公开(公告)号：US09904178B2

公开(公告)日：2018-02-27

申请号：US15094480

申请日：2016-04-08

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Johnathan Marquez ,  Joseph P. Rossi

IPC: G03F7/20 ,  H01L21/67

CPC classification number: G03F7/70341 ,  G03F7/70716 ,  G03F7/70858 ,  G03F7/70991 ,  H01L21/67017 ,  H01L21/67109

Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).

公开(公告)号：US10578977B2

公开(公告)日：2020-03-03

申请号：US15901045

申请日：2018-02-21

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Johnathan Marquez ,  Joseph P. Rossi

IPC: G03F7/20 ,  H01L21/67

Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).

公开(公告)号：US20180217510A1

公开(公告)日：2018-08-02

申请号：US15940549

申请日：2018-03-29

Applicant: NIKON CORPORATION

Inventor： J. Kyle Wells ,  Paul Derek Coon ,  Matthew D. Rosa ,  Johnathan Marquez ,  Michael B. Binnard ,  Steven Douglas Slonaker ,  Daniel Gene Smith ,  Stephen P. Renwick ,  Brett Herr

IPC: G03F7/20 ,  G03F9/00 ,  H02K41/03 ,  G01D5/347

CPC classification number: G03F7/70725 ,  G01D5/347 ,  G01D5/34715 ,  G03F7/70341 ,  G03F7/70716 ,  G03F7/70775 ,  G03F7/7085 ,  G03F9/7026 ,  G03F9/7034 ,  G03F9/7049 ,  H02K41/031 ,  H02K2201/18

Abstract: A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.

公开(公告)号：US11061338B2

公开(公告)日：2021-07-13

申请号：US15940549

申请日：2018-03-29

Applicant: NIKON CORPORATION

Inventor： Jonathan Kyle Wells ,  Paul Derek Coon ,  Matthew D. Rosa ,  Johnathan Marquez ,  Michael B. Binnard ,  Steven Douglas Slonaker ,  Daniel Gene Smith ,  Stephen P. Renwick ,  Brett Herr

IPC: G03F7/20 ,  H02K41/03 ,  G01D5/347 ,  G03F9/00

Abstract: A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.

公开(公告)号：US20180181008A1

公开(公告)日：2018-06-28

申请号：US15901045

申请日：2018-02-21

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Johnathan Marquez ,  Joseph P. Rossi

IPC: G03F7/20 ,  H01L21/67

CPC classification number: G03F7/70341 ,  G03F7/70716 ,  G03F7/70858 ,  G03F7/70991 ,  H01L21/67017 ,  H01L21/67109

Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).

公开(公告)号：US20160299439A1

公开(公告)日：2016-10-13

申请号：US15094480

申请日：2016-04-08

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Johnathan Marquez ,  Joseph P. Rossi

IPC: G03F7/20

CPC classification number: G03F7/70341 ,  G03F7/70716 ,  G03F7/70858 ,  G03F7/70991 ,  H01L21/67017 ,  H01L21/67109

Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).

Abstract translation: 移动设备（15）的台架组件（10）包括保持设备（15）的台（14），基座（12），平台移动器组件（16）和供应系统（20A）。 供应系统（20A）固定到台架（14）上并定位在台架（14）上。 供应系统（20A）包括循环系统（24），循环系统（24）使循环流体（22）循环通过级（14）中的循环管道（14D），以控制工作台（14）和装置（15）的温度， 。 循环系统（24）可以包括：储存容器组件（234A），其限定向循环管道（14D）供应加压循环流体（22）的供应室（350）;接收循环流体 （22），其通过循环管道（14D）循环，将供应室（350）与回流室（352）分离的可移动活塞（354）和推动活塞（354）的活塞泵（356） 移动以减小供应室（350）的供应体积并将循环流体（22）推出供应室（350）。