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公开(公告)号：US20230084340A1
公开(公告)日：2023-03-16
申请号：US17983443
申请日：2022-11-09
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Minefumi OUCHI
Abstract: An acoustic wave device includes a support including a cavity, a piezoelectric layer on or above the support and made of one of lithium niobate or lithium tantalate, an interdigital transducer electrode embedded in the piezoelectric layer and including surfaces opposed to each other in a thickness direction, one of the surfaces being in contact with the piezoelectric layer, and a dielectric film on the piezoelectric layer and covering the interdigital transducer electrode. The interdigital transducer electrode includes electrode fingers, at least one of which overlaps the cavity in plan view. Assuming a thickness of the piezoelectric layer is d and an electrode finger pitch of the interdigital transducer electrode is p, p/d≥ about 4.25.
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公开(公告)号：US20230318563A1
公开(公告)日：2023-10-05
申请号：US18206642
申请日：2023-06-07
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Minefumi OUCHI
CPC classification number: H03H9/02228 , H03H3/02 , H03H9/02031 , H03H9/132 , H03H9/173 , H03H9/176 , H03H2003/021
Abstract: An acoustic wave device includes a support, a piezoelectric layer including a first principal surface adjacent to the support and a second principal surface, a first IDT electrode on the first principal surface and including first and second electrode fingers, and a second IDT electrode on the second principal surface not overlapping the first IDT electrode in plan view and including first and second electrode fingers. When d is a thickness of piezoelectric layer and p is a center-to-center distance between adjacent ones of the electrode fingers, d/p is about 0.5 or less in the first and second IDT electrodes. An insulating film is provided on the second principal surface overlapping the first IDT electrode in plan view, and a wiring electrode extending along the insulating film overlapping the first IDT electrode in plan view, the wiring electrode being connected to the second IDT electrode.
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公开(公告)号：US20230275564A1
公开(公告)日：2023-08-31
申请号：US18195430
申请日：2023-05-10
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Minefumi OUCHI
CPC classification number: H03H9/14541 , H03H9/25 , H03H9/02007 , H03H9/173 , H03H9/02574
Abstract: An acoustic wave device includes a piezoelectric layer including first and second main surfaces facing each other, an IDT electrode on the first main surface and including first and second busbars facing each other and electrode fingers, a first conductor on the second main surface and facing the first busbar with the piezoelectric layer therebetween, and a support on the second main surface and supporting the piezoelectric layer. A cavity that opens towards the piezoelectric layer is provided in the support, and the first conductor is positioned inside the cavity. An electric potential of the first conductor is different from an electric potential to which the first busbar is connected.
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公开(公告)号：US20230198495A1
公开(公告)日：2023-06-22
申请号：US18109897
申请日：2023-02-15
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Minefumi OUCHI
CPC classification number: H03H9/02086 , H03H9/132 , H03H9/131 , H03H9/56 , H03H9/02039
Abstract: An acoustic wave device includes a piezoelectric layer including first and second main surfaces and made of lithium niobate or lithium tantalate, and an interdigital transducer electrode on the first main surface and including multiple electrode fingers. d/p is about 0.5 or less where d is a thickness of the piezoelectric layer, and p is a distance between centers of adjacent electrode fingers. The electrode fingers include first and second electrode films, which include first and second surfaces and a side surface. Θ1≠Θ2 is satisfied and W1>W2 is satisfied, where Θ1 and Θ2 are angles between the side surfaces and the first surfaces of the first and second electrode films, and W1 and W2 are widths of the first and second electrode films.
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公开(公告)号：US20230344413A1
公开(公告)日：2023-10-26
申请号：US18214591
申请日：2023-06-27
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Minefumi OUCHI
Abstract: A filter device includes a first series arm resonator in a series arm, and a first parallel arm resonator in a parallel arm, each of the first series arm resonator and the first parallel arm resonator is defined by an acoustic wave resonator including a piezoelectric layer made of lithium niobate or lithium tantalate and at least a first electrode and a second electrode on the piezoelectric layer. The acoustic wave resonator satisfies a condition of d/p being equal to or less than about 0.5, when a thickness of the piezoelectric layer is d and a distance between centers of the first and second electrodes adjacent to each other is p. An inductor connected in series to the first series arm resonator is between the first series arm resonator and the first parallel arm resonator.
