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    Device for forming amorphous film and method for forming same
    3.
    发明授权
    Device for forming amorphous film and method for forming same 有权

    公开(公告)号：US10773267B2

    公开(公告)日：2020-09-15

    申请号：US14372089

    申请日：2013-01-10

    申请人： Nakayama Amorphous Co., Ltd.

    发明人： Ryurou Kurahashi ,  Hiroshi Matsumoto ,  Junji Takehara ,  Yoshihisa Fukutome

    IPC分类号： B05B7/08 ,  B05B7/20 ,  C23C4/129 ,  C23C4/08 ,  B05B7/14 ,  B05B7/16 ,  C23C4/06

    摘要： PROBLEM: To provide a large device and a method which is advantageous for forming a large-area amorphous film.SOLUTION: A device of the invention sprays a flame including a particulate material with a spraying machine toward a substrate, melts the material with the flame, and cools the material and flame by cooling gas before they reach the substrate to form an amorphous film. The spraying machine has particulate material spraying ports and flame spraying ports such that the flame including the material has an oblong cross section. Inert gas spraying ports are successively placed on both sides across the ports of the material and flame. Mist spraying ports are successively placed on both sides across the ports for the material, flame and inert gas. A skirt is attached/detached depending on a combustion gas or a film width to restrain film width narrowing and increase of film thickness deviation.

    DEVICE FOR FORMING AMORPHOUS FILM AND METHOD FOR FORMING SAME
    5.
    发明申请
    DEVICE FOR FORMING AMORPHOUS FILM AND METHOD FOR FORMING SAME 审中-公开
    用于形成非晶膜的装置及其形成方法

    公开(公告)号：US20140335283A1

    公开(公告)日：2014-11-13

    申请号：US14372089

    申请日：2013-01-10

    申请人： Nakayama Amorphous Co., Ltd.

    发明人： Ryurou Kurahashi ,  Hiroshi Matsumoto ,  Junji Takehara ,  Yoshihisa Fukutome

    IPC分类号： C23C4/12 ,  B05B7/08 ,  B05B7/14 ,  C23C4/06 ,  B05B7/16

    摘要： PROBLEM: To provide a large device and a method which is advantageous for forming a large-area amorphous film.SOLUTION: A device of the invention sprays a flame including a particulate material with a spraying machine toward a substrate, melts the material with the flame, and cools the material and flame by cooling gas before they reach the substrate to form an amorphous film. The spraying machine has particulate material spraying ports and flame spraying ports such that the flame including the material has an oblong cross section. Inert gas spraying ports are successively placed on both sides across the ports of the material and flame. Mist spraying ports are successively placed on both sides across the ports for the material, flame and inert gas. A skirt is attached/detached depending on a combustion gas or a film width to restrain film width narrowing and increase of film thickness deviation.

    摘要翻译： 问题：提供一种有利于形成大面积非晶膜的大型器件和方法。 解决方案：本发明的装置通过喷涂机向衬底喷射包括颗粒材料的火焰，用火焰熔化材料，并在冷却气体到达衬底之前冷却材料和火焰以形成非晶膜。 喷涂机具有颗粒材料喷射口和火焰喷射口，使得包括材料的火焰具有长方形横截面。 惰性气体喷射口连续放置在材料和火焰的两端。 雾化喷雾口连续放置在两端，用于材料，火焰和惰性气体。 裙部根据燃烧气体或膜宽度而附着/分离，以抑制膜宽度变窄和膜厚度偏差增加。