公开(公告)号：US20210384375A1

公开(公告)日：2021-12-09

申请号：US17342233

申请日：2021-06-08

Applicant: NICHIA CORPORATION

Inventor： Keiji SAKAMOTO ,  Takashi ABE ,  Hitoshi MINAKUCHI ,  Tsuyoshi ITO ,  Katsuyuki KAWABATA ,  Kenji HASHIZUME

IPC: H01L33/00 ,  H01L33/50

Abstract: A method of manufacturing a light-emitting device includes: providing a substrate having a first surface and a second surface opposite to the first surface; forming, on or above the first surface of the substrate, a semiconductor structure comprising a light-emitting layer; forming a crack inside the substrate, the crack reaching the first surface of the substrate; disposing a wavelength conversion layer on the second surface of the substrate; forming a first recess in the wavelength conversion layer by removing a first portion of the wavelength conversion layer, the first portion overlapping with the crack when viewed in a direction from the wavelength conversion layer toward the semiconductor structure, and leaving a second portion of the wavelength conversion layer between the first recess and the semiconductor structure; and cleaving the second portion along the crack.

公开(公告)号：US20180240933A1

公开(公告)日：2018-08-23

申请号：US15899095

申请日：2018-02-19

Applicant: NICHIA CORPORATION

Inventor： Yoshitaka SUMITOMO ,  Katsuyuki KAWABATA ,  Naoto INOUE

IPC: H01L33/00 ,  H01L33/46

CPC classification number: H01L33/005 ,  H01L33/0095 ,  H01L33/16 ,  H01L33/46 ,  H01L2933/0025

Abstract: A method of manufacturing a light emitting element includes: providing a wafer that comprises: a substrate having a first main surface and a second main surface, a dielectric multilayer film on the first main surface, and a semiconductor structure on the second main surface; focusing laser light onto an inner portion of the substrate from a first main surface side of the substrate, to simultaneously form a modified region in the substrate and remove a portion of the dielectric multilayer film; and cleaving the wafer at a portion where the modified region is formed to obtain a plurality of light emitting elements.