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公开(公告)号：US10739579B2
公开(公告)日：2020-08-11
申请号：US16388613
申请日：2019-04-18
Applicant: nLIGHT, Inc.
Inventor： Jay Small , Ken Gross , Vito P. Errico
Abstract: A method includes determining a set of pattern position errors between (i) a set of expected pattern positions of a calibration pattern on a laser target situated in a laser processing field of a laser system and produced based on a set of initial scan optic actuation corrections associated with a scan optic of the laser system and (ii) a set of measured pattern positions of the calibration pattern, determining a set of scan optic actuation rates based on the set of initial scan optic actuation corrections, and updating the set of initial scan optic actuation corrections based on the set of scan optic actuation rates and the set of pattern position errors so as to form a set of updated scan optic actuation corrections that is associated with a reduction of at least a portion of the set of pattern position errors.
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公开(公告)号：US10957541B2
公开(公告)日：2021-03-23
申请号：US16598210
申请日：2019-10-10
Applicant: nLIGHT, Inc.
Inventor： Robert J. Martinsen , Scott R. Karlsen , Ken Gross
IPC: H01L21/268 , H01L21/02 , B23K26/00 , B23K26/0622 , B23K103/00
Abstract: Laser pulses from pulsed fiber lasers are directed to an amorphous silicon layer to produce a polysilicon layer comprising a disordered arrangement of crystalline regions by repeated melting and recrystallization. Laser pulse durations of about 0.5 to 5 ns at wavelength range between about 500 nm and 1000 nm, at repetition rates of 10 kHz to 10 MHz can be used. Line beam intensity uniformity can be improved by spectrally broadening the laser pulses by Raman scattering in a multimode fiber or by applying varying phase delays to different portions of a beam formed with the laser pulses to reduce beam coherence.
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公开(公告)号：US20200292765A1
公开(公告)日：2020-09-17
申请号：US16817357
申请日：2020-03-12
Applicant: NLIGHT, INC.
Abstract: Some embodiments may include a method of generating assessment data in a system including a galvanometric scanning system (GSS) having a laser device to generate a laser beam and an X-Y scan head module to position the laser beam on a work piece. The method may include selecting a dimension based on a desired accuracy for validation (and/or a characteristic of an imaging system in embodiments that utilize an imaging system). The method may include commanding the GSS to draw a mark based on a polygon or ellipse of the selected dimension around a predetermined target point associated with the work piece to generate assessment data, and following operation of the GSS based on said commanding, validating a calibration of the GSS using the assessment data (or an image thereof in embodiments that utilize an imaging system). Other embodiments may be disclosed and/or claimed.
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公开(公告)号：US10682726B2
公开(公告)日：2020-06-16
申请号：US15938925
申请日：2018-03-28
Applicant: nLIGHT, Inc.
Inventor： Ken Gross , Dahv A. V. Kliner , Roger Farrow
IPC: B23K26/06 , G02B27/09 , B23K26/067 , B23K26/073 , B23K26/064 , G02B6/14 , G02B6/036 , G02B6/028 , G02B6/42 , G02B6/26
Abstract: An optical beam delivery device. The device comprises a first length of fiber comprising a first RIP formed to enable the adjusting of one or more beam characteristics of an optical beam by a perturbation device. The optical beam delivery device further comprises a second length of fiber having a proximal end for receiving the optical beam from the first length of fiber and a distal end. The proximal end is coupled to the first length of fiber. The second length of fiber comprises a second RIP formed to confine at least a portion of the optical beam within one or more confinement regions. A beam modification structure is disposed at, or a distance from, the distal end of the second length of fiber. The beam modification structure is configured to modify at least one property of the optical beam chosen from beam divergence properties, beam spatial properties and beam directional characteristics.
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公开(公告)号：US10295820B2
公开(公告)日：2019-05-21
申请号：US15410612
申请日：2017-01-19
Applicant: nLIGHT, Inc.
