Sputtering target and method of manufacturing the same
    1.
    发明授权
    Sputtering target and method of manufacturing the same 失效
    溅射靶及其制造方法

    公开(公告)号:US5733427A

    公开(公告)日:1998-03-31

    申请号:US413898

    申请日:1995-03-30

    IPC分类号: C04B35/58 C23C14/34 B22F3/14

    摘要: A sputtering target formed of a refractory metallic silicide having a composition MSi.sub.x including a mixture composition of an MSi.sub.2 phase in the form of particles (M: at least one refractory metal selected from a group consisting of W, Mo, Ti, Zr, Hf, Ni and Ta), and an Si phase provided as a matrix phase. Interface layers having a predetermined thickness are formed at the interfaces between the MSi.sub.2 phase and the Si phase. The value X in the composition formula MSi.sub.x is set to a range of 2.0 to 4.0, and the thickness of the interface layers formed between the MSi.sub.2 phase and the Si phase, the dispersion of the composition, the density ratio of the target, the electrical resistivity of the Si phase and the surface roughness are set to predetermined values. An uniform high-quality thin film in which a composition distribution is uniform can be manufactured stably by using this target.

    摘要翻译: 由具有组成为MSix的难熔金属硅化物形成的溅射靶,所述组合物包括颗粒形式的MSi2相的混合组成(M:选自W,Mo,Ti,Zr,Hf, Ni和Ta)和作为基质相的Si相。 在MSi2相和Si相之间的界面处形成具有预定厚度的界面层。 组成式MSix中的值X设定在2.0〜4.0的范围内,形成在MSi2相和Si相之间的界面层的厚度,组成的分散性,靶的密度比,电 Si相的电阻率和表面粗糙度被设定为预定值。 通过使用该目标,可以稳定地制造组合物分布均匀的均匀的高品质薄膜。

    Sputtering target
    2.
    发明授权
    Sputtering target 失效
    溅射目标

    公开(公告)号:US5447616A

    公开(公告)日:1995-09-05

    申请号:US166007

    申请日:1993-12-14

    IPC分类号: C04B35/58 C23C14/34

    摘要: A sputtering target formed of a refractory metallic silicide having a composition MSi.sub.x including a mixture composition of an MSi.sub.2 phase in the form of particles (M: at least one refractory metal selected from a group consisting of W, Mo, Ti, Zr, Hf, Ni and Ta), and an Si phase provided as a matrix phase. Interface layers having a predetermined thickness are formed at the interfaces between the MSi.sub.2 phase and the Si phase. The value X in the composition formula MSi.sub.x is set to a range of 2.0 to 4.0, and the thickness of the interface layers formed between the MSi.sub.2 phase and the Si phase, the dispersion of the composition, the density ratio of the target, the electrical resistivity of the Si phase and the surface roughness are set to predetermined values. An uniform high-quality thin film in which a composition distribution is uniform can be manufactured stably by using this target.

    摘要翻译: 由具有组成为MSix的难熔金属硅化物形成的溅射靶,所述组合物包括颗粒形式的MSi2相的混合组成(M:选自W,Mo,Ti,Zr,Hf, Ni和Ta)和作为基质相的Si相。 在MSi2相和Si相之间的界面处形成具有预定厚度的界面层。 组成式MSix中的值X设定在2.0〜4.0的范围内,形成在MSi2相和Si相之间的界面层的厚度,组成的分散性,靶的密度比,电 Si相的电阻率和表面粗糙度被设定为预定值。 通过使用该目标,可以稳定地制造组合物分布均匀的均匀的高品质薄膜。

    Sputtering target
    3.
    发明授权
    Sputtering target 失效
    溅射目标

    公开(公告)号:US5294321A

    公开(公告)日:1994-03-15

    申请号:US974317

    申请日:1993-11-10

    IPC分类号: C04B35/58 C23C14/34

    摘要: A sputtering target formed of a refractory metallic silicide having a composition MSi.sub.x including a mixture composition of an MSi.sub.2 phase in the form of particles (M: at least one refractory metal selected from a group consisting of W, Mo, Ti, Zr, Hf, Ni and Ta), and an Si phase provided as a matrix phase. Interface layers having a predetermined thickness are formed at the interfaces between the MSi.sub.2 phase and the Si phase. The value X in the composition formula MSi.sub.x is set to a range of 2.0 to 4.0, and the thickness of the interface layers formed between the MSi.sub.2 phase and the Si phase, the dispersion of the composition, the density ratio of the target, the electrical resistivity of the Si phase and the surface roughness are set to predetermined values. An uniform high-quality thin film in which a composition distribution is uniform can be manufactured stably by using this target.

