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公开(公告)号：US06421409B1
公开(公告)日：2002-07-16
申请号：US09496879
申请日：2000-02-02
申请人： Michael J. Paulus , Hamed Sari-Sarraf , Kenneth William Tobin, Jr. , Shaun S. Gleason , Clarence E. Thomas, Jr.
发明人： Michael J. Paulus , Hamed Sari-Sarraf , Kenneth William Tobin, Jr. , Shaun S. Gleason , Clarence E. Thomas, Jr.
IPC分类号： A61B603
CPC分类号： G01T1/29 , Y10S378/901
摘要： A method for ultra-high resolution computed tomography imaging, comprising the steps of: focusing a high energy particle beam, for example x-rays or gamma-rays, onto a target object; acquiring a 2-dimensional projection data set representative of the target object; generating a corrected projection data set by applying a deconvolution algorithm, having an experimentally determined a transfer function, to the 2-dimensional data set; storing the corrected projection data set; incrementally rotating the target object through an angle of approximately 180°, and after each the incremental rotation, repeating the radiating, acquiring, generating and storing steps; and, after the rotating step, applying a cone-beam algorithm, for example a modified tomographic reconstruction algorithm, to the corrected projection data sets to generate a 3-dimensional image. The size of the spot focus of the beam is reduced to not greater than approximately 1 micron, and even to not greater than approximately 0.5 microns.
摘要翻译： 一种用于超高分辨率计算机断层摄影成像的方法，包括以下步骤：将高能粒子束（例如x射线或γ射线）聚焦到目标物体上; 获取代表目标对象的二维投影数据集; 通过将具有实验确定的传递函数的去卷积算法应用于所述二维数据集来生成校正投影数据集; 存储校正的投影数据集; 逐渐旋转目标物体大约180°的角度，并且在每次增量旋转之后，重复辐射，获取，产生和存储步骤; 并且在旋转步骤之后，将锥束算法（例如修改的断层摄影重建算法）应用于校正的投影数据集以生成三维图像。 光束的焦点尺寸减小到不大于约1微米，甚至不大于约0.5微米。
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2.发明授权Automated defect spatial signature analysis for semiconductor manufacturing process 失效半导体制造工艺自动缺陷空间特征分析
公开(公告)号：US5982920A
公开(公告)日：1999-11-09
申请号：US780569
申请日：1997-01-08
CPC分类号： G06T7/0004 , G06T2207/30148
摘要： An apparatus and method for performing automated defect spatial signature alysis on a data set representing defect coordinates and wafer processing information includes categorizing data from the data set into a plurality of high level categories, classifying the categorized data contained in each high level category into user-labeled signature events, and correlating the categorized, classified signature events to a present or incipient anomalous process condition.
摘要翻译： 对表示缺陷坐标和晶片处理信息的数据集执行自动缺陷空间特征分析的装置和方法包括将数据集中的数据分类为多个高级类别，将包含在每个高级类别中的分类数据分类为用户 - 标记的签名事件，并将分类的分类签名事件与当前或初始的异常过程条件相关联。
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3.发明授权Method for non-referential defect characterization using fractal encoding and active contours 有权使用分形编码和主动轮廓的非参考缺陷表征方法公开(公告)号：US07218772B2
公开(公告)日：2007-05-15
申请号：US10166296
申请日：2002-06-10
IPC分类号： G06K9/00
CPC分类号： G06K9/6207 , G06T7/0004 , G06T7/12 , G06T7/149 , G06T7/73 , G06T2207/10056 , G06T2207/30148
摘要： A method for identification of anomalous structures, such as defects, includes the steps of providing a digital image and applying fractal encoding to identify a location of at least one anomalous portion of the image. The method does not require a reference image to identify the location of the anomalous portion. The method can further include the step of initializing an active contour based on the location information obtained from the fractal encoding step and deforming an active contour to enhance the boundary delineation of the anomalous portion.
摘要翻译： 用于识别诸如缺陷的异常结构的方法包括提供数字图像并应用分形编码以识别图像的至少一个异常部分的位置的步骤。 该方法不需要参考图像来识别异常部分的位置。 该方法还可以包括基于从分形编码步骤获得的位置信息来初始化活动轮廓并使活动轮廓变形以增强异常部分的边界描绘的步骤。
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4.发明授权Context-based automated defect classification system using multiple morphological masks 失效基于上下文的自动缺陷分类系统使用多种形态掩模公开(公告)号：US06456899B1
公开(公告)日：2002-09-24
申请号：US09454568
申请日：1999-12-07
IPC分类号： G06F1900
CPC分类号： G03F7/7065 , G05B19/41875 , G05B2219/32186 , G05B2219/32196 , G05B2219/45031 , Y02P90/22 , Y10S706/90
摘要： Automatic detection of defects during the fabrication of semiconductor wafers is largely automated, but the classification of those defects is still performed manually by technicians. This invention includes novel digital image analysis techniques that generate unique feature vector descriptions of semiconductor defects as well as classifiers that use these descriptions to automatically categorize the defects into one of a set of pre-defined classes. Feature extraction techniques based on multiple-focus images, multiple-defect mask images, and segmented semiconductor wafer images are used to create unique feature-based descriptions of the semiconductor defects. These feature-based defect descriptions are subsequently classified by a defect classifier into categories that depend on defect characteristics and defect contextual information, that is, the semiconductor process layer(s) with which the defect comes in contact. At the heart of the system is a knowledge database that stores and distributes historical semiconductor wafer and defect data to guide the feature extraction and classification processes. In summary, this invention takes as its input a set of images containing semiconductor defect information, and generates as its output a classification for the defect that describes not only the defect itself, but also the location of that defect with respect to the semiconductor process layers.
