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公开(公告)号：US5891585A
公开(公告)日：1999-04-06
申请号：US743343
申请日：1996-11-01
申请人： Naoki Ayai , Yuichi Yamada , Akira Mikumo , Kenichi Takahashi , Norikiyo Koizumi , Toshinari Ando , Makoto Sugimoto , Hiroshi Tsuji
发明人： Naoki Ayai , Yuichi Yamada , Akira Mikumo , Kenichi Takahashi , Norikiyo Koizumi , Toshinari Ando , Makoto Sugimoto , Hiroshi Tsuji
CPC分类号： H01L39/2409 , H01L39/14 , Y10S428/93 , Y10S505/806 , Y10S505/886 , Y10S505/887 , Y10T428/12486 , Y10T428/12819 , Y10T428/12847 , Y10T428/12903 , Y10T428/294
摘要： An Nb.sub.3 Al multi-filamentary superconducting wire capable of realizing both stabilization of a superconducting state and increase in capacity is provided. The Nb.sub.3 Al multi-filamentary superconducting wire includes a core formed of copper or copper alloy and located at the center of the wire; a multi-filamentary superconductor layer located around the core and having filaments containing Nb and Al as constituent elements embedded in a matrix formed of copper or copper alloy; and a high resistance layer located around the multi-filamentary superconductor layer, and is characterized in that a sectional area of the core is at least 15% of the total sectional area of the core and the matrix and that the core and the matrix are formed of copper or copper alloy of at least 99.9% purity.
摘要翻译： 提供了能够实现超导状态的稳定化和容量增加的Nb3Al多丝超导线。 Nb3Al多丝超导线包括由铜或铜合金形成的芯，位于线的中心; 位于芯周围的多丝超导体层，并且具有包含Nb和Al作为嵌入由铜或铜合金形成的基体中的构成元素的细丝; 以及位于所述多丝超导体层周围的高电阻层，其特征在于，所述芯的截面积为所述芯和所述基体的总截面积的至少15％，并且所述芯和所述基体形成 的铜或铜合金纯度至少为99.9％。
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公开(公告)号：US06777376B1
公开(公告)日：2004-08-17
申请号：US09684336
申请日：2000-10-10
IPC分类号： H01B1200
CPC分类号： H01L39/248 , H01L39/143
摘要： In order to provide a superconducting wire that has a high critical current value, has no defects such as bulges, and has high mechanical strength, an oxide superconducting material (1) is covered, and ceramic particles or fibers (3) are buried in the surface of a covering (2) made of metal
摘要翻译： 为了提供具有高临界电流值的超导线，没有诸如凸起的缺陷，并且具有高的机械强度，覆盖了氧化物超导材料（1），陶瓷颗粒或纤维（3）被埋在 由金属制成的覆盖物（2）的表面
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公开(公告)号：US06493925B1
公开(公告)日：2002-12-17
申请号：US09666153
申请日：2000-09-19
IPC分类号： H01L3924
CPC分类号： H01L39/248 , Y10T29/49014
摘要： Powder including at least a superconducting phase is degassed (step S1). After the powder is filled in a silver pipe (step S2), the silver pipe is degassed at a high temperature (step S3). After a plurality of single-core wires are inserted into another silver pipe to attain a multi-core structure, the silver pipe is degassed at a high temperature (step S5). The silver pipe is sealed under a reduced pressure (step S6). Therefore, even when a multi-core superconducting wire is manufactured, a manufacturing method of a superconducting wire capable of preventing swelling of the wire caused by a residual gaseous component can be obtained.
摘要翻译： 至少包含超导相的粉末脱气（步骤S1）。 在粉末填充银管（步骤S2）之后，银管在高温下脱气（步骤S3）。 在将多根单芯线插入另一银管中以实现多芯结构之后，银管在高温下脱气（步骤S5）。 银管在减压下密封（步骤S6）。 因此，即使制造多芯超导线，也可以获得能够防止由残留的气体成分引起的电线膨胀的超导线的制造方法。
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4.发明授权
公开(公告)号：US5779864A
公开(公告)日：1998-07-14
申请号：US746518
申请日：1997-01-28
IPC分类号： B21F19/00 , C25F3/16 , G01B7/00 , G01B7/06 , G01B7/32 , G01N27/04 , G01R31/02 , H01B13/00 , H01L39/24 , C25D17/00 , C25F7/00
CPC分类号： H01L39/24 , C25F3/16 , G01B7/002 , G01B7/06 , G01N27/041 , G01R31/022 , H01L39/248
摘要： Disclosed herein are methods of measuring, adjusting and uniformalizing a sectional area ratio of a metal-covered electric wire, a method of cleaning an electric wire, a method of manufacturing a metal-covered electric wire, an apparatus for measuring a sectional area ratio of a metal-covered electric wire, and an apparatus for electropolishing a metal-covered electric wire. Electric resistance values of first and second materials are previously stored respectively so that a sectional area ratio of a metal-covered electric wire is calculated on the basis of the as-stored values and an actually measured electric resistance value of the metal-covered electric wire. Measurement and uniformalization of a sectional area ratio of a metal-covered electric wire and cleaning of an electric wire are carried out by dissolving surface layer parts of the electric wires by electropolishing.