    摘要翻译: 由具有组成为MSix的难熔金属硅化物形成的溅射靶,所述组合物包括颗粒形式的MSi2相的混合组成(M:选自W,Mo,Ti,Zr,Hf, Ni和Ta)和作为基质相的Si相。 在MSi2相和Si相之间的界面处形成具有预定厚度的界面层。 组成式MSix中的值X设定在2.0〜4.0的范围内,形成在MSi2相和Si相之间的界面层的厚度,组成的分散性,靶的密度比,电 Si相的电阻率和表面粗糙度被设定为预定值。 通过使用该目标,可以稳定地制造组合物分布均匀的均匀的高品质薄膜。

    RAW MATERIAL LOADING APPARATUS
    5.
    发明申请
    RAW MATERIAL LOADING APPARATUS 有权
    原材料加载装置

    公开(公告)号:US20120199221A1

    公开(公告)日:2012-08-09

    申请号:US13430287

    申请日:2012-03-26

    IPC分类号: F16L41/00

    摘要: An apparatus includes a processing apparatus that processes raw material in an airtight state, an accommodation section that accommodates the raw material, a first feeding path that is provided outside the processing apparatus and receives the raw material from the accommodation section, and a second feeding path having upstream and downstream ends that are outside and inside the processing apparatus, respectively. The second feeding path receives the raw material from the first feeding path. The apparatus also includes a joint section that separates and joins the first path and the second path, and a closing section that is positioned in the second path closer to the processing apparatus than the joint section and maintains the processing apparatus, and the second path in an airtight state when the joint section separates the first path and the second path.

    摘要翻译: 一种装置包括处理气密原料的处理装置,容纳原料的容纳部,设置在处理装置外部并从收容部接收原料的第一供给路径和第二供给路径 具有位于处理装置的外部和内部的上游和下游端。 第二供给路径从第一供给路径接收原料。 该装置还包括分离并连接第一路径和第二路径的接合部分,以及关闭部分,其位于比接合部分更靠近处理装置的第二路径中,并且维持处理装置,并且将第二路径保持在 当接头部分分离第一路径和第二路径时的气密状态。

    Method for manufacturing bimetal
    6.
    发明授权
    Method for manufacturing bimetal 失效
    制造双金属的方法

    公开(公告)号:US4290828A

    公开(公告)日:1981-09-22

    申请号:US56689

    申请日:1979-07-11

    摘要: A bimetal is disclosed having a high, rapid deflection over a specified temperature range, including a high expansion metal alloy component having a high thermal expansion coefficient that changes rapidy at 50.times.10.sup.-6 /.degree.C. or greater at a temperature of between about 100.degree. C. and 250.degree. C. and containing from 15-30% by weight of manganeses, the balance of iron. The second component has a substantially constant thermal expansion coefficient regardless of the temperature change, and is preferably a stainless steel. These bimetals are used in circuit breakers, thermal protectors and the like.

    摘要翻译: 公开了一种在特定温度范围内具有高,快速偏转的双金属,包括具有高热膨胀系数的高膨胀金属合金组分,其在约100℃的温度下快速变化为50×10 -6 /℃以上 并含有15-30重量%的锰,其余为铁。 第二组分与温度变化无关,具有基本恒定的热膨胀系数,优选为不锈钢。 这些双金属用于断路器,热保护器等。

    Forged atomic power plant parts
    7.
    发明授权
    Forged atomic power plant parts 失效
    锻造原子能发电厂部件

    公开(公告)号:US4246048A

    公开(公告)日:1981-01-20

    申请号:US30226

    申请日:1979-04-16

    IPC分类号: C22C19/05 G21C7/10

    CPC分类号: C22C19/05 Y10S376/90

    摘要: A wear-resistant alloy for an atomic power plant which is essentially formed of 10 to 45% by weight of chromium; 1.5 to 6% by weight of at least one metal component selected from the group consisting of aluminium and titanium; 0 to 20% by weight of molybdenum; and nickel as the remainder, and atomic power plant parts prepared from the alloy having said composition.