摘要翻译： 在制造半导体晶片期间自动检测缺陷大部分是自动化的，但是这些缺陷的分类仍由技术人员手动执行。 本发明包括生成半导体缺陷的唯一特征向量描述的新型数字图像分析技术以及使用这些描述来自动将缺陷分类为一组预定义类别的分类器。 使用基于多焦点图像，多缺陷掩模图像和分段半导体晶片图像的特征提取技术来创建关于半导体缺陷的独特的基于特征的描述。 这些基于特征的缺陷描述随后由缺陷分类器分类为依赖于缺陷特性和缺陷上下文信息的类别，即与缺陷接触的半导体处理层。 系统的核心是存储和分发历史半导体晶圆和缺陷数据的知识数据库，用于指导特征提取和分类过程。 总而言之，本发明将其包含半导体缺陷信息的图像作为其输入，并且作为其输出生成不仅描述缺陷本身的缺陷的分类，还产生相对于半导体处理层的该缺陷的位置 。
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公开(公告)号：US07209579B1
公开(公告)日：2007-04-24
申请号：US10341715
申请日：2003-01-14
IPC分类号： G06K9/00
CPC分类号： A61B6/032 , A61B5/1077 , A61B5/1127 , A61B6/037 , A61B6/08 , A61B6/5235 , A61B6/5247 , A61B2503/40
摘要： A novel functional imaging system for use in the imaging of unrestrained and non-anesthetized small animals or other subjects and a method for acquiring such images and further registering them with anatomical X-ray images previously or subsequently acquired. The apparatus comprises a combination of an IR laser profilometry system and gamma, PET and/or SPECT, imaging system, all mounted on a rotating gantry, that permits simultaneous acquisition of positional and orientational information and functional images of an unrestrained subject that are registered, i.e. integrated, using image processing software to produce a functional image of the subject without the use of restraints or anesthesia. The functional image thus obtained can be registered with a previously or subsequently obtained X-ray CT image of the subject. The use of the system described herein permits functional imaging of a subject in an unrestrained/non-anesthetized condition thereby reducing the stress on the subject and eliminating any potential interference with the functional testing that such stress might induce.
摘要翻译： 用于无限制和非麻醉的小动物或其他受试者的成像中的新型功能成像系统以及用于获取这些图像并进一步将它们与先前或随后获得的解剖X射线图像对准的方法。 该装置包括IR激光轮廓测量系统和全部安装在旋转台架上的伽马，PET和/或SPECT成像系统的组合，其允许同时获取被登记的无限制对象的位置和定向信息和功能图像， 即集成的，使用图像处理软件来产生受试者的功能图像而不使用约束或麻醉。 这样获得的功能图像可以与先前或随后获得的受试者的X射线CT图像对齐。 本文描述的系统的使用允许受试者在无限制/非麻醉状态下进行功能成像，从而减少受试者的压力并消除对这种应激可能诱发的功能测试的任何潜在干扰。
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6.发明授权公开(公告)号：US06370223B1
公开(公告)日：2002-04-09
申请号：US09827876
申请日：2001-04-06
IPC分类号： G01B1506
CPC分类号： G01B15/00
摘要： At least two linear arrays of x-ray detectors are placed below a conveyor belt in a poultry processing plant. Multiple-energy x-ray sources illuminate the poultry and are detected by the detectors. Laser profilometry is used to measure the poultry thickness as the x-ray data is acquired. The detector readout is processed in real time to detect the presence of small highly attenuating fragments in the poultry, i.e., bone, metal, and cartilage.
摘要翻译： X射线探测器的至少两个线性阵列放置在家禽加工厂的传送带下方。 多能量X射线照射家禽，并由检测器检测。 当采集X射线数据时，使用激光轮廓测量法来测量家禽的厚度。 检测器读数被实时处理以检测家禽，即骨，金属和软骨中存在小的高度衰减的碎片。
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公开(公告)号：US20120106814A1
公开(公告)日：2012-05-03
申请号：US11241359
申请日：2005-09-30
IPC分类号： G06K9/00
CPC分类号： A61B6/037 , A61B6/08 , A61B6/502 , A61B6/508 , A61B6/5264 , G06T5/003 , G06T2207/10108 , G06T2207/20201
摘要： A method and related system for generating motion corrected tomographic images includes the steps of illuminating a region of interest (ROI) to be imaged being part of an unrestrained live subject and having at least three spaced apart optical markers thereon. Simultaneous images are acquired from a first and a second camera of the markers from different angles. Motion data comprising 3D position and orientation of the markers relative to an initial reference position is then calculated. Motion corrected tomographic data obtained from the ROI using the motion data is then obtained, where motion corrected tomographic images obtained therefrom.
