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7 条记录 (耗时 0.017 秒)

    Stage mechanism
    1.
    发明授权
    Stage mechanism 失效
    舞台机制

    公开(公告)号：US5066131A

    公开(公告)日：1991-11-19

    申请号：US388484

    申请日：1989-08-02

    申请人： Mikio Iwata ,  Takao Kariya ,  Masaru Ohtsuka

    发明人： Mikio Iwata ,  Takao Kariya ,  Masaru Ohtsuka

    IPC分类号： G12B5/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

    CPC分类号： G03F7/707 ,  G03F7/70716

    摘要： Disclosed is a stage device suitably usable in a semiconductor microcircuit device manufacturing exposure apparatus for printing a pattern of a mask on a semiconductor wafer, for supporting and positioning the wafer with respect to plurality of directions. The device includes two plate members coupled to each other with a predetermined distance maintained therebetween. Each plate member has formed therein X, Y and .theta. stages defined by plural cutout grooves. Each stage is resiliently supported by a leaf spring functioning portion formed in the plate member. A Z stage for displacing the wafer in the Z direction is mounted to an outer circumferential part of one plate member, and a measuring mirror operable in combination with a laser interferometer is provided as a unit with the Z stage. Any motion of each stage can be controlled on the basis of the measurement made by using this mirror. The structure of the stage device ensures high precision and high rigidity and, therefore, the Z axis can be set substantially horizontally. Consequently the stage device is suitably applicable to an exposure apparatus to be used with an SOR ring.

    摘要翻译： 公开了适用于半导体微电路器件制造曝光装置中的阶段装置，用于在半导体晶片上印刷掩模图案，用于相对于多个方向支撑和定位晶片。 该装置包括彼此联接并以其间保持预定距离的两个板构件。 每个板构件都形成有由多个切口槽限定的X，Y和θ台。 每个阶段由形成在板构件中的片簧功能部分弹性地支撑。 在Z方向上移动晶片的Z级安装在一个板状构件的外周部，与Z级一体地设置与激光干涉仪一起操作的测量镜。 可以根据使用该反射镜进行的测量来控制每个阶段的任何运动。 舞台装置的结构确保了高精度和高刚性，因此，Z轴可以基本上水平设置。 因此，平台装置适用于与SOR环一起使用的曝光装置。

    Paper coating composition
    2.
    发明授权
    Paper coating composition 失效
    纸涂料组合物

    公开(公告)号：US4657821A

    公开(公告)日：1987-04-14

    申请号：US807558

    申请日：1985-12-11

    申请人： Shigeru Ura ,  Mikio Iwata ,  Haruo Tanaka ,  Hiroyuki Shiono

    发明人： Shigeru Ura ,  Mikio Iwata ,  Haruo Tanaka ,  Hiroyuki Shiono

    IPC分类号： C08F210/00 ,  C08F218/10 ,  D21H19/58 ,  D21H19/60 ,  C08F218/04 ,  D21H1/28

    CPC分类号： D21H19/58 ,  C08F210/00 ,  C08F218/10 ,  D21H19/60 ,  Y10T428/31891 ,  Y10T428/31906 ,  Y10T428/31993

    摘要： A paper coating composition is disclosed, which comprises:(A) a pigment, and(B) a copolymer emulsion prepared by polymerizing a monomer mixture containing:(i) 5 to 40 wt % of an .alpha.-olefin of the formula:CH.sub.2 .dbd.CH--R.sub.1 wherein R.sub.1 is a hydrogen atom or an alkyl group having 1 to 12 carbon atoms;(ii) 30 to 90 wt % of a vinyl ester of the formula: ##STR1## wherein R.sub.2, R.sub.3 and R.sub.4 are each a hydrogen atom or an alkyl group having 1 to 18 carbon atoms;(iii) 1 to 30 wt % of at least one unsaturated carboxylic acid ester selected from the group consisting of an acrylic acid ester in which the alkyl moiety thereof has 1 to 18 carbon atoms and a methyacrylic acid or dibasic unsaturated carboxylic acid ester in which the alkyl moiety thereof has 1 to 18 carbon atoms; and(iv) 0.1 to 10 wt % of an unsaturated carboxylic acid. The paper coating composition of the invention provides improved printability and printing quality and is particularly useful for gravure printing.

    摘要翻译： 公开了一种纸涂料组合物，其包括：（A）颜料和（B）通过聚合单体混合物制备的共聚物乳液，所述单体混合物包含：（i）5-40重量％的下式的α-烯烃：CH 2 = CH-R1其中R1是氢原子或具有1至12个碳原子的烷基; （ii）30〜90重量％的下式的乙烯基酯：其中R 2，R 3和R 4各自为氢原子或具有1至18个碳原子的烷基; （iii）1〜30重量％的选自丙烯酸酯（其中烷基部分为碳原子数为1〜18）的至少一种不饱和羧酸酯和甲基丙烯酸或二元酸不饱和羧酸酯，其中， 其烷基部分具有1至18个碳原子; 和（iv）0.1〜10重量％的不饱和羧酸。 本发明的纸涂料组合物提供改进的可印刷性和印刷质量，并且对于凹版印刷特别有用。