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1.发明授权
公开(公告)号：US4631076A
公开(公告)日：1986-12-23
申请号：US675132
申请日：1984-11-27
CPC分类号： F01N3/0293 , B01D53/86 , F01N3/029 , F01N3/035 , F01N3/206 , F01N2250/02 , F01N2470/30 , F01N2610/01 , F01N3/38 , Y10S55/30
摘要： Apparatus for removing black fumes from exhaust gas from an internal combustion engine includes a filter mounted on an exhaust pipe of the engine. The filter includes a body defining a filter chamber and a filter element mounted within the filter chamber for collecting carbon particles constituting the black fume. A solution dispersing device is provided for dispersing a solution of catalyst to the exhaust gas in the filter chamber at a position upstream of the filter element to cause the oxidation of the carbon particles collected in the filter element to remove them therefrom. There is also disclosed a method of removing black fume from exhaust gas from the internal combustion engine.
摘要翻译： 用于从内燃机的废气中除去黑烟的装置包括安装在发动机排气管上的过滤器。 过滤器包括限定过滤室的主体和安装在过滤室内的过滤元件，用于收集构成黑烟的碳颗粒。 提供了一种溶液分散装置，用于将催化剂溶液在过滤器元件的上游位置处的过滤室中的排气分散，从而使收集在过滤器元件中的碳颗粒氧化从其中除去。 还公开了从内燃机的废气中除去黑烟的方法。
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公开(公告)号：US4781511A
公开(公告)日：1988-11-01
申请号：US932182
申请日：1986-11-18
IPC分类号： H01L21/02 , H01L21/22 , H01L21/677 , C23C15/00
CPC分类号： H01L21/67775 , H01L21/67772 , Y10S414/137 , Y10S414/139 , Y10S414/14
摘要： A semiconductor processing system which includes: a first semiconductor wafer cassette for housing semiconductor wafers; a first transfer pod for enclosing the first cassette airtightly, the first pod having a box-like pod body with an open bottom and a bottom plate detachably attached to the pod body for closing the bottom of the pod body; a wafer processing equipment having a first port for loading the cassette and a canopy covering the first port, the processing equipment processing the wafer in the first cassette when the cassette is loaded in the first port; and a first mechanism for transferring the first cassette between the first port of the processing equipment and the first pod without exposing the cassette and the wafers therein to outside contamination. The first transferring mechanism includes: a second port, provided on the canopy of the processing equipment at the position directly above the first port, for placing the first pod on the second port, the second port including a port assembly for attaching and detaching the bottom plate of the first pod to and from the pod body when the first pod is placed on the second port; and a first lift mechanism, arranged mainly between the first and second ports, for conveying the bottom plate of the first pod between the first and second ports when the bottom plate of the pod is detached from the pod body.
摘要翻译： 一种半导体处理系统，包括：用于容纳半导体晶片的第一半导体晶片盒; 用于密封地封闭第一盒的第一传送盒，第一盒具有带有敞开的底部的盒状盒体和可拆卸地附接到盒体的底板，用于封闭荚体的底部; 晶片处理设备具有用于装载盒的第一端口和覆盖第一端口的盖，处理设备在盒装载在第一端口中时处理第一盒中的晶片; 以及用于在处理设备的第一端口和第一容器之间转移第一盒的第一机构，而不将盒和其中的晶片暴露于外部污染物。 第一传送机构包括：第二端口，设置在位于第一端口正上方的处理设备的顶盖上，用于将第一容器放置在第二端口上，第二端口包括端口组件，用于连接和拆卸底部 当第一荚放置在第二端口上时，第一荚的板与荚体之间的板; 以及主要设置在第一和第二端口之间的第一提升机构，用于当荚的底板从荚体脱离时，在第一和第二端口之间输送第一荚的底板。
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公开(公告)号：US4904153A
公开(公告)日：1990-02-27
申请号：US119839
申请日：1987-11-12
申请人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto , Takashi Matsumoto , Kiwamu Yamamoto , Toshio Takasu
发明人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto , Takashi Matsumoto , Kiwamu Yamamoto , Toshio Takasu
CPC分类号： H01L21/67796 , B25J15/02 , B25J17/025 , B25J18/02 , B25J19/0091 , B25J21/005 , B25J5/02 , Y10S294/902 , Y10S414/14
摘要： There is disclosed a robot used in a clean room and adapted to transport a wafer cassette containing semiconductor wafers. The robot includes: a guide rail disposed in the clean room; a robot body slidably connected to the guide rail for movement along the guide rail; and a first drive mechanism for driving the robot body along the guide rail. The robot body includes: a clamping hand for releasably clamping the wafer cassette; an arm assembly, extending between the guide rail and the clamping hand, for controlling the position of the clamping hand; and a wrist assembly, interposed between the arm assembly and the clamping hand, for adjusting the orientation of the clamping hand. The wrist assembly includes: a wrist frame connected via a horizontal pivot to the arm assembly for upward and downward movement, the wrist frame rotatably supporting the clamping hand for turning about an axis perpendicular to the horizontal pivot; a second drive mechanism for pivoting the wrist frame relative to the arm assembly; and a third drive mechanism for turning the clamping hand relative to the wrist frame.
