摘要:
Semiconductor devices and methods of forming the same are provided. The semiconductor device may include a semiconductor element disposed on a substrate and including an insulating layer and a gate electrode, a doped region having a first conductivity-type on the substrate, a conductive interconnection electrically connected to the gate electrode, and a first contact plug having a second conductivity-type and electrically connecting the conductive interconnection and the doped region to each other and constituting a Zener diode by junction with the doped region.
摘要:
A capacitive motion sensor includes a primary plate including a primary pattern replicated periodically, a secondary plate including a plurality of pattern regions with an insulated region inserted there between, wherein each of the pattern regions has a secondary pattern replicated periodically, a signal source for sending a plate input signal to the primary plate, and a displacement measuring unit for receiving a plurality of plate output signals from the secondary plate to measure a displacement of a moving one of the plates with respect to the other one of the plates.The primary plate is arranged in parallel with the secondary plate in such a manner that the primary pattern is confronted with the secondary pattern and the pattern regions of the secondary plate are arranged in a two-dimensional array.
摘要:
A contact-type electric capacitive displacement sensor includes a stationary element having a stationary plate, a stationary conductive pattern formed on the stationary plate and an insulation film coated on the stationary plate and a displaceable element having a displaceable plate, a displaceable conductive pattern formed on the displaceable plate and an insulation film coated on the displaceable plate. The stationary and the displaceable conductive patterns have a cyclic pattern of conductor to thereby produce a variation of capacitance therebetween when moving relative to each other.
摘要:
A light-emitting device is capable of oscillating in a convex-whispering gallery mode. The lighting-emitting device includes a PIN-type semiconductor including a p-type distributed Bragg reflector, an active region and an n-type distributed Bragg reflector formed on a substrate by an epitaxial growth, wherein the PIN-type semiconductor having a hole with a predetermined diameter formed thereon, and an electrode connected to a region around the hole for applying a current to the hole. Further disclosed are a method for manufacturing the light-emitting device and an array of light-emitting devices.
摘要:
A light-emitting device is capable of oscillating in a convex-whispering gallery mode. The lighting-emitting device includes a PIN-type semiconductor including a p-type distributed Bragg reflector, an active region and an n-type distributed Bragg reflector formed on a substrate by an epitaxial growth, wherein the PIN-type semiconductor having a hole with a predetermined diameter formed thereon, and an electrode connected to a region around the hole for applying a current to the hole. Further disclosed are a method for manufacturing the light-emitting device and an array of light-emitting devices.
摘要:
A plasma apparatus includes a process chamber having an inner space, a chuck disposed in the process chamber and having a top surface on which a substrate is loaded, a gas supply unit supplying a process gas into the process chamber, a plasma generating unit generating plasma over the chuck, and a direct current (DC) power generator applying a DC pulse signal to the chuck. A period of the DC pulse signal may include a negative pulse duration during which a negative pulse is applied, a positive pulse duration during which a positive pulse is applied, and a pulse-off duration during which the negative pulse and the positive pulse are turned off. The positive pulse duration is between the negative pulse duration and the pulse-off duration. The pulse-off duration may comprise a voltage having a lower magnitude than the voltage of the positive pulse, such as a ground voltage.
摘要:
A contact-type electric capacitive displacement sensor includes a stationary element having a stationary plate, a stationary conductive pattern formed on the stationary plate and an insulation film coated on the stationary plate and a displaceable element having a displaceable plate, a displaceable conductive pattern formed on the displaceable plate and an insulation film coated on the displaceable plate. The stationary and the displaceable conductive patterns have a cyclic pattern of conductor to thereby produce a variation of capacitance therebetween when moving relative to each other.