公开(公告)号：US6062442A

公开(公告)日：2000-05-16

申请号：US185778

申请日：1998-11-03

申请人： Ming-Che Yang ,  Kuo-Feng Huang ,  Eric Liu ,  En-Tien Tan

发明人： Ming-Che Yang ,  Kuo-Feng Huang ,  Eric Liu ,  En-Tien Tan

IPC分类号： B65D5/72

CPC分类号： H01L21/67017 ,  H01L21/6715

摘要： A photoresist dispensing system used in a photoresist coating machine includes a pump, a sucking-back valve, a solenoid valve, a first pump speed controller, a second pump speed controller and a sucking-back speed controller. The pump is used to transport photoresist and spray a substrate. The sucking-back valve is used to suck back liquid photoresist from a transporting duct end. The solenoid is used to activate or inactivate the pump and the sucking-back valve. The first and the second pump speed controllers are separately coupled between the pump and the solenoid valve, and the sucking-back speed controller is coupled between the sucking-back valve and the sucking-back speed controller is coupled between the sucking-back valve and the route, where is between the pump and the second pump speed controller. Hence, the sucking-back valve produces a sucking force after the pump is inactivated and releases a sucking force after pump is activated.

摘要翻译： 在光致抗蚀剂涂布机中使用的光致抗蚀剂分配系统包括泵，回吸阀，电磁阀，第一泵速控制器，第二泵速控制器和回吸速度控制器。 泵用于输送光致抗蚀剂并喷涂基材。 吸回阀用于从输送管道端部吸回液态光致抗蚀剂。 螺线管用于启动或停用泵和吸回阀。 第一和第二泵速控制器分别耦合在泵和电磁阀之间，并且吸回速度控制器耦合在吸回阀和吸回速度控制器之间，该回吸速度控制器耦合在吸回阀和 该路径在泵和第二泵速度控制器之间。 因此，在泵被激活之后，吸回阀产生吸力并在泵被激活之后释放吸力。

公开(公告)号：US6099646A

公开(公告)日：2000-08-08

申请号：US185404

申请日：1998-11-03

申请人： Ming-Che Yang ,  Kuo-Feng Huang ,  En-Tien Tan ,  Kuei-Hsi Lai

发明人： Ming-Che Yang ,  Kuo-Feng Huang ,  En-Tien Tan ,  Kuei-Hsi Lai

IPC分类号： B05C11/08 ,  B05C11/10 ,  B05C11/00

CPC分类号： B05C11/08 ,  B05C11/1002

摘要： A dispensing system used in a spin coater is provided to transport a solvent to a wafer. The dispensing, system includes a switch valve, a sucking-back valve, a solenoid valve, a speed control unit of the sucking-back valve, and a speed control unit of the switch valve. The switch valve controls a solvent dispensing status. The sucking-back valve receives the solvent from the switch valve and exports the solvent to a wafer. The solenoid valve controls the switch valve and the sucking-back valve. The speed control unit of the switch valve is coupled between the switch valve and the solenoid valve and is used for a control of action speed on the switch valve. The speed control unit of the sucking-back valve is coupled between the switch valve and the sucking-back valve, and is used for a control of action speed of the sucking-back valve by a sufficient delay time of action.

摘要翻译： 提供用于旋转涂布机中的分配系统以将溶剂输送到晶片。 分配系统包括开关阀，回吸阀，电磁阀，回吸阀的速度控制单元和开关阀的速度控制单元。 开关阀控制溶剂分配状态。 吸回阀从开关阀接收溶剂并将溶剂输出到晶片。 电磁阀控制开关阀和回吸阀。 开关阀的速度控制单元连接在开关阀和电磁阀之间，用于控制开关阀上的动作速度。 回抽阀的速度控制单元联接在开关阀和回吸阀之间，用于通过足够的延迟动作来控制回抽阀的动作速度。

公开(公告)号：US6048399A

公开(公告)日：2000-04-11

申请号：US82949

申请日：1998-05-21

申请人： En-Tien Tan ,  Ming-Che Yang ,  Kuo-Feng Huang ,  Ching-Chih Cheng

发明人： En-Tien Tan ,  Ming-Che Yang ,  Kuo-Feng Huang ,  Ching-Chih Cheng

IPC分类号： B05C5/00 ,  B05C11/08 ,  B05C11/10 ,  H01L21/00 ,  H01L21/31 ,  B05C11/02 ,  B05D3/12

CPC分类号： H01L21/6715 ,  B05C11/08 ,  B05C11/10

摘要： A SOG coater nozzle pot includes a pot for containing fluid and letting the fluid in the pot flow out, a funneled nozzle including a wider opening for receiving fluid from the pot and a narrower opening on a protuberance inserted into a duct, and a mounting device for mounting the funneled nozzle on the SOG coater. The nozzle pot according to the invention makes the mounting/dismounting operations of the pot more convenient and less time-consuming. The stability of the SOG coater is maintained as well.