摘要翻译： 公开了一种在洁净室中使用并适于运送包含半导体晶片的晶片盒的机器人。 机器人包括：布置在洁净室中的导轨; 可滑动地连接到所述导轨以沿着所述导轨移动的机器人主体; 以及用于沿导轨驱动机器人主体的第一驱动机构。 机器人主体包括：用于可释放地夹紧晶片盒的夹紧手; 臂组件，其在导轨和夹持手之间延伸，用于控制夹持手的位置; 以及插入在臂组件和夹持手之间的腕部组件，用于调节夹紧手的取向。 手腕组件包括：手腕架，其经由水平枢轴连接到臂组件以用于向上和向下运动，所述腕架可旋转地支撑夹持手以围绕垂直于水平枢轴的轴线转动; 用于相对于所述臂组件枢转所述腕架的第二驱动机构; 以及用于相对于手腕架转动夹持手的第三驱动机构。
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公开(公告)号：US4903610A
公开(公告)日：1990-02-27
申请号：US126475
申请日：1987-11-25
申请人： Takashi Matsumoto , Shigeru Tanaka , Tsutomu Shinya , Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto
发明人： Takashi Matsumoto , Shigeru Tanaka , Tsutomu Shinya , Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto
IPC分类号： B61B13/08 , B61C11/00 , H01L21/677
CPC分类号： H01L21/67706 , B61B13/08 , B61C11/00 , H01L21/6773
摘要： A railway carrier apparatus for semiconductor wafers which are contained in a wafer cassette is disclosed. This railway carrier apparatus includes: a carrier for carrying the wafer cassette; a guide rail, disposed along a line of travel of the carrier, for supporting the carrier to guide the carrier along the line of travel; and a drive mechanism for driving the carrier along the line of travel. The carrier includes; a carrier body slidably connected to the guide rail for movement along the guide rail; and a bedplate member, mounted on the carrier body, for supporting the wafer cassette on its upper face. The upper face of the bedplate member is inclined with respect to a horizontal plane in such a manner that one of its opposite side edges is positioned at a higher level than the other side edge.
摘要翻译： 公开了一种包含在晶片盒中的用于半导体晶片的铁路载体装置。 这种铁路运输装置包括：承载晶片盒的载体; 导轨，沿着所述载体的行进线布置，用于支撑所述载体以沿所述行进线引导所述载体; 以及用于沿行驶线驱动行星架的驱动机构。 承运人包括 可滑动地连接到所述导轨上以沿着所述导轨运动的托架体; 以及安装在载体主体上的底板构件，用于将晶片盒支撑在其上表面上。 底板构件的上表面相对于水平面倾斜，使得其相对侧边缘之一位于比另一侧边缘更高的高度。
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公开(公告)号：US4867629A
公开(公告)日：1989-09-19
申请号：US123313
申请日：1987-11-20
申请人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Kenji Okamoto , Shintaro Kobayashi , Takashi Matsumoto , Tsutomu Shinya , Shigeru Tanaka , Toshio Takasu , Kiwamu Yamamoto
发明人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Kenji Okamoto , Shintaro Kobayashi , Takashi Matsumoto , Tsutomu Shinya , Shigeru Tanaka , Toshio Takasu , Kiwamu Yamamoto
IPC分类号： H01L21/677
CPC分类号： H01L21/67769 , Y10S414/14
摘要： There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having an entrance, formed in its front wall, for allowing works to come in and go out of the housing therethrough; an air supply duct for supplying the inside of the housing with clean air; a vertical rotation shaft rotatably disposed in the housing for turning about its longitudinal axis; a drive motor for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure. The rack assembly is coaxially secured to the rotation shaft and has a plurality of compartments for storing the works therewithin. The compartments open radially outward and are partitioned off from one another so as to prevent cross contamination by dust among the compartments.
