-
公开(公告)号：US11061338B2
公开(公告)日：2021-07-13
申请号：US15940549
申请日：2018-03-29
申请人： NIKON CORPORATION
发明人： Jonathan Kyle Wells , Paul Derek Coon , Matthew D. Rosa , Johnathan Marquez , Michael B. Binnard , Steven Douglas Slonaker , Daniel Gene Smith , Stephen P. Renwick , Brett Herr
摘要： A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.
-
公开(公告)号：US20150301459A1
公开(公告)日：2015-10-22
申请号：US14689570
申请日：2015-04-17
申请人： NIKON CORPORATION
IPC分类号： G03F7/20
CPC分类号： G03F7/70725 , G01D5/34715 , G03F7/70341 , G03F7/70716 , G03F7/70775 , G03F9/7026 , G03F9/7034 , G03F9/7049 , H02K41/031 , H02K2201/18
摘要： A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy; a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and a control system that controls the mover assembly using at least one of the first sensor and the second signal.
摘要翻译： 一种用于沿着第一轴线定位装置的台架组件，所述台架组件包括：底座; 保持装置并移动到基座上方的台阶; 移动器组件，其使舞台沿第一轴线相对于底座移动; 第一传感器系统，其监测所述载物台沿着所述第一轴的移动，所述第一传感器系统产生第一信号，所述第一传感器系统具有第一传感器精度; 第二传感器系统，其监测所述台沿着所述第一轴的运动，所述第二传感器系统具有与所述第一传感器系统的所述第一传感器精度不同的第二传感器精度，所述第二传感器产生第二信号; 以及控制系统，其使用第一传感器和第二信号中的至少一个来控制动子组件。
-
公开(公告)号：US20240131595A1
公开(公告)日：2024-04-25
申请号：US17624191
申请日：2020-06-30
申请人： Nikon Corporation
发明人： Alton Hugh Phillips , Joseph P. Rossi , Johnathan Agustin Marquez , Yoon Jung Jeong , Lexian Guo , Patrick Shih Chang , Eric Peter Goodwin , Michael Birk Binnard , Brett William Herr , Matthew Parker-McCormick Bjork , Paul Derek Coon , Motofusa Ishikawa
IPC分类号： B22F12/57 , B22F10/30 , B28B17/00 , B29C64/321 , B29C64/393 , B33Y30/00 , B33Y50/02
CPC分类号： B22F12/57 , B22F10/30 , B28B17/0081 , B29C64/321 , B29C64/393 , B33Y30/00 , B33Y50/02 , B22F10/28
摘要： A processing machine (10) for building an object (11) from powder (12) includes a build platform (26A); a powder supply assembly (18) that deposits the powder (12) onto the build platform (26A) to form a powder layer (13); and an energy system (22) that directs an energy beam (22D) at a portion of the powder (12) on the build platform (26A) to form a portion of the object (11). The powder supply assembly (18) can include (i) a powder container (640A) that retains the powder (12); (ii) a supply outlet (639) positioned over the build platform (26A); and (ii) a flow control assembly (642) that selectively controls the flow of the powder (12) from the supply outlet (639).
-
公开(公告)号：US10884344B2
公开(公告)日：2021-01-05
申请号：US15669661
申请日：2017-08-04
申请人： NIKON CORPORATION
摘要： A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy; a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and a control system that controls the mover assembly using at least one of the first sensor and the second signal.
-
公开(公告)号：US20180074417A1
公开(公告)日：2018-03-15
申请号：US15698503
申请日：2017-09-07
申请人： NIKON CORPORATION
IPC分类号： G03F7/20
CPC分类号： G03F7/70875 , G03F7/707
摘要： An exposure apparatus (10) for transferring one or more features to a workpiece (22) includes an illumination source (44A); (ii) a chuck (40) that retains the workpiece (22); (iii) a chamber housing (28A) that encircles the chuck and the workpiece; and (iv) a temperature controller (32) (34) that adjusts the temperature of at least one of the chuck (40) and the workpiece (22) so that a predetermined temperature differential (309) exists between the chuck (40) and the workpiece (22) before transferring the features to the workpiece (22).
-
公开(公告)号：US20170329236A1
公开(公告)日：2017-11-16
申请号：US15669661
申请日：2017-08-04
申请人： NIKON CORPORATION
CPC分类号： G03F7/70725 , G01D5/34715 , G03F7/70341 , G03F7/70716 , G03F7/70775 , G03F9/7026 , G03F9/7034 , G03F9/7049 , H02K41/031 , H02K2201/18
摘要： A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy; a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and a control system that controls the mover assembly using at least one of the first sensor and the second signal.
