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    PRECISION CLAMP
    1.
    发明申请
    PRECISION CLAMP 审中-公开
    精密夹

    公开(公告)号：US20150115513A1

    公开(公告)日：2015-04-30

    申请号：US14526326

    申请日：2014-10-28

    Applicant: NIKON CORPORATION

    Inventor： Fardad A. Hashemi ,  Travis D. Bow ,  Patrick Chang

    IPC: B25B5/16

    CPC classification number: B25B5/16 ,  B25B5/06

    Abstract: A clamp for selectively inhibiting movement of a first object relative to a second object includes (i) a first clamp component coupled to the first object; (ii) a second clamp component coupled to the second object; and (iii) a fluid source that directs a fluid to the second clamp component to create a fluid bearing between the first clamp component and the second clamp component that allows for movement of the first clamp component relative to the second clamp component, and wherein the fluid source directs less fluid to the second clamp component to inhibit relative movement.

    Abstract translation: 用于选择性地抑制第一物体相对于第二物体的运动的夹具包括（i）联接到第一物体的第一夹具部件; （ii）联接到所述第二物体的第二夹具部件; 以及（iii）流体源，其将流体引导到所述第二夹持部件，以在所述第一夹持部件和所述第二夹持部件之间形成允许所述第一夹紧部件相对于所述第二夹紧部件移动的流体支承件， 流体源将较少的流体引导到第二夹持部件以阻止相对运动。

    Actuator assembly including magnetic sensor system for vibrationless position feedback
    2.
    发明授权
    Actuator assembly including magnetic sensor system for vibrationless position feedback 有权

    公开(公告)号：US10451982B2

    公开(公告)日：2019-10-22

    申请号：US15922959

    申请日：2018-03-16

    Applicant: NIKON CORPORATION

    Inventor： Patrick Chang ,  Michel Pharand ,  Matthew Rosa ,  Jonathan K. Wells ,  Pedro Reynoso-Mora

    IPC: G03B27/58 ,  G03F7/20 ,  H02K11/215 ,  H01L21/68

    Abstract: An actuator assembly (16) for moving a device (22) includes a stator component (30), a mover component (32), a measurement system (18), and a signal processor (20). The measurement system (18) includes (i) a magnet assembly (244) that is coupled to and moves with the mover component (32); and (ii) a plurality of spaced apart sensors (246A). The magnet assembly (244) produces a magnetic field (244B) that moves relative to the stator component (30) as the mover component (32) moves along a mover axis (32C). Each sensor (246A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (244B) from the magnet assembly (244) as the mover component (32) is moved relative to the sensors (246A). The signal processor (20) receives the sensor signals and estimates a position of the mover component (32) along the mover axis (32C) based at least in part on the sensor signals.

    Precision clamp
    3.
    发明授权
    Precision clamp 有权

    公开(公告)号：US10259104B2

    公开(公告)日：2019-04-16

    申请号：US14526326

    申请日：2014-10-28

    Applicant: NIKON CORPORATION

    Inventor： Fardad A. Hashemi ,  Travis D. Bow ,  Patrick Chang

    IPC: B23B31/10 ,  B23B31/28 ,  B25B5/06 ,  B25B5/16

    Abstract: A clamp for selectively inhibiting movement of a first object relative to a second object includes (i) a first clamp component coupled to the first object; (ii) a second clamp component coupled to the second object; and (iii) a fluid source that directs a fluid to the second clamp component to create a fluid bearing between the first clamp component and the second clamp component that allows for movement of the first clamp component relative to the second clamp component, and wherein the fluid source directs less fluid to the second clamp component to inhibit relative movement.

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