公开(公告)号：US11061338B2

公开(公告)日：2021-07-13

申请号：US15940549

申请日：2018-03-29

Applicant: NIKON CORPORATION

Inventor： Jonathan Kyle Wells ,  Paul Derek Coon ,  Matthew D. Rosa ,  Johnathan Marquez ,  Michael B. Binnard ,  Steven Douglas Slonaker ,  Daniel Gene Smith ,  Stephen P. Renwick ,  Brett Herr

IPC: G03F7/20 ,  H02K41/03 ,  G01D5/347 ,  G03F9/00

Abstract: A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.

公开(公告)号：US10812695B2

公开(公告)日：2020-10-20

申请号：US15264108

申请日：2016-09-13

Applicant: NIKON CORPORATION

Inventor： Jonathan K. Wells ,  Matthew D. Rosa ,  Paul Derek Coon ,  Eric Peter Goodwin

IPC: H04N5/225 ,  H04N13/243 ,  G01B11/00 ,  G03F7/20 ,  H04N13/239 ,  H04N13/00

Abstract: A measuring device (233) for monitoring movement of a first object relative to a second object, the first object or the second object including a target surface (13), comprises a first image sensor combination (236), a second image sensor combination (237), and a control system (20A). The image sensor combinations (236, 237) capture first images and second images of the target surface (13) over time. The first image sensor combination (236) includes a first image sensor (236A) and a first lens assembly (236B). The second image sensor combination (237) includes a second image sensor (237A), and a second lens assembly (237B) having a second optical axis (237BX) that is at an angle of between thirty degrees and sixty degrees relative to normal to the target surface (13). The control system (20A) analyzes the first images and the second images to monitor movement of the first object relative to the second object.

公开(公告)号：US20180217510A1

公开(公告)日：2018-08-02

申请号：US15940549

申请日：2018-03-29

Applicant: NIKON CORPORATION

Inventor： J. Kyle Wells ,  Paul Derek Coon ,  Matthew D. Rosa ,  Johnathan Marquez ,  Michael B. Binnard ,  Steven Douglas Slonaker ,  Daniel Gene Smith ,  Stephen P. Renwick ,  Brett Herr

IPC: G03F7/20 ,  G03F9/00 ,  H02K41/03 ,  G01D5/347

CPC classification number: G03F7/70725 ,  G01D5/347 ,  G01D5/34715 ,  G03F7/70341 ,  G03F7/70716 ,  G03F7/70775 ,  G03F7/7085 ,  G03F9/7026 ,  G03F9/7034 ,  G03F9/7049 ,  H02K41/031 ,  H02K2201/18

Abstract: A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.

公开(公告)号：US20170076439A1

公开(公告)日：2017-03-16

申请号：US15264108

申请日：2016-09-13

Applicant: NIKON CORPORATION

Inventor： Jonathan K. Wells ,  Matthew D. Rosa ,  Paul Derek Coon ,  Eric Peter Goodwin

IPC: G06T7/00 ,  H04N5/225 ,  G06T7/20

Abstract: A measuring device (233) for monitoring movement of a first object relative to a second object, the first object or the second object including a target surface (13), comprises a first image sensor combination (236), a second image sensor combination (237), and a control system (20A). The image sensor combinations (236, 237) capture first images and second images of the target surface (13) over time. The first image sensor combination (236) includes a first image sensor (236A) and a first lens assembly (236B). The second image sensor combination (237) includes a second image sensor (237A), and a second lens assembly (237B) having a second optical axis (237BX) that is at an angle of between thirty degrees and sixty degrees relative to normal to the target surface (13). The control system (20A) analyzes the first images and the second images to monitor movement of the first object relative to the second object.

Abstract translation: 一种用于监测第一物体相对于第二物体的移动的测量装置（233），所述第一物体或所述第二物体包括目标表面（13），包括第一图像传感器组合（236），第二图像传感器组合 237）和控制系统（20A）。 图像传感器组合（236,237）随着时间的推移捕获目标表面（13）的第一图像和第二图像。 第一图像传感器组合（236）包括第一图像传感器（236A）和第一透镜组件（236B）。 第二图像传感器组合（237）包括第二图像传感器（237A）和具有第二光轴（237BX）的第二透镜组件（237B），第二光轴相对于垂直于第二图像传感器 目标表面（13）。 控制系统（20A）分析第一图像和第二图像以监测第一对象相对于第二对象的移动。