高效系统自动评估织物皱纹。 使用两种算法，小平面模型算法和平面切割算法，以提取用于评估织物皱纹的特征。 这些算法消除了技术人员对织物样本的独立评估的需要。
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