公开(公告)号：US08686508B2

公开(公告)日：2014-04-01

申请号：US12553523

申请日：2009-09-03

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  Robert Robison

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  Robert Robison

IPC分类号： H01L23/62

CPC分类号： H01L21/324 ,  H01L27/0255 ,  H01L29/8611 ,  H01L29/866

摘要： Structures and methods are provided for nanosecond electrical pulse anneal processes. The method of forming an electrostatic discharge (ESD) N+/P+ structure includes forming an N+ diffusion on a substrate and a P+ diffusion on the substrate. The P+ diffusion is in electrical contact with the N+ diffusion. The method further includes forming a device between the N+ diffusion and the P+ diffusion. A method of annealing a structure or material includes applying an electrical pulse across an electrostatic discharge (ESD) N+/P+ structure for a plurality of nanoseconds.

摘要翻译： 为纳秒电脉冲退火工艺提供了结构和方法。 形成静电放电（ESD）N + / P +结构的方法包括在衬底上形成N +扩散，并在衬底上形成P +扩散。 P +扩散与N +扩散电接触。 该方法还包括在N +扩散和P +扩散之间形成器件。 退火结构或材料的方法包括跨多个纳秒的静电放电（ESD）N + / P +结构施加电脉冲。

公开(公告)号：US08891212B2

公开(公告)日：2014-11-18

申请号：US13079946

申请日：2011-04-05

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

IPC分类号： H02H9/04 ,  H03K19/003 ,  H01L27/02

CPC分类号： H02H9/046 ,  H01L27/0262 ,  H03K19/00361 ,  Y10T29/49002

摘要： RC-trigger circuits for a semiconductor controlled rectifier (SCR), methods of providing electrostatic discharge (ESD) protection, and design structures for a RC-trigger circuit. The RC-trigger circuit is coupled to an input/output (I/O) signal pad by an isolation diode and is coupled to a power supply voltage by a power supply diode. Under normal operating conditions, the isolation diode is reverse biased, isolating the RC-trigger circuit from the input/output (I/O) pad, and the power supply diode is forward biased so that the RC-trigger circuit is supplied with power. The isolation diode may become forward biased during ESD events while the chip is unpowered, causing the RC-trigger circuit to trigger an SCR configured protect the signal pad from ESD into a conductive state. The power supply diode may become reverse biased during the ESD event, which isolates the power supply rail from the ESD voltage pulse.

摘要翻译： 用于半导体可控整流器（SCR）的RC触发电路，提供静电放电（ESD）保护的方法以及用于RC触发电路的设计结构。 RC触发电路通过隔离二极管耦合到输入/输出（I / O）信号焊盘，并通过电源二极管耦合到电源电压。 在正常工作条件下，隔离二极管反向偏置，将RC触发电路与输入/输出（I / O）焊盘隔离，电源二极管正向偏置，使RC触发电路供电。 在ESD事件期间，隔离二极管可能会在芯片未上电时产生正向偏置，导致RC触发电路触发SCR配置，从而将信号焊盘从ESD保护到导通状态。 在ESD事件期间，电源二极管可能会反向偏置，从而将电源轨与ESD电压脉冲隔离。

公开(公告)号：US07786535B2

公开(公告)日：2010-08-31

申请号：US12059034

申请日：2008-03-31

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Christopher S. Putnam ,  Souvick Mitra

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Christopher S. Putnam ,  Souvick Mitra

IPC分类号： H01L29/78

CPC分类号： H01L27/1203

摘要： Design structures for high-voltage integrated circuits. The design structure, which is formed using a semiconductor-on-insulator (SOI) substrate, may include device structure with a semiconductor body positioned between first and second gate electrodes. The first and second gate electrodes and the semiconductor body may be formed from the monocrystalline SOI layer of the SOI substrate. A dielectric layer separates each of the first and second gate electrodes from the semiconductor body. These dielectric layers are formed by defining trenches in the SOI layer and filling the trenches with a dielectric material, which may occur concurrently with a process forming other device isolation regions.

摘要翻译： 高压集成电路的设计结构。 使用绝缘体上半导体（SOI）衬底形成的设计结构可以包括具有位于第一和第二栅电极之间的半导体本体的器件结构。 第一和第二栅电极和半导体本体可以由SOI衬底的单晶SOI层形成。 电介质层将第一和第二栅极电极与半导体本体分开。 这些电介质层通过在SOI层中限定沟槽并用介电材料填充沟槽而形成，介电材料可与形成其它器件隔离区的工艺同时进行。

公开(公告)号：US20090302416A1

公开(公告)日：2009-12-10

申请号：US12135242

申请日：2008-06-09

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, JR. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  William Tonti

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, JR. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  William Tonti

IPC分类号： H01L23/525 ,  H01L21/44

CPC分类号： H01L23/5256 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention relates to e-fuse devices, and more particularly to a device and method of forming an e-fuse device, the method comprising providing a first conductive layer connected to a second conductive layer, the first and second conductive layers separated by a barrier layer having a first diffusivity different than a second diffusivity of the first conductive layer. A void is created in the first conductive layer by driving an electrical current through the e-fuse device.