-
公开(公告)号：US20220288855A1
公开(公告)日：2022-09-15
申请号：US17686303
申请日：2022-03-03
申请人： Nikon Corporation
发明人： Alton Hugh Phillips , Michael Birk Binnard , Takakuni Goto , Paul Derek Coon , Motofusa Ishikawa , Daniel Gene Smith
IPC分类号： B29C64/371 , B29C64/147 , B29C64/153 , B29C64/232 , B29C64/268
摘要： A processing machine (10) for building an object (11) from material (12) includes (i) a material bed assembly (16) that supports the material (12); (ii) a material supply assembly (18) that positions the material (12); (iii) an energy system (22) that directs an energy beam (22A) at the material (12) to build the object (11); (iv) a housing assembly (24) that defines at least a portion of a build chamber (29) for the energy beam (22A), the housing assembly (24) being spaced apart a housing gap (30A) from the material (12); and (v) a seal assembly (26) that creates a housing seal (26A) between the housing assembly (24) and the material (12) to seal the housing gap (30A).
-
公开(公告)号：US20220252392A1
公开(公告)日：2022-08-11
申请号：US17623570
申请日：2020-07-02
申请人： Nikon Corporation
发明人： Eric Peter Goodwin , Heather Lynn Durko , Daniel Gene Smith , Johnathan Agustin Marquez , Michael Birk Binnard , Patrick Shih Chang , Matthew Parker-McCormick Bjork , Paul Derek Coon , Brett William Herr , Motofusa Ishikawa
摘要： 3D metrology techniques are disclosed for determining a changing topography of a substrate processed in an additive manufacturing system. Techniques include fringe scanning, simultaneous fringe projections, interferometry, and x-ray imaging. The techniques can be applied to 3D printing systems to enable rapid topographical measurements of a 3D printer powder bed, or other rapidly moving, nearly continuous surface to be tested. The techniques act in parallel to the system being measured to provide information about system operation and the topography of the product being processed. A tool is provided for achieving higher precision, increasing throughput, and reducing the cost of operation through early detection and diagnosis of operating problems and printing defects. These techniques work well with any powder bed 3D printing system, providing real-time metrology of the powder bed, the most recently printed layer, or both without reducing throughput.
-
公开(公告)号：US20220212263A1
公开(公告)日：2022-07-07
申请号：US17623847
申请日：2020-07-01
申请人： Nikon Corporation
发明人： Alton Hugh Phillips , Patrick Shih Chang , Michael Birk Binnard , Matthew Rosa , Serhad Ketsamanian , Lexian Guo , Brett William Herr , Eric Peter Goodwin , Johnathan Agustin Marquez , Matthew Parker-McCormick Bjork , Paul Derek Coon , Motofusa Ishikawa
IPC分类号： B22F12/37 , B33Y30/00 , B33Y50/02 , B22F10/85 , B22F12/90 , B22F12/00 , B23K26/342 , B23K26/08
摘要： To improve the operation of 3D printing systems, techniques are disclosed for a rotary 3D printer comprising: a main rotating support table rotating about a first axis and one or more secondary support tables rotating around a non-coaxial secondary axis; a powder supply assembly for distributing powder onto the tables; and an energy system for directing an energy beam at the powder to form a part. The main support table and secondary support tables can rotate in the same or opposite directions.
Disclosed techniques include: grooved support table surfaces for improving stability of applied powder; reciprocating bellows for controlling a differential load on actuators that move the support tables; high temperature bearings or bushings for supporting rotary motion at high temperatures; and a mechanism for counterbalancing a weight of the part being built.-
公开(公告)号：US20200346407A1
公开(公告)日：2020-11-05
申请号：US16957957
申请日：2018-12-22
申请人： NIKON CORPORATION
发明人： Eric Peter Goodwin , Johnathan Agustin Marquez , Michael Birk Binnard , Brett Herr , Matthew Parker-McCormick Bjork , Paul Derek Coon , Patrick Chang , Motofusa Ishikawa
IPC分类号： B29C64/268 , B29C64/241 , B29C64/153 , B29C64/245 , B29C64/255 , B29C64/314 , B29C64/205 , B29C64/236 , B29C64/277
摘要： A processing machine (10) for building a part (11) includes: a support device (26) including a support surface (26B); a drive device (28) which moves the support device (26) so as a specific position on the support surface (26B) is moved along a moving direction (25); a powder supply device (18) which supplies a powder (12) to the moving support device (26) to form a powder layer (13); an irradiation device (22) which irradiates at least a portion of the powder layer (13) with an energy beam (22D) to form at least a portion of the part (11) from the powder layer (13) during a first period of time; and a measurement device (20) which measures at least portion of the part (11) during a second period of time. The first period in which the irradiation device (22) irradiates the powder layer (13) with the energy beam (22D) and the second period in which the measurement device (22) measures are overlapped.
-
-
-
-
-
-
-
-
-
搜索结果
20 条记录 (耗时 0.019 秒)