摘要翻译： 公开了一种用于存储诸如用于容纳半导体晶片的晶片盒的工作的防尘存储柜装置。 存储柜装置包括：壳体，其具有形成在其前壁中的入口，用于允许工件从壳体中进出; 用于向壳体内部供给清洁空气的供气管道; 可旋转地设置在所述壳体中以围绕其纵向轴线转动的垂直旋转轴; 用于转动旋转轴的驱动马达; 以及基本上圆柱形结构的齿条组件。 齿条组件同轴地固定到旋转轴上，并具有多个用于在其中存储工件的隔间。 隔间径向向外敞开，并隔开隔间，以防止间隔室内的灰尘交叉污染。
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公开(公告)号：US4826360A
公开(公告)日：1989-05-02
申请号：US18993
申请日：1987-02-25
IPC分类号： H01L21/677 , H01L21/687 , B65G51/32
CPC分类号： H01L21/67724 , H01L21/6773 , H01L21/67736 , H01L21/67775 , H01L21/68707 , Y10S414/139 , Y10S414/14
摘要： A transfer system for transferring a SMIF pod.TM. in a clean room, in which the pod is adapted to contain a wafer cassette. The transfer system includes: at least one pair of SMIF arms.TM., the arms disposed adjacent to a semiconductor processing apparatus for transferring wafers, carried in the wafer cassette, into and out of the semiconductor processing apparatus; a transfer tube disposed near the arms; a vehicle adapted to carry the pod and adapted to move within the transfer tube; evacuation mechanism for evacuating the transfer tube to produce a negative pressure within the transfer tube so that the vehicle is moved along an axis of the transfer tube due to the negative pressure; and at least one pair of conveying mechanisms for conveying the vehicle between the transfer tube and respective arms.
摘要翻译： 传送系统，用于将洁净室中的SMIF盒TM传送到其中，其中盒子适于包含晶片盒。 传送系统包括：至少一对SMIF臂TM，与半导体处理设备相邻设置的用于将晶片盒中承载的晶片转移到半导体处理设备中的臂; 设置在臂附近的转移管; 适于承载所述荚并适于在所述传送管内移动的车辆; 排出机构，用于排出输送管，以在输送管内产生负压，使得车辆由于负压而沿着输送管的轴线移动; 以及至少一对传送机构，用于在传送管和相应的臂之间传送车辆。
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公开(公告)号：US4345431A
公开(公告)日：1982-08-24
申请号：US194244
申请日：1980-03-25
申请人： Yoshinobu Suzuki , Kiyoshi Chiba , Tomoya Tukuhiro , Yoshiyuki Iwasawa , Yasuo Kajioka , Tomio Komine
发明人： Yoshinobu Suzuki , Kiyoshi Chiba , Tomoya Tukuhiro , Yoshiyuki Iwasawa , Yasuo Kajioka , Tomio Komine
IPC分类号： F01N3/025 , F01N3/032 , F01N3/035 , F01N3/20 , F01N3/28 , F01N3/30 , F01N13/14 , F02B3/06 , F01N3/38
CPC分类号： F01N3/306 , F01N3/0217 , F01N3/025 , F01N3/032 , F01N3/035 , F01N3/20 , F01N3/2882 , F01N13/14 , F01N2250/04 , F01N2250/06 , F01N2410/04 , F02B3/06 , Y10S55/30
摘要： Heat-resistant filters 6, 7 are disposed at the upstream side of a catalyst bed 9. These heat-resistant filters 6, 7 perform filtration to completely catch and remove the smoke particles suspended by the exhaust gas, so that the undesirable attaching of the smoke particles to the catalyst bed 9 is fairly avoided. Also, means are provided to regenerate the heat-resistant filters simply by burning the smoke particles attaching to these filters. In another embodiment, a heat-resistant filter 24 and a catalyst bed 26 are shaped to have hollow cylindrical forms and are superposed to each other. For regenerating the heat-resistant filter 24, hot air is introduced into the filter 24 by the action of a high pressure burner 28 or a vacuum generating section 33. The heat-resistant filter 24 and the catalyst bed 26 are accomodated by a single case 21.