摘要翻译： 本发明涉及电熔丝装置，更具体地说，涉及一种形成电熔丝装置的装置和方法，所述方法包括提供连接到第二导电层的第一导电层，所述第一和第二导电层由 阻挡层具有与第一导电层的第二扩散率不同的第一扩散率。 通过驱动电流通过电熔丝装置而在第一导电层中产生空隙。

公开(公告)号：US08637353B2

公开(公告)日：2014-01-28

申请号：US13013378

申请日：2011-01-25

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

IPC分类号： H01L21/82

CPC分类号： H01L22/30 ,  H01L21/76886 ,  H01L21/76898 ,  H01L22/14 ,  H01L22/20 ,  H01L25/0657 ,  H01L25/50 ,  H01L2225/06541 ,  H01L2225/06596 ,  H01L2924/0002 ,  Y10T29/5313 ,  Y10T29/532 ,  H01L2924/00

摘要： Methods and systems for altering the electrical resistance of a wiring path. The electrical resistance of the wiring path is compared with a target electrical resistance value. If the electrical resistance of the wiring path exceeds the target electrical resistance value, an electrical current is selectively applied to the wiring path to physically alter a portion of the wiring path. The current may be selected to alter the wiring path such that the electrical resistance drops to a value less than or equal to the target electrical resistance value.

摘要翻译： 用于改变布线路径的电阻的方法和系统。 将布线路径的电阻与目标电阻值进行比较。 如果布线路径的电阻超过目标电阻值，则选择性地向布线路径施加电流，以物理地改变布线路径的一部分。 可以选择电流来改变布线路径，使得电阻下降到小于或等于目标电阻值的值。

公开(公告)号：US08503140B2

公开(公告)日：2013-08-06

申请号：US12898013

申请日：2010-10-05

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

IPC分类号： H02H9/00

CPC分类号： H01L27/0262 ,  H01L29/747 ,  H01L29/87 ,  H02H9/04

摘要： Bi-directional back-to-back stacked SCRs for high-voltage pin ESD protection, methods of manufacture and design structures are provided. The device includes a symmetrical bi-directional back-to-back stacked silicon controlled rectifier (SCR). An anode of a first of the back-to-back stacked SCR is connected to an input. An anode of a second of the back-to-back stacked SCR is connected to ground. Cathodes of the first and second of the back-to-back stacked SCR are connected together. Each of the symmetrical bi-directional back-to-back SCRs include a pair of diodes directing current towards the cathodes which, upon application of a voltage, become reverse biased effectively and deactivating elements from one of the symmetrical bi-directional back-to-back SCRs while the diodes of another of the symmetrical bi-directional back-to-back SCRs direct current in the same direction as the reverse biased diodes.

摘要翻译： 提供用于高压针ESD保护的双向背对背堆叠SCR，制造方法和设计结构。 该器件包括对称双向背对背层叠可控硅整流器（SCR）。 背对背堆叠的SCR中的第一个的阳极连接到输入。 背对背堆叠的SCR的第二个的阳极连接到地面。 第一个和第二个背靠背堆叠的SCR的阴极连接在一起。 对称双向背靠背SCR中的每一个包括一对二极管，其引导电流朝向阴极，其在施加电压时有效地变得有效地反向偏置，并且从对称的双向后向SCR中的一个去激活元件， 另一个对称双向背对背SCR的二极管在与反向偏置二极管相同的方向上直流电流，反向SCR。

公开(公告)号：US20120187525A1

公开(公告)日：2012-07-26

申请号：US13012137

申请日：2011-01-24

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, JR. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, JR. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

IPC分类号： H01L29/12 ,  G06F17/50 ,  H01L21/36

CPC分类号： H01L27/0255 ,  G06F17/5022 ,  G06F17/5045 ,  H01L27/0262 ,  H01L27/1203 ,  H01L29/6609 ,  H01L29/66393 ,  H01L29/7436 ,  H01L29/861

摘要： Device structures with a reduced junction area in an SOI process, methods of making the device structures, and design structures for a lateral diode. The device structure includes one or more dielectric regions, such as STI regions, positioned in the device region and intersecting the p-n junction between an anode and cathode. The dielectric regions, which may be formed using shallow trench isolation techniques, function to reduce the width of a p-n junction with respect to the width area of the cathode at a location spaced laterally from the p-n junction and the anode. The width difference and presence of the dielectric regions creates an asymmetrical diode structure. The volume of the device region occupied by the dielectric regions is minimized to preserve the volume of the cathode and anode.