    摘要翻译: 用于原子能发电厂的耐磨合金,其基本上由10至45重量%的铬形成; 1.5至6重量%的至少一种选自铝和钛的金属组分; 0〜20重量%的钼; 和镍作为剩余部分,以及由具有所述组成的合金制备的原子发电厂部件。

    Basic air-fuel ratio adjustment method and apparatus
    8.
    发明授权
    Basic air-fuel ratio adjustment method and apparatus 失效
    基本空燃比调节方法和装置

    公开(公告)号:US4204505A

    公开(公告)日:1980-05-27

    申请号:US929718

    申请日:1978-07-31

    IPC分类号: F02D41/14 F02B3/00

    CPC分类号: F02D41/2454

    摘要: Disclosed is a basic air-fuel ratio adjustment method and an apparatus for an internal combustion engine. The adjustment of the basic air-fuel ratio is performed by measuring a signal level corresponding to the level of an air-fuel ratio compensation signal of the engine while the feedback control operation for compensating an error of the air-fuel ratio of the engine is being stopped, by measuring the average level of the air-fuel ratio compensation signal when the feedback control is in operation, and by adjusting the means for presetting the basic air-fuel ratio of the air-fuel mixture fed into the engine so that the difference between the measured signal level and the measured average signal level becomes equal to a predetermined value. Thus, the adjustment of the basic air-fuel ratio can be very easily performed. Furthermore, a high accuracy of the adjustment can be easily obtained.

    摘要翻译: 公开了一种基本的空燃比调节方法和内燃机的装置。 基本空燃比的调整是通过对与发动机的空燃比补偿信号的电平相对应的信号电平进行测定的,而用于补偿发动机的空燃比误差的反馈控制动作为 通过在反馈控制运行时测量空燃比补偿信号的平均水平,并且通过调节预先设定供给到发动机的空燃混合气体的基本空燃比的装置,使其停止,使得 所测量的信号电平和测得的平均信号电平之差变得等于预定值。 因此,能够容易地进行基本空燃比的调整。 此外,可以容易地获得高精度的调节。

    Fuel control apparatus for an automobile engine equipped with an
electronically controlled fuel injection system and an exhaust gas
purifying system
    9.
    发明授权
    Fuel control apparatus for an automobile engine equipped with an electronically controlled fuel injection system and an exhaust gas purifying system 失效
    配备有电子控制燃料喷射系统和废气净化系统的汽车发动机的燃料控制装置

    公开(公告)号:US4015428A

    公开(公告)日:1977-04-05

    申请号:US488660

    申请日:1974-07-15

    申请人: Mitsuo Kawai

    发明人: Mitsuo Kawai

    CPC分类号: F02D41/0087

    摘要: An improved fuel control apparatus for installation on an automobile engine equipped with an electronically controlled fuel injection system and a catalytic exhaust gas purifying system to prevent excess uncombusted fuel from being carried over into the catalytic purifier and burning therein with a resultant damage thereto. The apparatus essentially comprises a plurality of solenoid valves each associated with one of a plurality of fuel injection nozzles, a device for alternately energizing the solenoid valves to close to selectively stop the supply of fuel to one of the fuel injection nozzles upon elevation of the purifier temperature above a predetermined level, and a device for detecting the temperature of the catalytic purifier and transmitting only in case of elevation of the purifier temperature above a predetermined level a signal which enables the solenoid valve energizing device to function.

    摘要翻译: 一种改进的燃料控制装置,用于安装在配有电子控制燃料喷射系统和催化废气净化系统的汽车发动机上,以防止过量的未燃烧的燃料被运送到催化净化器中并在其中燃烧并造成损坏。 该装置主要包括多个电磁阀,每个电磁阀与多个燃料喷射喷嘴中的一个相关联,一个用于交替地给电磁阀供电的装置,以便在净化器升高时选择性地停止向一个燃料喷射喷嘴供应燃料 温度高于预定水平的装置,以及用于检测催化净化器的温度并且仅在净化器温度升高到高于预定水平的情况下传输使得电磁阀通电装置能够起作用的信号的装置。

    Electronically controlled fuel injection system

    公开(公告)号:US3991726A

    公开(公告)日:1976-11-16

    申请号:US542001

    申请日:1975-01-17

    CPC分类号: F02D41/068 F02B1/04

    摘要: There is provided an electronically controlled fuel injection system comprising a temperature fuel enrichment circuit for generating, in accordance with the output signal of an internal combustion engine temperature sensor, an output signal corresponding to a temperature fuel enrichment characteristic to provide the required fuel enrichment for cold operation, and fuel injection means for injecting an increased quantity of fuel in accordance with the output signal of the temperature fuel enrichment circuit. The system is additionally provided with a revolution compensation circuit for generating a revolution signal corresponding to the number of engine revolutions per minute for continuously decreasing the temperature fuel enrichment characteristic of the temperature fuel enrichment circuit in accordance with increase in the number of engine revolutions per minute. In this way, an improved fuel consumption characteristic is ensured during the warmup period and the underfeeding of fuel under the idling operation is eliminated, and moreover the fuel enrichment is smoothly accomplished to suit changes in the driving conditions of the vehicle.