摘要翻译： PCT No.PCT / JP79 / 00194 Sec。 371日期1980年3月25日 102（e）1980年3月25日PCT申请1979年7月26日PCT公布。 出版物WO80 / 00362 1980年3月6日。耐热过滤器6,7设置在催化剂床9的上游侧。这些耐热过滤器6,7进行过滤以完全捕获并除去由排气悬浮的烟颗粒， 使得烟雾颗粒不期望地附着在催化剂床9上是相当避免的。 而且，提供了简单地通过燃烧附着在这些过滤器上的烟雾颗粒来再生耐热过滤器的装置。 在另一个实施例中，耐热过滤器24和催化剂床26成形为具有中空圆柱形并且彼此重叠。 为了再生耐热过滤器24，通过高压燃烧器28或真空发生部33的作用将热空气引入过滤器24中。耐热过滤器24和催化剂床26由单个壳体 21。
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公开(公告)号：US4917004A
公开(公告)日：1990-04-17
申请号：US311914
申请日：1989-02-17
申请人： Kenji Okamoto , Yoshiyuki Iwasawa
发明人： Kenji Okamoto , Yoshiyuki Iwasawa
CPC分类号： B25J21/005 , F24F3/161
摘要： A robot traveling duct for clean room in which a vertical laminar flow of air is produced from a ceiling filter toward a floor thereof, and in which the robot traveling duct is arranged within the clean room and below the ceiling filter and surrounds a guide rail of the robot, the robot traveling duct including a longitudinal opening for connection between the guide rail and the robot. The robot traveling duct includes a first enclosure for enclosing the guide rail to extend along the guide rail, the first enclosure having an air intake system for introducing air, issuing from the ceiling filter, into the first enclosure. The robot traveling duct further includes a second enclosure mounted to the first enclosure to be located below the first enclosure, the second enclosure including a second enclosure filter for filtering air therein and allowing the filtered air to go downwards into the clean room, the second enclosure extending along the guide rail and being equal in width to the first enclosure. The robot traveling duct is further provided with an air forcing mechanism for forcing air from the first enclosure into the second enclosure, whereby a laminar air flow is substantially produced just below the second enclosure means by actuating the air forcing mechanism.
摘要翻译： 一种用于洁净室的机器人行进管道，其中从天花板过滤器向其地板产生垂直层流，并且其中机器人行进管道布置在洁净室内并且在天花板过滤器下方并且围绕 机器人，机器人行进管道，其包括用于在导轨和机器人之间连接的纵向开口。 机器人行进管道包括用于封闭导轨以沿导轨延伸的第一外壳，第一外壳具有用于引入空气的进气系统，从天花板过滤器发出到第一外壳。 所述机器人行进管道还包括安装到所述第一外壳的第二外壳，以定位在所述第一外壳下方，所述第二外壳包括用于过滤空气的第二外壳过滤器，并允许所述经过滤的空气向下进入所述洁净室，所述第二外壳 沿着导轨延伸并且宽度与第一外壳相等。 机器人行进管道还设置有空气推动机构，用于迫使空气从第一外壳进入第二外壳，由此通过致动空气推动机构，基本上在第二封闭装置的正下方产生层流气流。
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