摘要翻译： 在SOI工艺中具有减小的结面积的器件结构，制造器件结构的方法以及横向二极管的设计结构。 器件结构包括位于器件区域中并与阳极和阴极之间的p-n结相交的一个或多个电介质区域，例如STI区域。 可以使用浅沟槽隔离技术形成的电介质区域用于在p-n结和阳极侧向间隔的位置处减小p-n结相对于阴极宽度区域的宽度。 介质区域的宽度差和存在产生不对称二极管结构。 由电介质区域占据的器件区域的体积被最小化以保持阴极和阳极的体积。

公开(公告)号：US08217455B2

公开(公告)日：2012-07-10

申请号：US12102032

申请日：2008-04-14

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Christopher S. Putnam ,  Souvick Mitra

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Christopher S. Putnam ,  Souvick Mitra

IPC分类号： H01L27/12

CPC分类号： H01L27/1203 ,  H01L27/0248

摘要： Semiconductor-on-insulator device structures with enhanced electrostatic discharge protection, and design structures for an integrated circuit with device structures exhibiting enhanced electrostatic discharge protection. A device is formed in a body region of a device layer of a semiconductor-on-insulator substrate, which is bounded by an inner peripheral sidewall of an annular dielectric-filled isolation structure that extends from a top surface of the device layer to the insulating layer of the semiconductor-on-insulator substrate. An annular conductive interconnect extends through the body region and the insulating layer to connect the body region with the bulk wafer of the semiconductor-on-insulator substrate. The annular conductive interconnect is disposed inside the inner peripheral sidewall of the isolation structure, which annularly encircles the body region.

摘要翻译： 具有增强的静电放电保护的绝缘体上半导体器件结构以及具有增强的静电放电保护的器件结构的集成电路的设计结构。 一种器件形成在绝缘体上半导体衬底的器件层的体区中，该衬底由环形电介质填充的隔离结构的内周侧壁限定，该隔离结构从器件层的顶表面延伸到绝缘体 绝缘体上半导体衬底的层。 环形导电互连延伸穿过主体区域和绝缘层，以将体区域与绝缘体上半导体衬底的体晶片连接。 环形导电互连件设置在隔离结构的内周侧壁的内侧，环形环绕主体区域。

公开(公告)号：US08101505B2

公开(公告)日：2012-01-24

申请号：US12135242

申请日：2008-06-09

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  William Tonti

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  William Tonti

IPC分类号： H01L21/479 ,  H01L23/52

CPC分类号： H01L23/5256 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention relates to e-fuse devices, and more particularly to a device and method of forming an e-fuse device, the method comprising providing a first conductive layer connected to a second conductive layer, the first and second conductive layers separated by a barrier layer having a first diffusivity different than a second diffusivity of the first conductive layer. A void is created in the first conductive layer by driving an electrical current through the e-fuse device.

摘要翻译： 本发明涉及电熔丝装置，更具体地说，涉及一种形成电熔丝装置的装置和方法，所述方法包括提供连接到第二导电层的第一导电层，所述第一和第二导电层由 阻挡层具有与第一导电层的第二扩散率不同的第一扩散率。 通过驱动电流通过电熔丝装置而在第一导电层中产生空隙。

公开(公告)号：US07956671B2

公开(公告)日：2011-06-07

申请号：US12496002

申请日：2009-07-01

申请人： Michel J. Abou-Khalil ,  Tom C. Lee ,  Junjun Li ,  Robert J. Gauthier, Jr. ,  Christopher S. Putnam ,  Souvick Mitra

发明人： Michel J. Abou-Khalil ,  Tom C. Lee ,  Junjun Li ,  Robert J. Gauthier, Jr. ,  Christopher S. Putnam ,  Souvick Mitra

IPC分类号： H01L23/52

CPC分类号： G11C17/16 ,  G11C11/5692 ,  H01L23/5252 ,  H01L23/5256 ,  H01L27/101 ,  H01L27/112 ,  H01L27/11206 ,  H01L45/085 ,  H01L45/1206 ,  H01L45/14 ,  H01L2924/0002 ,  H01L2924/00

摘要： In one embodiment of an e-fuse programming/re-programming circuit, the e-fuse has two short high atomic diffusion resistance conductor layers positioned on opposite sides and at a same end of a long low atomic diffusion resistance conductor layer. A voltage source is used to vary the polarity and, optionally, the magnitude of voltage applied to the terminals in order to control bi-directional flow of electrons within the long conductor layer and, thereby formation of opens and/or shorts at the long conductor layer-short conductor layer interfaces. The formation of such opens and/or shorts can be used to achieve different programming states. Other circuit structure embodiments incorporate e-fuses with additional conductor layers and additional terminals so as to allow for even more programming states. Also disclosed are embodiments of associated e-fuse programming and re-programming methods.

摘要翻译： 在电熔丝编程/重新编程电路的一个实施例中，电熔丝具有位于长低的原子扩散电阻较长的导体层的相对侧和同一端的两个短的高原子扩散电阻的导体层。 电压源用于改变施加到端子的电压的极性和可选的电压大小，以便控制长导体层内电子的双向流动，从而在长导体上形成开路和/或短路 层 - 短导体层接口。 可以使用这种打开和/或短路的形成来实现不同的编程状态。 其他电路结构实施例包括具有附加导体层和附加端子的电子保险丝，以便允许甚至更多的编程状态。 还公开了相关联的电熔丝编程和重新编程方法的实施例。