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公开(公告)号：US10385838B2
公开(公告)日：2019-08-20
申请号：US15409847
申请日：2017-01-19
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
IPC: F04B43/04 , F04B45/047 , F04B53/10 , H01L41/053 , H01L41/09
Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.
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公开(公告)号：US20180065370A1
公开(公告)日：2018-03-08
申请号：US15641054
申请日：2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor： Shih-Chang Chen , Ying-Lun Chang , Hsiang-Dyi Wu , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Jheng-Wei Chen
CPC classification number: B41J2/1623 , B29C53/04 , B29C65/48 , B29C69/00 , B29L2031/7496 , B29L2031/767 , B41J2/161 , F04B17/003 , F04B43/046 , H01L41/23 , H01L41/25
Abstract: A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a flexible plate and a communication plate. The flexible plate includes a movable part. Then, the flexible plate and the communication plate are stacked on and coupled with each other to form the deformable substrate. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate, so that the flexible plate and the communication plate of the deformable substrate are subjected to a synchronous deformation, and a specified depth between the movable part and the bulge of the vibration plate is defined.
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公开(公告)号：US20170222123A1
公开(公告)日：2017-08-03
申请号：US15409917
申请日：2017-01-19
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
CPC classification number: H01L41/09 , F04B45/047 , F16K99/0015 , F16K99/0048 , F16K2099/0094
Abstract: A piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The suspension plate is a square structure. The length of the suspension plate is in a range between 4 mm and 8 mm, and the suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The outer frame is arranged around the suspension plate. The at least one bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate. The piezoelectric ceramic plate is a square structure and has a length not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration.
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公开(公告)号：US20170219120A1
公开(公告)日：2017-08-03
申请号：US15392018
申请日：2016-12-28
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
IPC: F16K99/00
CPC classification number: F16K99/0048 , F16K99/0015 , F16K2099/0082 , F16K2099/0094
Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.
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公开(公告)号：US10529911B2
公开(公告)日：2020-01-07
申请号：US15392080
申请日：2016-12-28
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
Abstract: A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.
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Patent Agency Ranking
公开(公告)号：US10378529B2
公开(公告)日：2019-08-13
申请号：US15409815
申请日：2017-01-19
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
IPC: F04B43/04 , F04B45/047 , F04B53/10 , H01L41/09 , F16K99/00
Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.
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公开(公告)号：US10343405B2
公开(公告)日：2019-07-09
申请号：US15641054
申请日：2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor： Shih-Chang Chen , Ying-Lun Chang , Hsiang-Dyi Wu , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Jheng-Wei Chen
IPC: B29C53/04 , F04B17/00 , F04B43/04 , H01L41/23 , H01L41/25 , B41J2/16 , B29C65/48 , B29C69/00 , B29L31/00
Abstract: A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a flexible plate and a communication plate. The flexible plate includes a movable part. Then, the flexible plate and the communication plate are stacked on and coupled with each other to form the deformable substrate. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate, so that the flexible plate and the communication plate of the deformable substrate are subjected to a synchronous deformation, and a specified depth between the movable part and the bulge of the vibration plate is defined.
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公开(公告)号：US09976673B2
公开(公告)日：2018-05-22
申请号：US15392018
申请日：2016-12-28
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
IPC: F16K99/00
CPC classification number: F16K99/0048 , F16K99/0015 , F16K2099/0082 , F16K2099/0094
Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.
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公开(公告)号：US20170222125A1
公开(公告)日：2017-08-03
申请号：US15410037
申请日：2017-01-19
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
IPC: H01L41/09 , F04B45/047
CPC classification number: H01L41/0973 , F04B45/047 , F16K99/0015 , F16K99/0048 , F16K2099/0094
Abstract: A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.
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公开(公告)号：US20170218942A1
公开(公告)日：2017-08-03
申请号：US15409960
申请日：2017-01-19
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
IPC: F04B45/047 , F04B53/10 , H01L41/053 , H01L41/09 , H01L41/187
CPC classification number: F04B45/047 , F04B43/046 , F04B53/10 , F04B2203/0402 , F04B2203/0404 , F04B2205/05 , F16K99/0015 , F16K99/0048 , F16K2099/0094
Abstract: A miniature fluid control device includes a piezoelectric actuator and a housing. The piezoelectric actuator comprises a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate and has a length not larger than that of the suspension plate. The housing includes a gas collecting plate and a base. The gas collecting plate is a frame body with a sidewall and comprises a plurality of perforations. The base seals a bottom of the piezoelectric actuator and has a central aperture corresponding to the middle portion of the suspension plate. When the voltage is applied to the piezoelectric actuator, the suspension plate is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture of the base to the gas-collecting chamber, and exited from the perforations.
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