摘要:
A sputtering target formed of a refractory metallic silicide having a composition MSi.sub.x including a mixture composition of an MSi.sub.2 phase in the form of particles (M: at least one refractory metal selected from a group consisting of W, Mo, Ti, Zr, Hf, Ni and Ta), and an Si phase provided as a matrix phase. Interface layers having a predetermined thickness are formed at the interfaces between the MSi.sub.2 phase and the Si phase. The value X in the composition formula MSi.sub.x is set to a range of 2.0 to 4.0, and the thickness of the interface layers formed between the MSi.sub.2 phase and the Si phase, the dispersion of the composition, the density ratio of the target, the electrical resistivity of the Si phase and the surface roughness are set to predetermined values. An uniform high-quality thin film in which a composition distribution is uniform can be manufactured stably by using this target.
摘要:
A sputtering target formed of a refractory metallic silicide having a composition MSi.sub.x including a mixture composition of an MSi.sub.2 phase in the form of particles (M: at least one refractory metal selected from a group consisting of W, Mo, Ti, Zr, Hf, Ni and Ta), and an Si phase provided as a matrix phase. Interface layers having a predetermined thickness are formed at the interfaces between the MSi.sub.2 phase and the Si phase. The value X in the composition formula MSi.sub.x is set to a range of 2.0 to 4.0, and the thickness of the interface layers formed between the MSi.sub.2 phase and the Si phase, the dispersion of the composition, the density ratio of the target, the electrical resistivity of the Si phase and the surface roughness are set to predetermined values. An uniform high-quality thin film in which a composition distribution is uniform can be manufactured stably by using this target.
摘要:
A sputtering target formed of a refractory metallic silicide having a composition MSi.sub.x including a mixture composition of an MSi.sub.2 phase in the form of particles (M: at least one refractory metal selected from a group consisting of W, Mo, Ti, Zr, Hf, Ni and Ta), and an Si phase provided as a matrix phase. Interface layers having a predetermined thickness are formed at the interfaces between the MSi.sub.2 phase and the Si phase. The value X in the composition formula MSi.sub.x is set to a range of 2.0 to 4.0, and the thickness of the interface layers formed between the MSi.sub.2 phase and the Si phase, the dispersion of the composition, the density ratio of the target, the electrical resistivity of the Si phase and the surface roughness are set to predetermined values. An uniform high-quality thin film in which a composition distribution is uniform can be manufactured stably by using this target.
摘要:
A metal molded shape having a high hardness surface layer which is hard to work is obtained by casting an easy to work alloy member into a desired molded form, and then changing the composition of the member surface by volatilizing off the high vapor pressure elements, carried out by subjecting the easy to work alloy member, to a heat treatment at high temperature.
摘要:
An apparatus includes a processing apparatus that processes raw material in an airtight state, an accommodation section that accommodates the raw material, a first feeding path that is provided outside the processing apparatus and receives the raw material from the accommodation section, and a second feeding path having upstream and downstream ends that are outside and inside the processing apparatus, respectively. The second feeding path receives the raw material from the first feeding path. The apparatus also includes a joint section that separates and joins the first path and the second path, and a closing section that is positioned in the second path closer to the processing apparatus than the joint section and maintains the processing apparatus, and the second path in an airtight state when the joint section separates the first path and the second path.
摘要:
A bimetal is disclosed having a high, rapid deflection over a specified temperature range, including a high expansion metal alloy component having a high thermal expansion coefficient that changes rapidy at 50.times.10.sup.-6 /.degree.C. or greater at a temperature of between about 100.degree. C. and 250.degree. C. and containing from 15-30% by weight of manganeses, the balance of iron. The second component has a substantially constant thermal expansion coefficient regardless of the temperature change, and is preferably a stainless steel. These bimetals are used in circuit breakers, thermal protectors and the like.
摘要:
A wear-resistant alloy for an atomic power plant which is essentially formed of 10 to 45% by weight of chromium; 1.5 to 6% by weight of at least one metal component selected from the group consisting of aluminium and titanium; 0 to 20% by weight of molybdenum; and nickel as the remainder, and atomic power plant parts prepared from the alloy having said composition.
摘要:
Disclosed is a basic air-fuel ratio adjustment method and an apparatus for an internal combustion engine. The adjustment of the basic air-fuel ratio is performed by measuring a signal level corresponding to the level of an air-fuel ratio compensation signal of the engine while the feedback control operation for compensating an error of the air-fuel ratio of the engine is being stopped, by measuring the average level of the air-fuel ratio compensation signal when the feedback control is in operation, and by adjusting the means for presetting the basic air-fuel ratio of the air-fuel mixture fed into the engine so that the difference between the measured signal level and the measured average signal level becomes equal to a predetermined value. Thus, the adjustment of the basic air-fuel ratio can be very easily performed. Furthermore, a high accuracy of the adjustment can be easily obtained.
摘要:
An improved fuel control apparatus for installation on an automobile engine equipped with an electronically controlled fuel injection system and a catalytic exhaust gas purifying system to prevent excess uncombusted fuel from being carried over into the catalytic purifier and burning therein with a resultant damage thereto. The apparatus essentially comprises a plurality of solenoid valves each associated with one of a plurality of fuel injection nozzles, a device for alternately energizing the solenoid valves to close to selectively stop the supply of fuel to one of the fuel injection nozzles upon elevation of the purifier temperature above a predetermined level, and a device for detecting the temperature of the catalytic purifier and transmitting only in case of elevation of the purifier temperature above a predetermined level a signal which enables the solenoid valve energizing device to function.
摘要:
There is provided an electronically controlled fuel injection system comprising a temperature fuel enrichment circuit for generating, in accordance with the output signal of an internal combustion engine temperature sensor, an output signal corresponding to a temperature fuel enrichment characteristic to provide the required fuel enrichment for cold operation, and fuel injection means for injecting an increased quantity of fuel in accordance with the output signal of the temperature fuel enrichment circuit. The system is additionally provided with a revolution compensation circuit for generating a revolution signal corresponding to the number of engine revolutions per minute for continuously decreasing the temperature fuel enrichment characteristic of the temperature fuel enrichment circuit in accordance with increase in the number of engine revolutions per minute. In this way, an improved fuel consumption characteristic is ensured during the warmup period and the underfeeding of fuel under the idling operation is eliminated, and moreover the fuel enrichment is smoothly accomplished to suit changes in the driving conditions of the vehicle.