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Patent Agency Ranking
公开(公告)号：US20230327636A1
公开(公告)日：2023-10-12
申请号：US18204979
申请日：2023-06-02
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Minefumi OUCHI
CPC classification number: H03H9/02157 , H03H9/205 , H03H9/02031 , H03H9/132 , H03H9/133
Abstract: An acoustic wave device includes a support substrate, a piezoelectric layer, an energy confining layer, a first resonator, and a second resonator. The piezoelectric layer includes a first principal surface and includes lithium niobate or lithium tantalate. The energy confining layer is provided between the support substrate and the piezoelectric layer. Each of the first resonator and the second resonator includes at least one pair of a first electrode and a second electrode provided to the first principal surface of the piezoelectric layer. The first resonator is structured to generate a thickness-shear mode bulk wave, and the second resonator is structured to generate a wave other than a thickness-shear mode bulk wave.
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公开(公告)号：US20230015397A1
公开(公告)日：2023-01-19
申请号：US17946574
申请日：2022-09-16
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Syunsuke KIDO , Tetsuya KIMURA , Sho NAGATOMO , Minefumi OUCHI
Abstract: An acoustic wave device includes a piezoelectric layer that is made of lithium niobate or lithium tantalate, and a plurality of pairs of electrodes opposed to each other in a direction intersecting with a thickness direction of the piezoelectric layer, in which a bulk wave in a thickness shear primary mode is used or d/p is about 0.5 or lower when a thickness of the piezoelectric layer is d and a distance between centers of mutually adjacent electrodes among the plurality of pairs of electrodes is p. The plurality of pairs of electrodes include at least one pair of first electrodes of a first acoustic wave resonator and at least one pair of second electrodes of a second acoustic wave resonator. A direction orthogonal to a longitudinal direction of the second electrodes in the second acoustic wave resonator is inclined at an angle that is greater than 0° and smaller than 360° with respect to a direction orthogonal to a longitudinal direction of the first electrodes in the first acoustic wave resonator.
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公开(公告)号：US20230198494A1
公开(公告)日：2023-06-22
申请号：US18108074
申请日：2023-02-10
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Minefumi OUCHI
CPC classification number: H03H9/02039 , H03H9/25 , H03H9/131
Abstract: An acoustic wave device includes a piezoelectric layer and a pair of electrodes. In a cross-section including first and second directions, at least one electrode of the pair of electrodes includes top, bottom, first side, and second side surfaces, the bottom surface being opposed to the top surface and closer to the piezoelectric layer than the top surface. A first angle between the first side surface and the first main surface is different from a second angle between the second side surface and the first main surface, and at least one of the first angle and the second angle is about 80° or larger.
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公开(公告)号：US20150130551A1
公开(公告)日：2015-05-14
申请号：US14600201
申请日：2015-01-20
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Minefumi OUCHI
CPC classification number: H03H9/0038 , H03H9/008 , H03H9/6436 , H03H9/6493 , H03H9/725
Abstract: A balanced-unbalanced conversion-type elastic wave device includes an unbalanced signal terminal, first and second balanced signal terminals, and first to fifth interdigital transducers disposed along an elastic wave propagation direction. One end of each of the first, third, and fifth interdigital transducers is connected in common to the unbalanced signal terminal, one end of each of the second interdigital transducer and the fourth interdigital transducer is connected to the first and second balanced signal terminals respectively, a first inductance is connected between the first interdigital transducer and a ground potential, and a second inductance is connected between the fifth interdigital transducer and the ground potential. First and second inductance values of the first and second inductances, respectively, are different.
Abstract translation: 平衡不平衡转换型弹性波装置包括不平衡信号端子，第一和第二平衡信号端子以及沿弹性波传播方向设置的第一至第五叉指式换能器。 第一，第三和第五叉指换能器中的每一个的一端共同连接到不平衡信号端子，第二叉指式换能器和第四叉指式换能器中的每一端的一端分别连接到第一和第二平衡信号端子， 第一电感连接在第一叉指换能器和地电位之间，第二电感连接在第五叉指换能器和地电位之间。 第一和第二电感的第一和第二电感值分别不同。
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公开(公告)号：US20230223914A1
公开(公告)日：2023-07-13
申请号：US18121631
申请日：2023-03-15
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Sho NAGATOMO , Minefumi OUCHI , Naohiro NODAKE , Tetsuya KIMURA
CPC classification number: H03H9/02228 , H03H9/13 , H03H9/173 , H03H9/176 , H03H9/02031
Abstract: An acoustic wave device includes a support substrate, a piezoelectric layer overlapping the support substrate viewed in a first direction, a functional electrode on at least a first main surface of the piezoelectric layer, and a wiring electrode connected to the functional electrode. A space is provided on a second main surface side opposite to the first main surface of the piezoelectric layer. The space is covered with the piezoelectric layer, the wiring electrode covers a portion of the functional electrode, and an air gap or an insulating film is provided between the functional electrode and the wiring electrode in a region where the functional electrode is covered with the wiring electrode.
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