摘要翻译： SOG涂布机喷嘴罐包括用于容纳流体并使罐中的流体流出的罐，包括用于从罐接收流体的较宽开口和在插入管道中的突起上的较窄开口的漏斗喷嘴，以及安装装置 用于将漏斗喷嘴安装在SOG涂布机上。 根据本发明的喷嘴罐使得罐的安装/拆卸操作更方便和更少耗时。 也保持SOG涂布机的稳定性。

公开(公告)号：US6139636A

公开(公告)日：2000-10-31

申请号：US189846

申请日：1998-11-12

申请人： Kuo-Feng Huang ,  Kuo-Chen Wang ,  Ming-Che Yang ,  Hsien-Jung Hsu

发明人： Kuo-Feng Huang ,  Kuo-Chen Wang ,  Ming-Che Yang ,  Hsien-Jung Hsu

IPC分类号： B05B1/14 ,  B05C11/08 ,  B05B13/04

CPC分类号： B05B1/14 ,  B05C11/08

摘要： A spray coating device for coating a rotating wafer according to the invention is disclosed. The spray coating device comprises a spray head having a plurality of spray holes which are located on one end thereof with more in number on both sides than on the center of the end for uniformly spraying a chemical liquid on the rotated wafer. Since spray holes are more in number on the both sides than on the center of the end, the rotated wafer can be uniformly spray coated with the chemical liquid even though several spray holes are congested.

摘要翻译： 公开了一种用于涂覆根据本发明的旋转晶片的喷涂装置。 喷涂装置包括喷头，喷头具有多个喷孔，该多个喷孔位于其一端，其两侧的数量多于末端的中心，用于均匀地喷洒旋转的晶片上的化学液体。 由于喷孔在两侧的数量多于端部的中心，即使几个喷孔堵塞，旋转的晶片也可以均匀地喷涂有化学液体。

公开(公告)号：US06170512B2

公开(公告)日：2001-01-09

申请号：US09431938

申请日：1999-11-01

申请人： Kuei-Hsi Lai ,  Kuo-Feng Huang ,  Ming-Che Yang ,  Hung-Lung Mar

发明人： Kuei-Hsi Lai ,  Kuo-Feng Huang ,  Ming-Che Yang ,  Hung-Lung Mar

IPC分类号： G05D706

CPC分类号： G05D7/0676 ,  Y10T137/3127 ,  Y10T137/7759

摘要： A supply apparatus comprises a storage tank, a chemical flow pipe to route a chemical solution into a semiconductor processing room, a pressurizing apparatus to supply gas to the storage tank to make the chemical solution flow into the processing room, and an electro-Pneumatic regulator valve to adjust the pressure of the input gas. The flow control device comprises a flow sensor, a set-up apparatus, and a processor for generating a control signal to the pressurizing apparatus depending on a difference between a target value and a measurement value to adjust the flow of the chemical solution in the chemical flow pipe. The flow sensor comprises a hollow cylinder, a choking magnetic core movably positioned inside the hollow cylinder, and a first and second conductive coil wrapped around the outer wall of the hollow cylinder which uses alternating current to generate a magnetic flux and sense a change in the magnetic flux to measure the flow of chemical solution.

摘要翻译： 供给装置包括储存箱，将化学溶液输送到半导体处理室的化学流动管，将储存罐供给气体以使化学溶液流入处理室的加压装置，以及电动气动调节器 阀门调节输入气体的压力。 流量控制装置包括流量传感器，设置装置和处理器，用于根据目标值和测量值之间的差异向加压装置产生控制信号，以调整化学溶液在化学品中的流动 流量管。 流量传感器包括中空圆筒，可移动地定位在中空圆柱体内的阻塞磁芯，以及缠绕在中空圆柱体的外壁上的第一和第二导电线圈，其使用交流电产生磁通量并感测中空圆柱体的变化 磁通量测量化学溶液的流量。

