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6 条记录 (耗时 0.052 秒)

    MECHANICAL MODULARITY CHAMBERS
    2.
    发明申请
    MECHANICAL MODULARITY CHAMBERS 审中-公开
    机械模块化

    公开(公告)号：US20110058919A1

    公开(公告)日：2011-03-10

    申请号：US12560167

    申请日：2009-09-15

    申请人： Michael SCHAEFER ,  Andreas GEISS

    发明人： Michael SCHAEFER ,  Andreas GEISS

    IPC分类号： B65H1/00 ,  F16J15/02

    CPC分类号： H01L21/67126

    摘要： The present invention relates to a seal carrier plate and a system of interchangeable chambers. A seal carrier plate is provided, wherein the seal carrier plate is adapted for being located between a first chamber and a second chamber and adapted for sealing the first chamber with respect to the second chamber from the environment, and wherein the seal carrier plate comprises an opening for transferring of substrates from the first chamber to the second chamber. Further, a system of interchangeable chambers is provided, wherein the chambers are adapted for accommodating a seal carrier plate on at least one side of the chamber with an opening.

    摘要翻译： 本发明涉及密封承载板和可互换室的系统。 提供了一种密封承载板，其中密封承载板适于位于第一室和第二室之间，并适于相对于第二室与环境密封第一室，并且其中密封承载板包括 用于将基板从第一室转移到第二室的开口。 此外，提供了一种可互换室的系统，其中所述室适于在具有开口的腔室的至少一侧上容纳密封承载板。

    ROTATABLE SPUTTER TARGET BACKING CYLINDER, ROTATABLE SPUTTER TARGET, METHOD OF PRODUCING A ROTATABLE SPUTTER TARGET, AND COATING INSTALLATION
    5.
    发明申请
    ROTATABLE SPUTTER TARGET BACKING CYLINDER, ROTATABLE SPUTTER TARGET, METHOD OF PRODUCING A ROTATABLE SPUTTER TARGET, AND COATING INSTALLATION 审中-公开
    可旋转飞溅器目标后支撑筒，可旋转飞溅器目标，生产可旋转飞溅器目标的方法和涂层安装

    公开(公告)号：US20100101949A1

    公开(公告)日：2010-04-29

    申请号：US12605172

    申请日：2009-10-23

    申请人： Roland TRASSL ,  Michael SCHAEFER ,  Jian LIU

    发明人： Roland TRASSL ,  Michael SCHAEFER ,  Jian LIU

    IPC分类号： C23C14/34 ,  B23P11/00

    CPC分类号： C23C14/3407 ,  H01J37/3405 ,  H01J37/3423 ,  H01J37/3435 ,  Y10T29/49826

    摘要： A rotatable target device for sputtering installations, the rotatable target device including: a rotatable target base adapted for holding a solid target cylinder, the solid target cylinder having an inner axial face, an outer axial face and at least one front face connecting the inner axial face with the outer axial face; wherein the rotatable target base comprises a flexible element, a first face adapted to the shape of the inner axial face of the solid target cylinder and a second face adapted to hold the flexible element outside of the solid target cylinder.

    摘要翻译： 一种用于溅射装置的可转动目标装置，所述可转动目标装置包括：适于保持固体目标圆柱体的可转动目标基座，所述实心目标圆柱体具有内轴向面，外轴向面和至少一个连接内轴向 面与外轴面; 其中所述可旋转靶基座包括柔性元件，适于所述固体目标圆柱体的内轴向面的形状的第一面和适于将所述柔性元件保持在所述固体目标圆柱体外部的第二面。