摘要翻译： 这里公开了测量，调整和均匀化金属覆盖电线的截面积比，电线清洁方法，金属覆盖电线的制造方法，测量截面积比的装置 金属覆盖的电线，以及用于电镀金属覆盖的电线的设备。 分别预先存储第一和第二材料的电阻值，使得基于金属覆盖的电线的实际测量的电阻值和金属覆盖的电线的实际测量的电阻值来计算金属覆盖的电线的截面面积比 。 金属覆盖电线的截面积比和电线清洁的测量和均匀化是通过电解抛光来溶解电线的表层部分来进行的。
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5.发明授权Method and apparatus for adjusting sectional area ratio of metal-covered electric wire 失效用于调整金属覆盖电线截面积比的方法和装置
公开(公告)号：US5507924A
公开(公告)日：1996-04-16
申请号：US189404
申请日：1994-01-31
IPC分类号： B21F19/00 , C25F3/16 , G01B7/00 , G01B7/06 , G01B7/32 , G01N27/04 , G01R31/02 , H01B13/00 , H01L39/24 , C25F1/00 , C25F7/00
CPC分类号： H01L39/24 , C25F3/16 , G01B7/002 , G01B7/06 , G01N27/041 , G01R31/022 , H01L39/248
摘要： Disclosed herein are methods of measuring, adjusting and uniformalizing a sectional area ratio of a metal-covered electric wire, a method of cleaning an electric wire, a method of manufacturing a metal-covered electric wire, an apparatus for measuring a sectional area ratio of a metal-covered electric wire, and an apparatus for electropolishing a metal-covered electric wire.Electric resistance values of first and second materials are previously stored respectively so that a sectional area ratio of a metal-covered electric wire is calculated on the basis of the as-stored values and an actually measured electric resistance value of the metal-covered electric wire. Measurement and uniformalization of a sectional area ratio of a metal-covered electric wire and cleaning of an electric wire are carried out by dissolving surface layer parts of the electric wires by electropolishing.
摘要翻译： 这里公开了测量，调整和均匀化金属覆盖电线的截面积比，电线清洁方法，金属覆盖电线的制造方法，测量截面积比的装置 金属覆盖的电线，以及用于电镀金属覆盖的电线的设备。 分别预先存储第一和第二材料的电阻值，使得基于金属覆盖的电线的实际测量的电阻值和金属覆盖的电线的实际测量的电阻值来计算金属覆盖的电线的截面面积比 。 金属覆盖电线的截面积比和电线清洁的测量和均匀化是通过电解抛光来溶解电线的表层部分来进行的。
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6.发明授权Method and apparatus for adjusting sectional area ratio of metal-covered electric wire 失效用于调整金属覆盖电线截面积比的方法和装置
公开(公告)号：US5602488A
公开(公告)日：1997-02-11
申请号：US599454
申请日：1996-01-22
IPC分类号： B21F19/00 , C25F3/16 , G01B7/00 , G01B7/06 , G01B7/32 , G01N27/04 , G01R31/02 , H01B13/00 , H01L39/24 , G01R27/14
CPC分类号： H01L39/24 , C25F3/16 , G01B7/002 , G01B7/06 , G01N27/041 , G01R31/022 , H01L39/248
摘要： Methods of measuring, adjusting and uniformalizing a sectional area ratio of a metal-covered electric wire, a method of cleaning an electric wire, a method of manufacturing a metal-covered electric wire, an apparatus for measuring a sectional area ratio of a metal-covered electric wire, and an apparatus for electropolishing a metal-covered electric wire.Electric resistance values of first and second materials are previously stored respectively so that a sectional area ratio of a metal-covered electric wire is calculated on the basis of the as-stored values and an actually measured electric resistance value of the metal-covered electric wire. Measurement and uniformalization of a sectional area ratio of a metal-covered electric wire and cleaning of an electric wire are carried out by dissolving surface layer parts of the electric wires by electropolishing.