公开(公告)号：US20080157909A1

公开(公告)日：2008-07-03

申请号：US11962038

申请日：2007-12-20

申请人： Ching-Piao Chen ,  Wan-Pei Chen ,  Mu-Ping Chen ,  Ming-Che Yang ,  Po-Shen Chen

发明人： Ching-Piao Chen ,  Wan-Pei Chen ,  Mu-Ping Chen ,  Ming-Che Yang ,  Po-Shen Chen

IPC分类号： H01F17/00

CPC分类号： H02M3/33523 ,  H01F38/14 ,  H02J5/005 ,  H02J50/12 ,  H02J50/90

摘要： The configurations of a non-contact power supply and a coupling detection method thereof are provided. The proposed non-contact power supply includes a detachable transformer including a primary side, a current sensor coupled to the primary side and sensing a primary side current and a controller coupled to the current sensor, receiving the current and determining whether the power supply is under a coupling status according to the current.

摘要翻译： 提供非接触电源的配置及其耦合检测方法。 所提出的非接触电源包括可拆卸变压器，其包括初级侧，耦合到初级侧的电流传感器并感测初级侧电流，以及耦合到电流传感器的控制器，接收电流并确定电源是否在 根据当前的耦合状态。

公开(公告)号：US06927715B2

公开(公告)日：2005-08-09

申请号：US09750819

申请日：2000-12-28

申请人： Sheng-Tsai Chang ,  Ming-Che Yang ,  You-Jan Lin ,  Kun-Ying Lo

发明人： Sheng-Tsai Chang ,  Ming-Che Yang ,  You-Jan Lin ,  Kun-Ying Lo

IPC分类号： H03M1/82 ,  H03M3/00

CPC分类号： H03M1/822

摘要： A multi-level pulse width modulation (MPWM) digital-to-analog converter for receiving a n-bit pulse code modulation (PCM) signal and then outputting a m-level analog signal is provided. The MPWM DAC comprises a converter circuit, 2m first output drivers, 2m second output drivers and a control circuit. The converter circuit is used for converting (n-m) most significant bits (MSB) of the n-bit PWM signal into a PWM waveform, and then generating a first input signal and a second input signal. Each of the 2m first output drivers is used for receiving the first input signal, and then generating a first output current, wherein the first output currents of the 2m first output drivers can be equal or not. Each of the 2m second output drivers is used for receiving the second input signal, and then generating a second output current, wherein the second output currents of the 2m first output drivers can be equal or not. The control circuit is coupled to the converter circuit, 2m first output drivers, and 2m second output drivers, for controlling the on-off status of each of the first and the second output drivers.

摘要翻译： 提供了用于接收n位脉码调制（PCM）信号，然后输出m电平模拟信号的多电平脉宽调制（MPWM）数/模变换器。 MPWM DAC包括转换器电路，第二输出驱动器，第二输出驱动器和控制电路。 转换器电路用于将n位PWM信号的（n-m）最高有效位（MSB）转换为PWM波形，然后产生第一输入信号和第二输入信号。 两个第一输出驱动器中的每一个用于接收第一输入信号，然后产生第一输出电流，其中第二输出驱动器的第一输出电流 司机可以平等与否。 两个第二输出驱动器中的每一个用于接收第二输入信号，然后产生第二输出电流，其中第二输出电流的第二输出电流 司机可以平等与否。 控制电路耦合到转换器电路，第二输出驱动器和第二输出驱动器，用于控制第一和第二输出驱动器的开/关状态， 第二个输出驱动。

公开(公告)号：US6020550A

公开(公告)日：2000-02-01

申请号：US313234

申请日：1999-05-17

申请人： Ming-Che Yang

发明人： Ming-Che Yang

IPC分类号： G10H7/02 ,  G10H7/00

CPC分类号： G10H7/02 ,  G10H2250/035 ,  G10H2250/235

摘要： An improved method for forming a timbre sample (Q sample) is described. A first Q sample is extracted. A fixed length of the first Q sample is extracted to form a first QL. A portion of the first Q sample other than the first QL is treated as a first pre-waveform. A last portion of the first pre-waveform is extracted and is processed with the second Q sample by a first COS modulation so as to obtain a second QL, which is connected to the first pre-waveform to form a second Q sample. A first period waveform of the second QL and a last portion of the first pre-waveform are processed by a second COS modulation to form a single period QL. Repeating the single period QL forms a third QL. Connecting the third QL to the first pre-waveform forms a third Q sample. The second QL is transformed by a digital Fourier transformation, and its high frequency modes are removed. The transformed second QL is inversely transformed back by an inverse digital Fourier transformation to form a fourth QL. Adding the third QL and the fourth QL forms a fifth WL sample, which power is properly normalized. A second pre-waveform is obtained by repeating the sixth QL. The first and second of pre-waveforms are processed by a linear cross fading algorithm to form a third pre-waveform. The third pre-waveform and the sixth QL are connected together to obtain an improved Q sample.

