METHOD OF SEPARATING A WAFER OF SEMICONDUCTOR DEVICES
    4.
    发明申请
    METHOD OF SEPARATING A WAFER OF SEMICONDUCTOR DEVICES 有权
    分离半导体器件的方法

    公开(公告)号:US20150140711A1

    公开(公告)日:2015-05-21

    申请号:US14399323

    申请日:2013-05-08

    IPC分类号: H01L27/12

    摘要: A method according to embodiments of the invention includes providing a wafer comprising a semiconductor structure grown on a growth substrate. The semiconductor structure includes a light emitting layer disposed between an n-type region and a p-type region. The wafer includes trenches defining individual semiconductor devices. The trenches extend through an entire thickness of the semiconductor structure to reveal the growth substrate. The method further includes forming a thick conductive layer on the semiconductor structure. The thick conductive layer is configured to support the semiconductor structure when the growth substrate is removed. The method further includes removing the growth substrate.

    摘要翻译: 根据本发明的实施例的方法包括提供包括在生长衬底上生长的半导体结构的晶片。 半导体结构包括设置在n型区域和p型区域之间的发光层。 晶片包括限定各个半导体器件的沟槽。 沟槽延伸穿过半导体结构的整个厚度以露出生长衬底。 该方法还包括在半导体结构上形成厚的导电层。 当导电层被去除时,厚的导电层构造成支撑半导体结构。 该方法还包括去除生长衬底。

    Process for growing HgCdTe base and contact layer in one operation
    6.
    发明授权
    Process for growing HgCdTe base and contact layer in one operation 失效
    在一个操作中生长HgCdTe基底和接触层的方法

    公开(公告)号:US5512511A

    公开(公告)日:1996-04-30

    申请号:US248135

    申请日:1994-05-24

    摘要: A method for fabricating a two layer epitaxial structure by a liquid phase epitaxy (LPE) process, the structure being comprised of a Group II-VI semiconductor material. The method includes the steps of providing an LPE growth chamber that contains a molten Group II-VI semiconductor material 24, the molten Group II-VI semiconductor material having a first temperature (T.sub.1); growing, at the first temperature, a base layer (22) from the molten Group II-VI semiconductor material, the base layer being grown to have a first bandgap energy; employing a shutter mechanism (30) to isolate the base layer from the molten Group II-VI semiconductor material without removing the base layer from the growth chamber; reducing the first temperature of the molten Group II-VI semiconductor material to a second temperature (T.sub.2); and growing from the same molten Group II-VI semiconductor material a contact layer (32) upon a surface (22a) of the base layer, the contact layer being grown to have a second bandgap energy that is narrower than the first bandgap energy. The base layer is not removed from the growth chamber until after the growth of the contact layer, and is thus not required to be exposed to the atmosphere or to any other sources of contaminates.

    摘要翻译: 一种通过液相外延(LPE)工艺制造双层外延结构的方法,该结构由II-VI族半导体材料组成。 该方法包括以下步骤:提供含有熔融的II-VI族半导体材料24,具有第一温度(T1)的熔融II-VI族半导体材料的LPE生长室; 在第一温度下,从熔融的II-VI族半导体材料生长基底层(22),生长基底层以具有第一带隙能量; 使用快门机构(30)将基底层与熔融的II-VI族半导体材料隔离,而不从生长室移除基底层; 将熔融的II-VI族半导体材料的第一温度降低到第二温度(T2); 并且从相同的熔融的II-VI族半导体材料生长在所述基底层的表面(22a)上的接触层(32),所述接触层被生长以具有比所述第一带隙能量窄的第二带隙能量。 直到接触层生长之后基底层才从生长室中除去,因此不需要暴露于大气或任何其它污染源。