摘要:
A method for determining conditions for forming a dielectric SiOCH film, includes: (i) forming a dielectric SiOCH film on a substrate under conditions; (ii) evaluating the conditions using a ratio of Si—CH3 bonding strength to Si—O bonding strength of the film as formed in step (i); (iii) if the ratio is 2.50 % or higher, confirming the conditions, and if the ratio is less than 2.50 %, changing the conditions by changing at least one of the susceptor temperature, the distance between upper and lower electrodes, the RF power, and the curing time; and (iv) repeating steps (i) to (iii) until the ratio is 2.50 % or higher.
摘要:
A method for determining conditions for forming a dielectric SiOCH film, includes: (i) forming a dielectric SiOCH film on a substrate under conditions; (ii) evaluating the conditions using a ratio of Si—CH3 bonding strength to Si—O bonding strength of the film as formed in step (i); (iii) if the ratio is 2.50 % or higher, confirming the conditions, and if the ratio is less than 2.50 %, changing the conditions by changing at least one of the susceptor temperature, the distance between upper and lower electrodes, the RF power, and the curing time; and (iv) repeating steps (i) to (iii) until the ratio is 2.50 % or higher.
摘要:
A fuel cell system having a fuel cell includes a power generation-time gas supplier that supplies hydrogen-containing fuel gas to an anode of the fuel cell and supplies an oxygen-containing oxidizing gas to a cathode of the fuel cell during power generation of the fuel cell. The fuel cell system also includes an anode potential rise information acquirer that acquires anode potential rise information, which represents information regarding a status of an anode potential rise of the fuel cell, after termination of supplies of the fuel gas and the oxidizing gas by the power generation-time gas supplier. The fuel cell system further includes an anode morphology variation deriver that derives an anode morphology variation representing a degree of a morphology change of a catalyst metal included in the anode, based on the anode potential rise information.
摘要:
A particle size distribution creating method includes a particle size range determining step, an integrating step of integrating the frequency of appearance of particles within the particle size range determined in the particle size range determining step, a division point determining step of determining particle sizes that provide division points, using the integral of the frequency of appearance obtained in the integrating step, and a typical point determining step of determining the minimum particle size, maximum particle size and the particle sizes of the division points as typical points. This method is characterized by assuming a particle size distribution which contains particles having the particle sizes of the respective typical points and is plotted such that the frequency of appearance of the particles having the particle size of each of the typical points is equal to the integral over each of the regions defined by the typical points, and obtaining the assumed particle size distribution as a particle size distribution model.
摘要:
A scanning optical apparatus includes a light source, a deflecting element for deflecting a beam of light emitted from the light source, an optical device for causing the beam of light emitted from the light source to be imaged into a linear shape long in the main scanning direction on the deflecting surface of the deflecting element. The optical device is comprised of a first optical element and a second optical element, and a third optical element for causing the beam of light deflected by the deflecting element to be imaged into a spot-like shape on a surface to be scanned. The third optical element includes a single lens, the opposite lens surfaces of which both include a toric surface of an aspherical surface shape in the main scanning plane, the curvatures of the opposite lens surfaces in the sub scanning plane being continuously varied from the on-axis toward the off-axis in the effective portion of the lens.
摘要:
The purpose of the present invention is to provide: an electric double-layer capacitor, a lithium ion secondary battery, and a lithium ion capacitor, each of which has excellent cycle characteristics; an electrode material which is capable of providing the electric double-layer capacitor, the lithium ion secondary battery, and the lithium ion capacitor; and a composite which is used in the electrode material. The composite of the present invention is a composite produced by compositing from 0.5 to 5 parts by mass of nitrogen atom-containing conductive polymer per 100 parts by mass of porous carbon material. The composite of the present invention is a composite where the peak area ratio (nitrogen/carbon ratio) of peak area derived from nitrogen atoms to peak area derived from carbon atoms in the spectrum by X-ray photoelectron spectroscopy becomes 0.005 to 0.05.
摘要:
A fuel cell system includes a fuel cell; a cathode inflow water amount determining portion that determines a cathode inflow water amount after activation of the fuel cell; an obtaining portion that obtains a pore total volume of the cathode side catalyst layer; an operating condition determining portion that determines, based on the determined cathode inflow water amount and the obtained pore total volume, an operating condition of the fuel cell that includes a current value of current that flows through the fuel cell and an upper limit value of a period of time for which the current flows, for bringing the cathode inflow water amount within a range that is equal to or less than the pore total volume; and an adjusting portion that adjusts the current value and the period of time for which current of the current value flows, such that the determined operating condition is realized.
摘要:
A scanning optical device includes a deflector for scanningly deflecting a plurality of light beams from a plurality of light sources, and an imaging optical system for imaging the light beams upon a plurality of scan surfaces to be scanned, wherein at least one piece of reflecting element is provided at each of a plurality of light paths extending from the deflector toward the scan surfaces.
摘要:
A scanning optical apparatus includes a light source, a deflecting element for deflecting a beam of light emitted from the light source, an optical device for causing the beam of light emitted from the light source to be imaged into a linear shape long in the main scanning direction on the deflecting surface of the deflecting element. The optical device is comprised of a first optical element and a second optical element, and a third optical element for causing the beam of light deflected by the deflecting element to be imaged into a spot-like shape on a surface to be scanned. The third optical element includes a single lens, the opposite lens surfaces of which both include a toric surface of an aspherical surface shape in the main scanning plane, the curvatures of the opposite lens surfaces in the sub scanning plane being continuously varied from the on-axis toward the off-axis in the effective portion of the lens.
摘要:
An optical scanning apparatus includes a light source having a light-emitting point; a light-beam converting unit configured to convert a state of a light beam emitted from the light-emitting point of the light source into another state; a deflecting unit configured to deflect and scan the light beam emitted from the light-beam converting unit, the deflecting unit including a resonant deflecting element having a single deflecting surface that reciprocates around an axis; and an imaging optical unit configured to cause the light beam deflected and scanned by the deflecting surface of the deflecting unit to form an image on a surface to be scanned. The distance between the light-emitting point of the light source and the light-beam converting unit is adjusted based on information obtained by a detector that detects the light beam emitted from the light source and deflected by the deflecting surface of the deflecting unit.