摘要翻译： 金属覆盖电线的截面积比的测量，调整和均匀化的方法，电线清洁方法，金属覆盖电线的制造方法，金属覆盖电线的截面积比的测量装置， 被覆电线，以及用于电镀金属覆盖的电线的装置。 分别预先存储第一和第二材料的电阻值，使得基于金属覆盖的电线的实际测量的电阻值和金属覆盖的电线的实际测量的电阻值来计算金属覆盖的电线的截面面积比 。 金属覆盖电线的截面积比和电线清洁的测量和均匀化是通过电解抛光来溶解电线的表层部分来进行的。
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公开(公告)号：US20070215602A1
公开(公告)日：2007-09-20
申请号：US11684895
申请日：2007-03-12
IPC分类号： H05B3/10
CPC分类号： H05B3/143 , H01L21/67103 , H01L21/67109
摘要： A heating and cooling module wherein the calorific value can be increased in a heater for mounting and heating a semiconductor chip, and the heating and cooling module is not damaged when the semiconductor chip is rapidly heated and cooled. The heating and cooling module of the includes a ceramic heater for mounting and heating a treated object, a cooling mechanism for cooling the ceramic heater, and a holder between the ceramic heater and the cooling mechanism, wherein the ceramic heater is an aluminum nitride heater having one or more internally disposed heating element layers. An intermediate layer is preferably inserted between the ceramic heater and the holder. An intermediate layer is also preferably inserted between the holder and the cooling mechanism.
摘要翻译： 一种加热和冷却模块，其中在用于安装和加热半导体芯片的加热器中可以增加热值，并且当半导体芯片被快速加热和冷却时，加热和冷却模块不被损坏。 其加热和冷却模块包括用于安装和加热被处理物体的陶瓷加热器，用于冷却陶瓷加热器的冷却机构和陶瓷加热器与冷却机构之间的保持器，其中陶瓷加热器是具有 一个或多个内部设置的加热元件层。 中间层优选插入陶瓷加热器和保持器之间。 中间层也优选地插入保持器和冷却机构之间。
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公开(公告)号：US20070062929A1
公开(公告)日：2007-03-22
申请号：US11507655
申请日：2006-08-22
IPC分类号： H05B3/68
CPC分类号： H05B3/265 , H01L21/67109
摘要： A heater unit that much improves accuracy in thermal uniformity of an object of heating during cooling, particularly rapid cooling, is provided. The heater unit in accordance with the present invention includes a heater substrate for mounting an object of heating and performing heat treatment thereon, and a cooling module for cooling the heater substrate, and between said heater substrate and the cooling module, an intervening body is arranged. Utilizing deformability of the intervening body, ratio of a non-contact portion can be reduced than when the intervening body is not provided, and temperature uniformity of the heater substrate at the time of cooling can be improved.
摘要翻译： 提供了一种加热器单元，其大大提高了冷却期间加热对象的热均匀性的精度，特别是快速冷却。 根据本发明的加热器单元包括用于安装加热物体并在其上进行热处理的加热器基板，以及用于冷却加热器基板的冷却模块，并且在所述加热器基板和冷却模块之间布置有中间体 。 利用中间体的可变形性，可以比不设置中间体时的非接触部分的比例降低，并且可以提高冷却时的加热器基板的温度均匀性。
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9.发明申请公开(公告)号：US20070056953A1
公开(公告)日：2007-03-15
申请号：US11518878
申请日：2006-09-12
IPC分类号： H05B3/68
CPC分类号： H05B3/143 , H01L21/67109
摘要： A ceramic heater attaining more uniform temperature distribution from the start to the end of cooling is provided. Further, in a cooling module used for cooling the heater, liquid leakage during use is prevented, degradation in cooling capability is prevented and the performance is maintained for a long period of use, and the manufacturing cost of the module is decreased. The ceramic heater includes a ceramic heater body and a cooling module cooling the heater body, and the cooling module has a structure formed by arranging a pipe in a trench formed in a plate-shaped structure.
摘要翻译： 提供了一种从开始到结束温度分布均匀的陶瓷加热器。 此外，在用于冷却加热器的冷却模块中，防止了使用期间的液体泄漏，防止了冷却能力的劣化，并且长时间使用时保持了性能，并且模块的制造成本降低。 陶瓷加热器包括陶瓷加热器主体和冷却加热器主体的冷却模块，并且冷却模块具有通过将管道设置在形成为板状结构的沟槽中而形成的结构。
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10.发明申请Semiconductor heating heater holder and semiconductor manufacturing apparatus 审中-公开半导体加热器支架和半导体制造装置公开(公告)号：US20070054424A1
公开(公告)日：2007-03-08
申请号：US11504764
申请日：2006-08-16
IPC分类号： H01L21/66
CPC分类号： H01L21/67103
摘要： A semiconductor heater holder for setting a heater for heating a semiconductor, having an opening, wherein the heat capacity of the semiconductor heater holder is not more than 1.5 times the heat capacity of the heater, and a semiconductor manufacturing apparatus comprising this semiconductor heater holder.
摘要翻译： 一种用于设置用于加热半导体的加热器的半导体加热器保持器，具有开口，其中半导体加热器保持器的热容量不大于加热器的热容量的1.5倍，以及包括该半导体加热器保持器的半导体制造装置。
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