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公开(公告)号：US20160221031A1
公开(公告)日：2016-08-04
申请号：US15097956
申请日：2016-04-13
申请人： NIKON CORPORATION
发明人： Yasutaka NISHI , Makoto NAKAZUMI
CPC分类号： B05D1/02 , B05D1/60 , B05D3/065 , C23C24/00 , C23C24/08 , G06F3/041 , G06F3/044 , G06F2203/04103
摘要： In order to provide a novel method of obtaining a thin film to replace the related art, provided is a method of manufacturing a thin film, including: generating mist of a dispersion liquid containing fine particles; supplying the generated mist of the dispersion liquid onto a substrate; and drying the dispersion liquid supplied onto the substrate.
摘要翻译： 为了提供一种获得薄膜以代替现有技术的新方法，提供了一种制造薄膜的方法，包括：产生含有微粒的分散液的雾; 将分散液的生成雾供给到基板上; 并干燥供给到基板上的分散液。
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公开(公告)号：US20190165190A1
公开(公告)日：2019-05-30
申请号：US16263921
申请日：2019-01-31
IPC分类号： H01L31/0224 , C01G15/00 , C01G19/00
摘要： The nanoparticle assembly includes nanoparticles having an average primary particle size of 60 nm or less, and the nanoparticle assembly has a diameter of more than 500 nm and 5 μm or less.
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公开(公告)号：US20210291222A1
公开(公告)日：2021-09-23
申请号：US17162609
申请日：2021-01-29
申请人： NIKON CORPORATION
发明人： Yasutaka NISHI
摘要： A mist generating apparatus sprays a surface of an object (P) to be treated with a carrier gas (CGS) of mist (Mst) of a solution containing fine particles or molecules of a material substance, so that a layer of the material substance is deposited on the surface of the object (P) to be treated. The mist generating device includes a mist generator (14) for atomizing the solution to feed the carrier gas (CGS) containing the mist (Mst), and an ultraviolet irradiator (20B) for applying ultraviolet rays having a wavelength of 400 nm or lower to the mist (Mst) floating in the carrier gas (CGS) in a flow path extending from the mist generator (14) until the carrier gas (CGS) is sprayed on the surface of the object (P) to be treated.
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4.发明申请METHOD OF TRANSFERRING THIN FILM, METHOD OF MANUFACTURING THIN FILM TRANSISTOR, METHOD OF FORMING PIXEL ELECTRODE OF LIQUID CRYSTAL DISPLAY DEVICE 有权传输薄膜的方法，制造薄膜晶体管的方法，形成液晶显示装置的像素电极的方法公开(公告)号：US20150318306A1
公开(公告)日：2015-11-05
申请号：US14798964
申请日：2015-07-14
申请人： NIKON CORPORATION
发明人： Makoto NAKAZUMI , Yasutaka NISHI
IPC分类号： H01L27/12
CPC分类号： H01L27/127 , G02F1/1368 , G02F2001/13613 , H01L21/2007 , H01L27/1225 , H01L27/124 , H01L27/1266 , H01L29/66969 , H01L29/78603 , H01L29/7869
摘要： A method of transferring a thin film is a method of transferring a thin film formed on a first substrate to a second substrate, the method including: allowing the first substrate to come into contact with a liquid to swell the first substrate; allowing the second substrate and the thin film to come into contact with each other via the liquid; and drying the liquid to allow the thin film to adhere to the second substrate.
摘要翻译： 转印薄膜的方法是将形成在第一衬底上的薄膜转移到第二衬底的方法，该方法包括：使第一衬底与液体接触以使第一衬底膨胀; 允许第二基板和薄膜经由液体彼此接触; 并干燥液体以使薄膜粘附到第二基底上。
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公开(公告)号：US20230166980A1
公开(公告)日：2023-06-01
申请号：US18075992
申请日：2022-12-06
发明人： Kiyoshi KANIE , Atsushi MURAMATSU , Yasutaka NISHI , Ryoko SUZUKI
CPC分类号： C01G9/02 , C23C16/40 , C01P2002/54 , C01P2004/64
摘要： Gallium-doped zinc oxide particles having an average particle diameter of from >0 nm to 30 nm and a resistivity of from 0.08 MΩ·cm to 1.4 MΩ·cm.
