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    SYMMETRIC DIFFERENTIAL TRANSDUCER
    1.
    发明申请
    SYMMETRIC DIFFERENTIAL TRANSDUCER 有权

    公开(公告)号：US20240393114A1

    公开(公告)日：2024-11-28

    申请号：US18666639

    申请日：2024-05-16

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Mikko PARTANEN

    IPC: G01C19/5712 ,  G01P15/125

    Abstract: A microelectromechanical device is provided that includes a first proof mass and a second proof mass in a device plane. The first proof mass includes a first set of rotor combs, and the first set of rotor combs comprises a first set of rotor transducer combs. The second proof mass includes a second set of rotor combs, and the second set of rotor combs comprises a second set of rotor transducer combs. The first and second proof masses are configured to undergo anti-phase movement. The first set of rotor combs also includes a first set of dummy rotor combs and the second set of rotor combs also includes a second set of dummy rotor combs. The first set of rotor combs is reflection-symmetric with the second set of rotor combs.

    MULTIAXIS GYROSCOPE WITH SUPPLEMENTARY MASSES
    2.
    发明申请
    MULTIAXIS GYROSCOPE WITH SUPPLEMENTARY MASSES 有权

    公开(公告)号：US20210364293A1

    公开(公告)日：2021-11-25

    申请号：US17328754

    申请日：2021-05-24

    Applicant: MURATA MANUFACTURING CO., LTD.

    Inventor： Anssi BLOMQVIST ,  Ville-Pekka RYTKÖNEN ,  Mikko PARTANEN

    IPC: G01C19/5747

    Abstract: A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.

    LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE
    3.
    发明公开
    LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE 审中-公开

    公开(公告)号：US20230234834A1

    公开(公告)日：2023-07-27

    申请号：US18159379

    申请日：2023-01-25

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Mikko PARTANEN

    IPC: B81B3/00

    CPC classification number: B81B3/0072 ,  B81B2201/034 ,  B81B2203/0154 ,  B81B2207/11

    Abstract: A microelectromechanical device is provided that includes a mobile rotor and a fixed stator in a device plane. Moreover, a fixed wall defines a wall plane that is adjacent to the device plane and a motion limiter is provided to prevent the rotor from coming into direct physical contact with the fixed wall. The motion limiter includes a shock absorber that extends from the rotor to the stator and a fixed stopper structure that protrudes from the fixed wall toward the shock absorber.

    LOW-IMPACT MOTION LIMITER
    4.
    发明申请
    LOW-IMPACT MOTION LIMITER 有权

    公开(公告)号：US20220194782A1

    公开(公告)日：2022-06-23

    申请号：US17542851

    申请日：2021-12-06

    Applicant: MURATA MANUFACTURING CO., LTD.

    Inventor： Mikko PARTANEN

    IPC: B81B3/00

    Abstract: A micromechanical device further comprises a motion limiter configured to prevent a rotor from coming into direct physical contact with a stator. The motion limiter comprises a spring which extends across the rotor-stator gap. The motion limiter further comprises a stopper which is attached to the spring. When the rotor moves toward the stator, the motion limiter is configured to bring the stopper into contact with a counter-structure.

    EARLY-IMPACT MOTION LIMITER FOR MEMS DEVICE
    5.
    发明申请
    EARLY-IMPACT MOTION LIMITER FOR MEMS DEVICE 有权

    公开(公告)号：US20220194781A1

    公开(公告)日：2022-06-23

    申请号：US17542740

    申请日：2021-12-06

    Applicant: MURATA MANUFACTURING CO., LTD.

    Inventor： Mikko PARTANEN

    IPC: B81B3/00

    Abstract: This disclosure describes a micromechanical device comprising a first device part and a second device part. One of the first and second device parts is a mobile rotor and the other of the first and second device parts is a fixed stator. The micromechanical device further comprises a motion limiter which extends from the first device part to the second device part. The motion limiter comprises an elongated lever, and the motion limiter is configured to bring a stopper into contact with a counter-structure by rotating the elongated lever.

    MEMS STRUCTURES WITH GAPS
    6.
    发明申请
    MEMS STRUCTURES WITH GAPS 有权

    公开(公告)号：US20250109012A1

    公开(公告)日：2025-04-03

    申请号：US18896296

    申请日：2024-09-25

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Mikko PARTANEN ,  Konsta HANNULA

    IPC: B81B3/00 ,  B81C1/00

    Abstract: A device is provided that includes a stator including a stator element and a row of stator comb fingers, wherein the stator comb fingers extend away from the stator element in a y-direction. A device may include a rotor including a rotor element and a row of rotor comb fingers, wherein the rotor comb fingers extend away from the rotor element in a direction which is opposite to the y-direction, and wherein the stator comb fingers are interdigitated with the rotor comb fingers, and form an interdigitated row, and each pair of adjacent stator comb finger and rotor comb finger are separated from each other by a x-gap in a x-direction, which is perpendicular to the y-direction.

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