Semiconductor device and method for forming the same
    1.
    发明授权
    Semiconductor device and method for forming the same 有权
    半导体装置及其形成方法

    公开(公告)号:US08963252B2

    公开(公告)日:2015-02-24

    申请号:US13618127

    申请日:2012-09-14

    IPC分类号: H01L27/06 H01L27/02

    CPC分类号: H01L27/0255 H01L27/0629

    摘要: Semiconductor devices and methods of forming the same are provided. The semiconductor device may include a semiconductor element disposed on a substrate and including an insulating layer and a gate electrode, a doped region having a first conductivity-type on the substrate, a conductive interconnection electrically connected to the gate electrode, and a first contact plug having a second conductivity-type and electrically connecting the conductive interconnection and the doped region to each other and constituting a Zener diode by junction with the doped region.

    摘要翻译: 提供了半导体器件及其形成方法。 半导体器件可以包括设置在衬底上并包括绝缘层和栅电极的半导体元件,在衬底上具有第一导电类型的掺杂区域,电连接到栅电极的导电互连和第一接触插塞 具有第二导电类型并且将导电互连和掺杂区彼此电连接并通过与掺杂区结合而构成齐纳二极管。

    Capacitive motor sensor
    2.
    发明授权
    Capacitive motor sensor 失效
    电容式电机传感器

    公开(公告)号:US06996495B2

    公开(公告)日:2006-02-07

    申请号:US10737783

    申请日:2003-12-18

    CPC分类号: G01D5/2415 H03M1/645

    摘要: A capacitive motion sensor includes a primary plate including a primary pattern replicated periodically, a secondary plate including a plurality of pattern regions with an insulated region inserted there between, wherein each of the pattern regions has a secondary pattern replicated periodically, a signal source for sending a plate input signal to the primary plate, and a displacement measuring unit for receiving a plurality of plate output signals from the secondary plate to measure a displacement of a moving one of the plates with respect to the other one of the plates.The primary plate is arranged in parallel with the secondary plate in such a manner that the primary pattern is confronted with the secondary pattern and the pattern regions of the secondary plate are arranged in a two-dimensional array.

    摘要翻译: 一种电容式运动传感器包括:包括周期性复制的主要图案的初级板,包括多个图案区域的次级板,其间插入有绝缘区域,其中每个图案区域具有周期性复制的次级图案,用于发送的信号源 向所述主板的板输入信号,以及位移测量单元,用于从所述次级板接收多个板输出信号,以测量所述板中的移动板之间相对于所述另一板的位移。

    Contact-type electric capacitive displacement sensor
    3.
    发明授权
    Contact-type electric capacitive displacement sensor 有权
    接触式电容位移传感器

    公开(公告)号:US07347102B2

    公开(公告)日:2008-03-25

    申请号:US11200091

    申请日:2005-08-10

    IPC分类号: G01B7/16 G01L1/00

    CPC分类号: G01D5/2412

    摘要: A contact-type electric capacitive displacement sensor includes a stationary element having a stationary plate, a stationary conductive pattern formed on the stationary plate and an insulation film coated on the stationary plate and a displaceable element having a displaceable plate, a displaceable conductive pattern formed on the displaceable plate and an insulation film coated on the displaceable plate. The stationary and the displaceable conductive patterns have a cyclic pattern of conductor to thereby produce a variation of capacitance therebetween when moving relative to each other.

    摘要翻译: 接触型电容容量位移传感器包括具有固定板的固定元件,形成在固定板上的固定导电图案和涂覆在固定板上的绝缘膜,以及具有位移板的位移元件, 可移动板和涂覆在可移动板上的绝缘膜。 固定和可移位的导电图案具有导体的循环图案,从而当相对于彼此移动时产生电容的变化。

    Plasma apparatus and method of fabricating semiconductor device using the same
    6.
    发明授权
    Plasma apparatus and method of fabricating semiconductor device using the same 有权
    等离子体装置及使用其制造半导体器件的方法

    公开(公告)号:US09490107B2

    公开(公告)日:2016-11-08

    申请号:US14699266

    申请日:2015-04-29

    IPC分类号: H01J37/30 H05H1/26 H01J37/32

    摘要: A plasma apparatus includes a process chamber having an inner space, a chuck disposed in the process chamber and having a top surface on which a substrate is loaded, a gas supply unit supplying a process gas into the process chamber, a plasma generating unit generating plasma over the chuck, and a direct current (DC) power generator applying a DC pulse signal to the chuck. A period of the DC pulse signal may include a negative pulse duration during which a negative pulse is applied, a positive pulse duration during which a positive pulse is applied, and a pulse-off duration during which the negative pulse and the positive pulse are turned off. The positive pulse duration is between the negative pulse duration and the pulse-off duration. The pulse-off duration may comprise a voltage having a lower magnitude than the voltage of the positive pulse, such as a ground voltage.

    摘要翻译: 一种等离子体装置,包括具有内部空间的处理室,设置在处理室中的卡盘,并具有顶面,载置基板的气体供应单元,将处理气体供应到处理室中;等离子体产生单元,其产生等离子体 以及直流(DC)发电机对卡盘施加DC脉冲信号。 DC脉冲信号的周期可以包括施加负脉冲的负脉冲持续时间,施加正脉冲的正脉冲持续时间以及负脉冲和正脉冲被转向的脉冲关闭持续时间 关闭 正脉冲持续时间在负脉冲持续时间和脉冲关闭持续时间之间。 脉冲关闭持续时间可以包括具有比正脉冲的电压更低的电压的电压,例如接地电压。

    Contact-type electric capacitive displacement sensor
    7.
    发明申请
    Contact-type electric capacitive displacement sensor 有权
    接触式电容位移传感器

    公开(公告)号:US20070034013A1

    公开(公告)日:2007-02-15

    申请号:US11200091

    申请日:2005-08-10

    IPC分类号: G01B7/16

    CPC分类号: G01D5/2412

    摘要: A contact-type electric capacitive displacement sensor includes a stationary element having a stationary plate, a stationary conductive pattern formed on the stationary plate and an insulation film coated on the stationary plate and a displaceable element having a displaceable plate, a displaceable conductive pattern formed on the displaceable plate and an insulation film coated on the displaceable plate. The stationary and the displaceable conductive patterns have a cyclic pattern of conductor to thereby produce a variation of capacitance therebetween when moving relative to each other.

    摘要翻译: 接触型电容容量位移传感器包括具有固定板的固定元件,形成在固定板上的固定导电图案和涂覆在固定板上的绝缘膜,以及具有位移板的位移元件, 可移动板和涂覆在可移动板上的绝缘膜。 固定和可移位的导电图案具有导体的循环图案,从而当相对于彼此移动时产生电容的变化。