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公开(公告)号：US20220182036A1
公开(公告)日：2022-06-09
申请号：US17678795
申请日：2022-02-23
发明人： Yuichi GOTO , Ville KAAJAKARI
摘要： A resonance device is provided that includes a first substrate with a resonator having an upper electrode, a second substrate that is disposed such that a first surface faces the first substrate with the resonator therebetween, a first terminal that is disposed on a second surface of the second substrate and that is electrically connected to the upper electrode, a second terminal that is disposed on the second surface and that applies a reference electric potential to the resonator, and an extended wiring line that is connected to the first terminal electrically and that extends on the second surface to an outer edge.
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公开(公告)号：US20240175671A1
公开(公告)日：2024-05-30
申请号：US18517699
申请日：2023-11-22
发明人： Ville KAAJAKARI
CPC分类号： G01B9/02049 , G01J3/26 , G01B2290/25
摘要： A micromechanical Fabry-Perot interferometer is provided that includes an at least partly transparent substrate; an illuminated area where the light is passed through the substrate; a reflector on the top surface of the substrate in the illuminated area; an absorbing reflector layer above the reflector in the illuminated area, which absorbs at least some wavelengths of the infrared light; an arrangement for determining the temperature of the absorbing reflector layer; and at least one actuator to adjust the gap between the reflector and the absorbing reflector layer.
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公开(公告)号：US20220178696A1
公开(公告)日：2022-06-09
申请号：US17529693
申请日：2021-11-18
发明人： Ville KAAJAKARI
IPC分类号： G01C19/5762 , G01C19/5649 , G01C19/5656
摘要： A gyroscope includes a proof mass, and a first transduction/suspension structure coupled to the proof mass with a laterally flexible first coupling spring from a first coupling direction. A second transduction/suspension structure is coupled to the proof mass with a laterally flexible second coupling spring from a second coupling direction. A third transduction/suspension structure is coupled to the proof mass with a transversally flexible third coupling spring from a third coupling direction. A fourth transduction/suspension structure is coupled to the proof mass with a transversally flexible fourth coupling spring from a fourth coupling direction. Each transduction/suspension structure comprises elongated beams. Piezoelectric transducers are deposited on some elongated beams, and are configured to bend the corresponding elongated beams in the device plane and to measure the bending of the corresponding lateral elongated beams in the device plane.
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公开(公告)号：US20220163410A1
公开(公告)日：2022-05-26
申请号：US17669402
申请日：2022-02-11
发明人： Masashi KUBOTA , Ville KAAJAKARI , Masaki TAKEUCHI
摘要： A sensor includes a film portion deformable by external force, a support body supporting the film portion, and a magnetoresistive element portion on the film portion and including a unit element that includes a first magnetic layer whose magnetization direction changes in accordance with deformation of the film portion, a second magnetic layer whose magnetization direction is fixed, and an intermediate layer between the first and second magnetic layers. The film portion includes a first side portion in a portion of an outer edge of the film portion. A slit portion is provided in the film portion and includes at least a portion along the first side portion, so that the film portion includes a connection portion in which the first side portion is partially connected to the support body. A magnetoresistive element portion is provided in the connection portion.
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公开(公告)号：US20220178693A1
公开(公告)日：2022-06-09
申请号：US17529667
申请日：2021-11-18
发明人： Ville KAAJAKARI
IPC分类号： G01C19/574
摘要： A gyroscope which comprises first and second proof masses aligned on a first lateral axis, third and fourth proof masses are aligned on a second lateral axis, and central and peripheral anti-phase coupling structures which synchronize a first and a second oscillation mode in this four-mass system. Each central x-axis anti-phase structure and each central y-axis anti-phase structure comprises an in-plane seesaw with a central elongated bar which is suspended from at least one central anchor point with at least one central seesaw suspender which allows the central elongated bar to rotate in the device plane about an axis which is perpendicular to the device plane.
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公开(公告)号：US20240175673A1
公开(公告)日：2024-05-30
申请号：US18517362
申请日：2023-11-22
发明人： Ville KAAJAKARI
IPC分类号： G01B9/02
CPC分类号： G01B9/02051
摘要： An interferometer is provided that includes a reflection region, a support region and two or more actuation regions. Each of the two or more actuation regions extend from the support region to the reflection region. A first reflector is fixed to the substrate at least in the reflection region. The interferometer includes a piezoelectric layer at least in the two or more actuation regions. Moreover, a second reflector is attached to the piezoelectric layer.
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公开(公告)号：US20230199405A1
公开(公告)日：2023-06-22
申请号：US18109900
申请日：2023-02-15
发明人： Seiji UMEZAWA , Shinsuke IKEUCHI , Masayuki SUZUKI , Matti LIUKKU , Ville-Pekka RYTKÖNEN , Anssi BLOMQVIST , Ville KAAJAKARI
IPC分类号： H04R17/02
CPC分类号： H04R17/02
摘要： A transducer includes a first connection portion connecting a first tip and a second tip to each other. The first connection portion is surrounded by a split slit connecting a center of the first tip, a center of a base, and a center of the second tip, the first tip, and the second tip.
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公开(公告)号：US20230038607A1
公开(公告)日：2023-02-09
申请号：US17967931
申请日：2022-10-18
发明人： Seiji UMEZAWA , Shinsuke IKEUCHI , Masayuki SUZUKI , Matti LIUKKU , Ville-Pekka RYTKÖNEN , Anssi BLOMQVIST , Ville KAAJAKARI
IPC分类号： H01L41/09 , B06B1/06 , H01L41/18 , H01L41/047
摘要： A piezoelectric device includes a connection section including a first coupling portion, a second coupling portion, and a bridging portion. The first coupling portion extends along a slit and is connected to one of a pair of beam sections. The second coupling portion extends along the slit and is connected to another of the pair of beam sections. The bridging portion is located between the slit and an opening and is connected to both of the first coupling portion and the second coupling portion. The beam sections are connected to each other in a circumferential direction of a base having an annular shape via the connecting section while each of the beam sections is interposed between the slits extending in intersecting directions.
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公开(公告)号：US20240328879A1
公开(公告)日：2024-10-03
申请号：US18615308
申请日：2024-03-25
发明人： Ville KAAJAKARI
IPC分类号： G01L5/162
CPC分类号： G01L5/162
摘要： A device is provided that includes a flexible element including a center, a top surface, a bottom surface, one or more edges, a central area surrounding the center, and a peripheral area adjacent to the one or more edges; and a mass element located on the top surface of the flexible element in the central area such that the flexible element bends in a direction when a force acts on the mass element, wherein the flexible element defines a horizontal xy-plane and a vertical z-direction which is perpendicular to the horizontal xy-plane; and wherein the flexible element has a multilayer structure comprising a dielectric layer forming the bottom surface of the flexible element and a semiconductor layer on top of the dielectric layer.
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公开(公告)号：US20240174511A1
公开(公告)日：2024-05-30
申请号：US18430924
申请日：2024-02-02
IPC分类号： B81B3/00 , G01P15/125
CPC分类号： B81B3/0086 , B81B2201/0235 , B81B2203/0323 , B81B2203/04 , B81B2207/095 , G01P15/125
摘要： An inertial sensor includes a MEMS substrate and an upper lid joined to the MEMS substrate. The MEMS substrate includes a capacitance portion including first and second movable electrodes causing a capacitance to change in accordance with a distance between the first and second movable electrodes, a holding portion holding the capacitance portion, and a spring portion connecting the capacitance portion and the holding portion to each other and supporting the first movable electrode and the second movable electrode in a displaceable manner with respect to the holding portion.
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