Inventor： Jay Small , Ken Gross , Vito P. Errico
Abstract: A method includes determining a set of pattern position errors between (i) a set of expected pattern positions of a calibration pattern on a laser target situated in a laser processing field of a laser system and produced based on a set of initial scan optic actuation corrections associated with a scan optic of the laser system and (ii) a set of measured pattern positions of the calibration pattern, determining a set of scan optic actuation rates based on the set of initial scan optic actuation corrections, and updating the set of initial scan optic actuation corrections based on the set of scan optic actuation rates and the set of pattern position errors so as to form a set of updated scan optic actuation corrections that is associated with a reduction of at least a portion of the set of pattern position errors.
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Patent Agency Ranking
公开(公告)号：US20230152574A1
公开(公告)日：2023-05-18
申请号：US17986755
申请日：2022-11-14
Applicant: NLIGHT, INC.
IPC: G02B26/10
CPC classification number: G02B26/101 , G02B26/105
Abstract: Some embodiments may include a method assessing whether a dynamic focus module in a three axis galvanometric scanning system (three-axis GSS) is associated with a focus calibration error. The method may include identifying a reference layer associated with a surface of the work piece and positive and negative offset distances each a difference distance above or below the reference layer, respectively, and selecting a target pattern based on the offset distances, wherein the pattern includes an individual line for each offset distance. The method may include commanding the three-axis GSS to draw the target pattern on the work piece, and then assessing whether the dynamic focus module is associated with the focus calibration error by correlating laser marking artifacts on the work piece to ones of the individual lines of the selected pattern. Other embodiments may be disclosed and/or claimed.
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公开(公告)号：US11579440B2
公开(公告)日：2023-02-14
申请号：US16817450
申请日：2020-03-12
Applicant: NLIGHT, INC.
Abstract: Some embodiments may include a method assessing whether a dynamic focus module in a three axis galvanometric scanning system (three-axis GSS) is associated with a focus calibration error. The method may include identifying a reference layer associated with a surface of the work piece and positive and negative offset distances each a difference distance above or below the reference layer, respectively, and selecting a target pattern based on the offset distances, wherein the pattern includes an individual line for each offset distance. The method may include commanding the three-axis GSS to draw the target pattern on the work piece, and then assessing whether the dynamic focus module is associated with the focus calibration error by correlating laser marking artifacts on the work piece to ones of the individual lines of the selected pattern. Other embodiments may be disclosed and/or claimed.
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公开(公告)号：US11525968B2
公开(公告)日：2022-12-13
申请号：US16817357
申请日：2020-03-12
Applicant: NLIGHT, INC.
Abstract: Some embodiments may include a method of generating assessment data in a system including a galvanometric scanning system (GSS) having a laser device to generate a laser beam and an X-Y scan head module to position the laser beam on a work piece. The method may include selecting a dimension based on a desired accuracy for validation (and/or a characteristic of an imaging system in embodiments that utilize an imaging system). The method may include commanding the GSS to draw a mark based on a polygon or ellipse of the selected dimension around a predetermined target point associated with the work piece to generate assessment data, and following operation of the GSS based on said commanding, validating a calibration of the GSS using the assessment data (or an image thereof in embodiments that utilize an imaging system). Other embodiments may be disclosed and/or claimed.
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9.发明授权公开(公告)号：US11411132B2
公开(公告)日：2022-08-09
申请号：US16786957
申请日：2020-02-10
Applicant: nLIGHT, Inc.
Inventor： Ken Gross
Abstract: Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.
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公开(公告)号：US20200292806A1
公开(公告)日：2020-09-17
申请号：US16817450
申请日：2020-03-12
Applicant: NLIGHT, INC.
IPC: G02B26/10
Abstract: Some embodiments may include a method assessing whether a dynamic focus module in a three axis galvanometric scanning system (three-axis GSS) is associated with a focus calibration error. The method may include identifying a reference layer associated with a surface of the work piece and positive and negative offset distances each a difference distance above or below the reference layer, respectively, and selecting a target pattern based on the offset distances, wherein the pattern includes an individual line for each offset distance. The method may include commanding the three-axis GSS to draw the target pattern on the work piece, and then assessing whether the dynamic focus module is associated with the focus calibration error by correlating laser marking artifacts on the work piece to ones of the individual lines of the selected pattern. Other embodiments may be disclosed and/or claimed.
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