公开(公告)号：US20200346407A1

公开(公告)日：2020-11-05

申请号：US16957957

申请日：2018-12-22

申请人： NIKON CORPORATION

发明人： Eric Peter Goodwin ,  Johnathan Agustin Marquez ,  Michael Birk Binnard ,  Brett Herr ,  Matthew Parker-McCormick Bjork ,  Paul Derek Coon ,  Patrick Chang ,  Motofusa Ishikawa

IPC分类号： B29C64/268 ,  B29C64/241 ,  B29C64/153 ,  B29C64/245 ,  B29C64/255 ,  B29C64/314 ,  B29C64/205 ,  B29C64/236 ,  B29C64/277

摘要： A processing machine (10) for building a part (11) includes: a support device (26) including a support surface (26B); a drive device (28) which moves the support device (26) so as a specific position on the support surface (26B) is moved along a moving direction (25); a powder supply device (18) which supplies a powder (12) to the moving support device (26) to form a powder layer (13); an irradiation device (22) which irradiates at least a portion of the powder layer (13) with an energy beam (22D) to form at least a portion of the part (11) from the powder layer (13) during a first period of time; and a measurement device (20) which measures at least portion of the part (11) during a second period of time. The first period in which the irradiation device (22) irradiates the powder layer (13) with the energy beam (22D) and the second period in which the measurement device (22) measures are overlapped.

公开(公告)号：US20220293390A1

公开(公告)日：2022-09-15

申请号：US17654707

申请日：2022-03-14

申请人： Nikon Corporation

发明人： Jacek Kazimierz Tyminski ,  Daniel Gene Smith ,  Steven Douglas Slonaker ,  Stephen Paul Renwick ,  Johnathan Agustin Marquez

IPC分类号： H01J37/244 ,  H01J37/20 ,  B33Y30/00

摘要： Electron beam position, size, or shape can be estimated by deflecting the beam to a plurality of apertures, either continuously or step-wise. Beam portions transmitted, absorbed, or scattered can be used to assess position, size, and shape. In other examples, a beam sensing aperture and the beam are oscillated with respect to each other by moving the aperture or varying the beam deflection or both. The beam can be directed to segmented detectors such as a quad detector, and currents in the segments used to assess beam position, shape, or size. The segments can be formed from a single conductive sheet on which the segments are defined but remain attached. After the conductive sheet is secured with an insulative adhesive, portions of the conductive sheet are broken away, leaving aligned segments.

公开(公告)号：US20240227024A9

公开(公告)日：2024-07-11

申请号：US17624191

申请日：2020-07-01

申请人： Nikon Corporation

发明人： Alton Hugh Phillips ,  Joseph P. Rossi ,  Johnathan Agustin Marquez ,  Yoon Jung Jeong ,  Lexian Guo ,  Patrick Shih Chang ,  Eric Peter Goodwin ,  Michael Birk Binnard ,  Brett William Herr ,  Matthew Parker-McCormick Bjork ,  Paul Derek Coon ,  Motofusa Ishikawa

IPC分类号： B22F12/57 ,  B22F10/30 ,  B28B17/00 ,  B29C64/321 ,  B29C64/393 ,  B33Y30/00 ,  B33Y50/02

CPC分类号： B22F12/57 ,  B22F10/30 ,  B28B17/0081 ,  B29C64/321 ,  B29C64/393 ,  B33Y30/00 ,  B33Y50/02 ,  B22F10/28

摘要： A processing machine (10) for building an object (11) from powder (12) includes a build platform (26A); a powder supply assembly (18) that deposits the powder (12) onto the build platform (26A) to form a powder layer (13); and an energy system (22) that directs an energy beam (22D) at a portion of the powder (12) on the build platform (26A) to form a portion of the object (11). The powder supply assembly (18) can include (i) a powder container (640A) that retains the powder (12); (ii) a supply outlet (639) positioned over the build platform (26A); and (ii) a flow control assembly (642) that selectively controls the flow of the powder (12) from the supply outlet (639).

公开(公告)号：US20240131595A1

公开(公告)日：2024-04-25

申请号：US17624191

申请日：2020-06-30

申请人： Nikon Corporation

发明人： Alton Hugh Phillips ,  Joseph P. Rossi ,  Johnathan Agustin Marquez ,  Yoon Jung Jeong ,  Lexian Guo ,  Patrick Shih Chang ,  Eric Peter Goodwin ,  Michael Birk Binnard ,  Brett William Herr ,  Matthew Parker-McCormick Bjork ,  Paul Derek Coon ,  Motofusa Ishikawa

IPC分类号： B22F12/57 ,  B22F10/30 ,  B28B17/00 ,  B29C64/321 ,  B29C64/393 ,  B33Y30/00 ,  B33Y50/02

CPC分类号： B22F12/57 ,  B22F10/30 ,  B28B17/0081 ,  B29C64/321 ,  B29C64/393 ,  B33Y30/00 ,  B33Y50/02 ,  B22F10/28

摘要： A processing machine (10) for building an object (11) from powder (12) includes a build platform (26A); a powder supply assembly (18) that deposits the powder (12) onto the build platform (26A) to form a powder layer (13); and an energy system (22) that directs an energy beam (22D) at a portion of the powder (12) on the build platform (26A) to form a portion of the object (11). The powder supply assembly (18) can include (i) a powder container (640A) that retains the powder (12); (ii) a supply outlet (639) positioned over the build platform (26A); and (ii) a flow control assembly (642) that selectively controls the flow of the powder (12) from the supply outlet (639).