摘要翻译： 描述了用于形成音色样本（Q样本）的改进方法。 提取第一个Q样本。 提取第一Q样本的固定长度以形成第一QL。 除了第一QL之外的第一Q样本的一部分被视为第一预波形。 提取第一预波形的最后部分，并通过第一COS调制与第二Q采样进行处理，以获得连接到第一预波形以形成第二Q采样的第二QL。 通过第二COS调制来处理第二QL的第一周期波形和第一预波形的最后部分以形成单周期QL。 重复单期QL形成第三个QL。 将第三个QL连接到第一个预波形成第三个Q样本。 通过数字傅里叶变换来转换第二个QL，并且去除其高频模式。 变换的第二QL通过逆数字傅里叶变换逆向变换形成第四个QL。 添加第三个QL和第四个QL形成第五个WL样本，其功率被适当地归一化。 通过重复第六个QL获得第二个预先波形。 第一和第二预波形由线性交叉衰落算法处理以形成第三预波形。 第三预波形和第六QL连接在一起以获得改进的Q样本。

公开(公告)号：US20090231859A1

公开(公告)日：2009-09-17

申请号：US12190845

申请日：2008-08-13

申请人： Tou-Sheng Yeh ,  Chang-Yi Chen ,  Ming-Che Yang ,  Horng-Chin Yeh

发明人： Tou-Sheng Yeh ,  Chang-Yi Chen ,  Ming-Che Yang ,  Horng-Chin Yeh

IPC分类号： F21V5/02

CPC分类号： G02B5/045 ,  G02B6/0053 ,  G02F2001/133607

摘要： A brightness enhancement component includes a substrate and a plurality of prism elements. The prism elements are disposed on the substrate, and each element prism has a relatively high crest and at least one relatively low crest. A crest line of the relatively low crest is equal to or shorter than a crest line of the relatively high crest in length. All of the relatively high crests have their crest lines in parallel with one another, or all of the relatively high and relatively low crests have their crest lines in parallel with one another.

摘要翻译： 亮度增强部件包括基板和多个棱镜元件。 棱镜元件设置在基板上，并且每个元件棱镜具有相对较高的峰值和至少一个相对低的波峰。 相对较低的波峰的波峰线等于或短于相对较高波峰长度的波峰线。 所有相对较高的波峰都具有彼此平行的波峰线，或者所有相对较高和相对较低的波峰的波峰线彼此平行。

公开(公告)号：US08760897B2

公开(公告)日：2014-06-24

申请号：US13455758

申请日：2012-04-25

申请人： Ming-Che Yang ,  Pao-Chuan Lin ,  Po-Yen Chen ,  Ching-Tsa Pan ,  Yeh-Hsiang Ho

发明人： Ming-Che Yang ,  Pao-Chuan Lin ,  Po-Yen Chen ,  Ching-Tsa Pan ,  Yeh-Hsiang Ho

IPC分类号： H02M7/537 ,  G05F1/00

CPC分类号： H02M3/33523 ,  H02M3/005 ,  H02M2001/007

摘要： A DC-AC converter is provided. The DC-AC converter includes a time-varying DC power generating circuit, an AC power generating circuit and a transmission capacitor. The time-varying DC power generating circuit is controlled by a pulse width modulation (PWM) signal to transform a DC source into a time-varying DC power. With reference to the time-varying DC power, the AC power generating circuit is controlled by a first polarity switching and a second polarity switching signal to generate an AC power. The transmission capacitor, coupled to the time-varying DC power generating circuit and the AC power generating circuit, transmits the time-varying DC power from the time-varying DC generating circuit to the AC power generating circuit.

摘要翻译： 提供一个DC-AC转换器。 DC-AC转换器包括时变直流发电电路，交流发电电路和发送电容器。 时变直流发电电路由脉冲宽度调制（PWM）信号控制，将直流电源变换成时变直流电源。 参考时变直流电源，通过第一极性切换和第二极性切换信号来控制交流发电电路，生成交流电力。 耦合到时变直流发电电路和交流发电电路的发送电容器将来自时变直流发电电路的时变直流电力发送到交流发电电路。