摘要翻译： 用于产生运动校正层析图像的方法和相关系统包括以下步骤：将要成像的感兴趣区域（ROI）照射为无限制活体受试者的一部分，并且其上具有至少三个间隔开的光学标记。 从不同角度的标记的第一和第二相机获取同时的图像。 然后计算包括标记相对于初始参考位置的3D位置和取向的运动数据。 然后获得使用运动数据从ROI获得的运动校正层析成像数据，其中由其获得的运动校正层析图像。
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公开(公告)号：US08248614B2
公开(公告)日：2012-08-21
申请号：US12405063
申请日：2009-03-16
IPC分类号： G01B9/02
CPC分类号： G01N21/45 , G01B9/02007 , G01B9/02012 , G01B9/02024 , G01B9/02027 , G01B9/02069 , G01B9/021 , G01B11/0675 , G01N21/453 , G01N21/6458 , G01N2021/1787
摘要： An optical system performs imaging in a transmissive and reflective mode. The system includes an optical interferometer that generates interference phenomena between optical waves to measure multiple distances, thicknesses, and indices of refraction of a sample. Measurements are made through a galvanometer that scans a pre-programmed angular arc. An excitation-emission device allows an electromagnetic excitation and emission to pass through an objective in optical communication with the sample. An electromagnetic detector receives the output of the optical interferometer and the excitation-emission device to render a magnified three dimensional image of the sample.
摘要翻译： 光学系统以透射和反射模式执行成像。 该系统包括光学干涉仪，其产生光波之间的干涉现象，以测量样品的多个距离，厚度和折射率。 通过扫描预编程角弧的电流计进行测量。 激发发射装置允许电磁激发和发射通过与样品光学通信的物镜。 电磁检测器接收光干涉仪和激发发射装置的输出，以呈现样品的放大三维图像。
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公开(公告)号：US08170302B1
公开(公告)日：2012-05-01
申请号：US11241359
申请日：2005-09-30
CPC分类号： A61B6/037 , A61B6/08 , A61B6/502 , A61B6/508 , A61B6/5264 , G06T5/003 , G06T2207/10108 , G06T2207/20201
摘要： A method and related system for generating motion corrected tomographic images includes the steps of illuminating a region of interest (ROI) to be imaged being part of an unrestrained live subject and having at least three spaced apart optical markers thereon. Simultaneous images are acquired from a first and a second camera of the markers from different angles. Motion data comprising 3D position and orientation of the markers relative to an initial reference position is then calculated. Motion corrected tomographic data obtained from the ROI using the motion data is then obtained, where motion corrected tomographic images obtained therefrom.
摘要翻译： 用于产生运动校正层析图像的方法和相关系统包括以下步骤：将要成像的感兴趣区域（ROI）照射为无限制活体受试者的一部分，并且其上具有至少三个间隔开的光学标记。 从不同角度的标记的第一和第二相机获取同时的图像。 然后计算包括标记相对于初始参考位置的3D位置和取向的运动数据。 然后获得使用运动数据从ROI获得的运动校正层析成像数据，其中由其获得的运动校正层析图像。
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公开(公告)号：US20100231895A1
公开(公告)日：2010-09-16
申请号：US12405063
申请日：2009-03-16
IPC分类号： G01N21/00
CPC分类号： G01N21/45 , G01B9/02007 , G01B9/02012 , G01B9/02024 , G01B9/02027 , G01B9/02069 , G01B9/021 , G01B11/0675 , G01N21/453 , G01N21/6458 , G01N2021/1787
摘要： An optical system performs imaging in a transmissive and reflective mode. The system includes an optical interferometer that generates interference phenomena between optical waves to measure multiple distances, thicknesses, and indices of refraction of a sample. Measurements are made through a galvanometer that scans a pre-programmed angular arc. An excitation-emission device allows an electromagnetic excitation and emission to pass through an objective in optical communication with the sample. An electromagnetic detector receives the output of the optical interferometer and the excitation-emission device to render a magnified three dimensional image of the sample.
摘要翻译： 光学系统以透射和反射模式执行成像。 该系统包括光学干涉仪，其产生光波之间的干涉现象，以测量样品的多个距离，厚度和折射率。 通过扫描预编程角弧的电流计进行测量。 激发发射装置允许电磁激发和发射通过与样品光学通信的物镜。 电磁检测器接收光干涉仪和激发发射装置的输出，以呈现样品的放大三维图像。
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