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公开(公告)号：US20230099077A1
公开(公告)日：2023-03-30
申请号：US18073822
申请日：2022-12-02
申请人： NIKON CORPORATION
发明人： Ryoko SUZUKI , Yasutaka NISHI , Kotaro OKUI
IPC分类号： H05H1/48 , C23C16/448 , C23C16/50 , B05B17/06
摘要： Provided is a mist generator including: a container that stores a liquid; a gas supply unit that supplies a gas into the container; and an electrode that generates plasma of the gas between the electrode and the liquid, where the supply direction of the gas fed from the gas supply opening of the gas supply unit is different from a direction in which gravity acts.
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公开(公告)号：US20220355316A1
公开(公告)日：2022-11-10
申请号：US17869253
申请日：2022-07-20
申请人： NIKON CORPORATION
发明人： Yoshiaki KITO , Hiroshi KAJIYAMA , Yasutaka NISHI , Kotaro OKUI
摘要： A deposition apparatus supplies mist containing fine particles to a substrate and forms a film including the fine particles on a substrate surface, and includes an air guide member that covers at least a portion of the substrate surface, and a mist supplying section that supplies mist to a space between the substrate surface and the air guide member. The mist supplying section includes a charge applying section, which applies a positive or negative charge to the mist, and a mist ejecting section, which ejects the mist charged by the mist applying section into the space. The air guide member has a wall surface facing the substrate surface, and the deposition apparatus includes an electrostatic field generating section that causes a potential having a same sign as the mist charged by the charge applying section to be generated by the wall surface.
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8.发明申请公开(公告)号：US20180108539A1
公开(公告)日：2018-04-19
申请号：US15843539
申请日：2017-12-15
申请人： NIKON CORPORATION
发明人： Makoto NAKAZUMI , Yasutaka NISHI , Kei NARA
IPC分类号： H01L21/447 , H01L21/02 , H01L21/4763 , H01L29/66 , H01L29/49 , H01L29/786
CPC分类号： H01L21/447 , H01L21/02565 , H01L21/02631 , H01L21/445 , H01L21/47635 , H01L29/417 , H01L29/4908 , H01L29/66969 , H01L29/786 , H01L29/7869 , H01L31/00
摘要： An object is to provide a novel method in place of the above-described conventional technology, as a technique for obtaining a thin film with a wiring pattern applied. A method for manufacturing a wiring pattern according to the present invention is characterized in that the method includes: a laminate forming step of forming a laminate by bringing a first member that has a resist layer and a metal layer formed on the resist layer into contact with a second member that includes a substrate; a resist layer patterning step of subjecting the resist layer to patterning; and an etching step of selectively removing the metal layer.
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公开(公告)号：US20200290082A1
公开(公告)日：2020-09-17
申请号：US16890266
申请日：2020-06-02
申请人： NIKON CORPORATION
发明人： Yasutaka NISHI , Makoto NAKAZUMI
摘要： A thin film forming apparatus including: a first chamber configured to generate a mist of a dispersion liquid, and including an outlet; a second chamber configured to receive the generated mist from the first chamber and collect particles of the generated mist having a size greater than a predetermined value, and including an inlet provided on a top of the second chamber and connected to the outlet of the first chamber, and an outlet provided on the top of the second chamber and configured to transfer, as homogenized mist, particles of the generated mist having a size less than or equal to the predetermined value due to the effect of gravity on the particles of the mist; and a third chamber configured to receive the homogenized mist from the second chamber, and including an inlet connected to the outlet of the second chamber.
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公开(公告)号：US20190262858A1
公开(公告)日：2019-08-29
申请号：US16407344
申请日：2019-05-09
申请人： NIKON CORPORATION
发明人： Yasutaka NISHI , Makoto NAKAZUMI
摘要： A thin film forming apparatus including: a first chamber configured to generate a mist of a dispersion liquid, and including an outlet; a second chamber configured to receive the generated mist from the first chamber and collect particles of the generated mist having a size greater than a predetermined value, and including an inlet provided on a top of the second chamber and connected to the outlet of the first chamber, and an outlet provided on the top of the second chamber and configured to transfer, as homogenized mist, particles of the generated mist having a size less than or equal to the predetermined value due to the effect of gravity on the particles of the mist; and a third chamber configured to receive the homogenized mist from the second chamber, and including an inlet connected to the outlet of the second chamber.
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