公开(公告)号：US20220266345A1

公开(公告)日：2022-08-25

申请号：US17675398

申请日：2022-02-18

申请人： Nikon Corporation

发明人： Joseph Paul Rossi ,  Yoon Jung Jeong ,  Patrick Shih Chang ,  Johnathan Agustin Marquez ,  Alton Hugh Phillips ,  Lexian Guo

IPC分类号： B22F12/50 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y40/00 ,  B22F10/28

摘要： A processing machine (10) for building an object (11) from powder (12) includes a build platform (434A); a powder supply assembly (418); and an energy system (22) that melts the powder (12) on the build platform (434A) to form the object (11). The powder supply assembly (418) can include (i) a first container region (444A) that retains the powder (12) prior to distribution onto the build platform (434A); (ii) a supply outlet (439) positioned over the build platform (434A); (iii) a flow control assembly (442) that selectively controls the flow of the powder (12) from the first container region (444A) to the supply outlet (439); (iv) a second container region (446A) that retains the powder (12) for refilling the first container region (444A); and (v) an actuator system (448) that urges powder (12) from the second container region (446A) to fill the first container region (444A).

公开(公告)号：US20220305733A1

公开(公告)日：2022-09-29

申请号：US17701098

申请日：2022-03-22

申请人： Nikon Corporation

发明人： Victor Itliong Solidum ,  Kristopher Daniel Sanford ,  Alton Hugh Phillips ,  Lexian Guo ,  Patrick Shih Chang ,  Johnathan Agustin Marquez ,  Yeong-Jun Choi

IPC分类号： B29C64/329 ,  B29C64/153 ,  B29C64/245 ,  B29C64/255 ,  B29C64/268 ,  B29C64/386 ,  B33Y30/00 ,  B33Y40/00 ,  B33Y50/00 ,  G01F23/263 ,  G01F23/20 ,  G01F23/292

摘要： A level sensor assembly (552) for estimating a level of a dielectric powder (412) in a container assembly (544) includes a first electrode member (554) that is coupled to the container assembly (544); a second electrode member (556) that is coupled to the container assembly (544): and a control system (424). The second electrode member (556) is spaced apart from the first electrode member (554) and configured so that powder (512) in the container assembly (544) is positioned at least partly between the electrode members (554) (556). The control system (424) utilizes a capacitance between the electrode members (554) (556) to estimate the level of the powder (512) in the container assembly (544).

公开(公告)号：US20220252392A1

公开(公告)日：2022-08-11

申请号：US17623570

申请日：2020-07-02

申请人： Nikon Corporation

发明人： Eric Peter Goodwin ,  Heather Lynn Durko ,  Daniel Gene Smith ,  Johnathan Agustin Marquez ,  Michael Birk Binnard ,  Patrick Shih Chang ,  Matthew Parker-McCormick Bjork ,  Paul Derek Coon ,  Brett William Herr ,  Motofusa Ishikawa

IPC分类号： G01B11/25 ,  B33Y50/00 ,  B22F10/80 ,  B22F12/90 ,  B33Y30/00

摘要： 3D metrology techniques are disclosed for determining a changing topography of a substrate processed in an additive manufacturing system. Techniques include fringe scanning, simultaneous fringe projections, interferometry, and x-ray imaging. The techniques can be applied to 3D printing systems to enable rapid topographical measurements of a 3D printer powder bed, or other rapidly moving, nearly continuous surface to be tested. The techniques act in parallel to the system being measured to provide information about system operation and the topography of the product being processed. A tool is provided for achieving higher precision, increasing throughput, and reducing the cost of operation through early detection and diagnosis of operating problems and printing defects. These techniques work well with any powder bed 3D printing system, providing real-time metrology of the powder bed, the most recently printed layer, or both without reducing throughput.

公开(公告)号：US20220212263A1

公开(公告)日：2022-07-07

申请号：US17623847

申请日：2020-07-01

申请人： Nikon Corporation

发明人： Alton Hugh Phillips ,  Patrick Shih Chang ,  Michael Birk Binnard ,  Matthew Rosa ,  Serhad Ketsamanian ,  Lexian Guo ,  Brett William Herr ,  Eric Peter Goodwin ,  Johnathan Agustin Marquez ,  Matthew Parker-McCormick Bjork ,  Paul Derek Coon ,  Motofusa Ishikawa

IPC分类号： B22F12/37 ,  B33Y30/00 ,  B33Y50/02 ,  B22F10/85 ,  B22F12/90 ,  B22F12/00 ,  B23K26/342 ,  B23K26/08

摘要： To improve the operation of 3D printing systems, techniques are disclosed for a rotary 3D printer comprising: a main rotating support table rotating about a first axis and one or more secondary support tables rotating around a non-coaxial secondary axis; a powder supply assembly for distributing powder onto the tables; and an energy system for directing an energy beam at the powder to form a part. The main support table and secondary support tables can rotate in the same or opposite directions.
Disclosed techniques include: grooved support table surfaces for improving stability of applied powder; reciprocating bellows for controlling a differential load on actuators that move the support tables; high temperature bearings or bushings for supporting rotary motion at high temperatures; and a mechanism for counterbalancing a weight of the part being built.