Protection of consumable susceptor during etch by a second coating of
another consumable material
    3.
    发明授权
    Protection of consumable susceptor during etch by a second coating of another consumable material 失效
    通过另一种消耗材料的第二涂层在蚀刻期间保护消耗基座

    公开(公告)号:US6071353A

    公开(公告)日:2000-06-06

    申请号:US962410

    申请日:1997-10-31

    申请人: Peter Gallagher

    发明人: Peter Gallagher

    CPC分类号: C23C16/4581 C23C16/4405

    摘要: The present invention is a method for cleaning a process chamber without damaging the process kit by coating the process kit with another consumable material that protects the process kit during the etch that removes buildup from the processing chamber. First, a polysilicon layer is deposited on at least one inner surface of the processing chamber. Next, a silicon nitride layer deposition is performed on at least one semiconductor substrate in the processing chamber. The semiconductor substrate having said nitride layer thereon is then removed from the processing chamber. An etch is then performed to remove the nitride layer buildup from the inner surface of the processing chamber that has the polysilicon layer thereon.

    摘要翻译: 本发明是一种用于清洁处理室而不损坏处理试剂盒的方法,该方法是用另一种可消耗材料涂覆处理试剂盒,该消耗材料在蚀刻期间保护处理试剂盒,从处理室除去积聚物。 首先,多晶硅层沉积在处理室的至少一个内表面上。 接下来,在处理室中的至少一个半导体衬底上进行氮化硅层沉积。 然后将其上具有所述氮化物层的半导体衬底从处理室移除。 然后进行蚀刻以从其上具有多晶硅层的处理室的内表面去除氮化物层积聚。

    Pyridinylmorpholine derivatives
    5.
    发明申请
    Pyridinylmorpholine derivatives 失效
    吡啶基吗啉衍生物

    公开(公告)号:US20060258654A1

    公开(公告)日:2006-11-16

    申请号:US10567639

    申请日:2004-08-09

    IPC分类号: A61K31/5377 C07D413/02

    CPC分类号: C07D413/12

    摘要: The invention relates to compounds of formula (I): wherein R, R1, R2 and X are defined herein, their preparation, and their use as pharmaceuticals.

    摘要翻译: 本发明涉及式(I)化合物:其中R,R 1,R 2和X在本文中定义,其制备及其作为药物的用途。

    Heteroaryloxy 3-substituted propanamines as serotonin and norepinephrine reuptake inhibitors
    10.
    发明授权
    Heteroaryloxy 3-substituted propanamines as serotonin and norepinephrine reuptake inhibitors 失效
    异丙酰氧基3-取代丙胺作为血清素和去甲肾上腺素再摄取抑制剂

    公开(公告)号:US07037932B2

    公开(公告)日:2006-05-02

    申请号:US10476137

    申请日:2002-05-06

    摘要: There is provided a heretoaryloxy 3-substituted propanamine compound of formula (I): wherein A is selected from —O— and —S—; X is selected from phenyl optionally substituted with up to 5 substituents selected from halo, C1–C4 alkyl and C1–C4 alkoxy, and thienyl optionally substituted with up to 3 substituents selected from halo and C1–C4 alkyl; Y is selected from benzothienyl, indolyl and benzofuranyl, optionally substituted with up to 5 substituents selected from halo, C1–C4 alkyl, C1–C4 alkoxy, nitro, acetyl and cyano; and when Y is indolyl it may be substituted or further substituted by an N-substituent selected from C1–C4 alkyl; R1 and R2 are each independently H or C1–C4 alkyl; and pharmaceutically acceptable salts thereof.

    摘要翻译: 提供式(I)的异烟酰基-3-取代的丙胺化合物:其中A选自-O-和-S-; X选自任选被至多5个选自卤素,C 1 -C 4烷基和C 1 -C 4烷基的取代基取代的苯基 > 4个烷氧基,任选被至多3个选自卤素和C 1 -C 4烷基的取代基取代的噻吩基; Y选自苯并噻吩基,吲哚基和苯并呋喃基,任选被至多5个选自卤素,C 1 -C 4烷基,C 1〜 -C≡4烷氧基,硝基,乙酰基和氰基; 当Y是吲哚基时,它可以被选自C 1 -C 4烷基的N-取代基取代或进一步取代; R 1和R 2各自独立地为H或C 1 -C 4烷基; 及其药学上可接受的盐。