摘要:
A sputtering target formed of a refractory metallic silicide having a composition MSi.sub.x including a mixture composition of an MSi.sub.2 phase in the form of particles (M: at least one refractory metal selected from a group consisting of W, Mo, Ti, Zr, Hf, Ni and Ta), and an Si phase provided as a matrix phase. Interface layers having a predetermined thickness are formed at the interfaces between the MSi.sub.2 phase and the Si phase. The value X in the composition formula MSi.sub.x is set to a range of 2.0 to 4.0, and the thickness of the interface layers formed between the MSi.sub.2 phase and the Si phase, the dispersion of the composition, the density ratio of the target, the electrical resistivity of the Si phase and the surface roughness are set to predetermined values. An uniform high-quality thin film in which a composition distribution is uniform can be manufactured stably by using this target.
摘要:
A sputtering target formed of a refractory metallic silicide having a composition MSi.sub.x including a mixture composition of an MSi.sub.2 phase in the form of particles (M: at least one refractory metal selected from a group consisting of W, Mo, Ti, Zr, Hf, Ni and Ta), and an Si phase provided as a matrix phase. Interface layers having a predetermined thickness are formed at the interfaces between the MSi.sub.2 phase and the Si phase. The value X in the composition formula MSi.sub.x is set to a range of 2.0 to 4.0, and the thickness of the interface layers formed between the MSi.sub.2 phase and the Si phase, the dispersion of the composition, the density ratio of the target, the electrical resistivity of the Si phase and the surface roughness are set to predetermined values. An uniform high-quality thin film in which a composition distribution is uniform can be manufactured stably by using this target.
摘要:
A sputtering target formed of a refractory metallic silicide having a composition MSi.sub.x including a mixture composition of an MSi.sub.2 phase in the form of particles (M: at least one refractory metal selected from a group consisting of W, Mo, Ti, Zr, Hf, Ni and Ta), and an Si phase provided as a matrix phase. Interface layers having a predetermined thickness are formed at the interfaces between the MSi.sub.2 phase and the Si phase. The value X in the composition formula MSi.sub.x is set to a range of 2.0 to 4.0, and the thickness of the interface layers formed between the MSi.sub.2 phase and the Si phase, the dispersion of the composition, the density ratio of the target, the electrical resistivity of the Si phase and the surface roughness are set to predetermined values. An uniform high-quality thin film in which a composition distribution is uniform can be manufactured stably by using this target.
摘要:
A silicon carbide sintered body containing not less than 0.03% by weight of boron, a total of not more than 0.3% by weight of metallic element impurities including the boron, not more than 1.0% by weight of free carbon, a total of not more than 0.15% by weight of non-metal impurities other than the free carbon, and the balance essentially consisting of silicon carbide, and having a density of not less 3.10 g/cm.sup.3. The sintered body is manufactured by heating a molding of a mixture containing a silicon carbide powder, a boron-containing sintering assistant, and a carbon-containing oxygen scavenger to a sintering temperature. The molded body is maintained at a temperature lower than the sintering temperature during the heating process until an oxide film covering the silicon carbide powder is substantially removed by the oxygen scavenger, and the molded body is then sintered at the sintering temperature under a non-pressurized condition.
摘要翻译:含有不少于0.03重量%的硼,总计不超过0.3重量%的包含硼的金属元素杂质,不超过1.0重量%游离碳的碳化硅烧结体,总计不超过 超过0.15重量%的除游离碳以外的非金属杂质,余量基本上由碳化硅组成,密度不小于3.10g / cm 3。 通过将含有碳化硅粉末,含硼烧结助剂和含碳氧清除剂的混合物的成型加热至烧结温度来制造烧结体。 成型体在加热过程中保持在低于烧结温度的温度,直到氧清除剂基本上除去覆盖碳化硅粉末的氧化膜,然后在未加压的烧结温度下将成型体烧结 条件。
摘要:
A printing device includes first and second print heads, first and second print head control units, a first print head feeding unit moving the first print head in a main scanning direction, a second print head feeding unit moving the second print head in the main scanning direction, a first medium feeding unit moving a first medium holding unit in an auxiliary scanning direction orthogonal to the main scanning direction, a second medium feeding unit moving a second medium holding unit in the auxiliary scanning direction in parallel with the movement of the first medium feeding unit, a first printing unit control unit (controlling the first print head control unit, the first print head feeding unit and the first medium feeding unit), and a second printing unit control unit (controlling the second print head control unit, the second print head feeding unit and the second medium feeding unit).
摘要:
A printing apparatus for forming an image on fabric is provided. The printing apparatus includes a plurality of exchangeable fabric holders, a recording head, which is driven according to printable data including image information representing the image to be printed and holder information concerning a type of the fabric holder to be used for forming the image, an obtaining unit to obtain the printable data from external environment, a storage unit with a storage area to store the holder information extracted from the printable data, an examination unit to examine as to whether the holder information for a current printing operation is identical with the holder information for a previous printing operation stored in the storage area, and an indication unit, which indicates a result of the examination obtained by the examination unit to notify a user of necessity of exchanging the fabric holders.
摘要:
A printing apparatus for forming an image on fabric is provided. The printing apparatus includes a plurality of exchangeable fabric holders, a recording head, which is driven according to printable data including image information representing the image to be printed and holder information concerning a type of the fabric holder to be used for forming the image, an obtaining unit to obtain the printable data from external environment, a storage unit with a storage area to store the holder information extracted from the printable data, an examination unit to examine as to whether the holder information for a current printing operation is identical with the holder information for a previous printing operation stored in the storage area, and an indication unit, which indicates a result of the examination obtained by the examination unit to notify a user of necessity of exchanging the fabric holders.
摘要:
An inkjet printing device, which is provided with a holding unit that is used to hold a substrate to be subjected to printing operation, an inkjet head that ejects ink onto the substrate held by the holding unit, and a controller that moves the holding unit relative to the inkjet head to perform the printing operation. In this structure, the controller operates to wait a predetermined stopping time after the holding unit is moved to start ejecting the ink onto the substrate held on the holding unit. The predetermined stopping time is determined depending on at least one factor that determines a time period required for mechanical vibrations of the holding unit caused by movement of the holding unit to decrease to a negligible level.
摘要:
An SiC-based pressureless sintered product contains a sintered product main component containing grains of at least one additive selected from the group consisting of Tac, NbB.sub.2, VB.sub.2 and WB and the balance of SiC sintered grains constituting a SiC matrix, and a sintering assistant component. The additive grains have a maximum grain size not greater than an average grain size of the SiC sintered grains.
摘要:
A printing device comprises first and second print heads, first and second print head control units, a first print head feeding unit moving the first print head in a main scanning direction, a second print head feeding unit moving the second print head in the main scanning direction, a first medium feeding unit moving a first medium holding unit in an auxiliary scanning direction orthogonal to the main scanning direction, a second medium feeding unit moving a second medium holding unit in the auxiliary scanning direction in parallel with the movement of the first medium feeding unit, a first printing unit control unit (controlling the first print head control unit, the first print head feeding unit and the first medium feeding unit), and a second printing unit control unit (controlling the second print head control unit, the second print head feeding unit and the second medium feeding unit).