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    Fabrication of chopper for particle beam instrument
    2.
    发明授权
    Fabrication of chopper for particle beam instrument 失效
    粒子束仪的切碎机制造

    公开(公告)号：US06781120B2

    公开(公告)日：2004-08-24

    申请号：US10165851

    申请日：2002-06-07

    申请人： Nicholas LeCursi ,  Lawrence J. LeGore ,  Robert H. Jackson, III ,  C. Bronson H. Crothers ,  Peter H. Kleban ,  Brian G. Frederick

    发明人： Nicholas LeCursi ,  Lawrence J. LeGore ,  Robert H. Jackson, III ,  C. Bronson H. Crothers ,  Peter H. Kleban ,  Brian G. Frederick

    IPC分类号： H01R4300

    CPC分类号： G21K1/087 ,  G01N23/05 ,  H01J49/0018 ,  H01J49/0031 ,  H01J49/061 ,  H01J49/446 ,  H01L2924/0002 ,  Y10T29/4902 ,  Y10T29/49082 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49156 ,  H01L2924/00

    摘要： A technique for providing a grid for a gate such as utilized in gating a stream of ions or other particles in a spectrometer instrument. The grid of wires may, for example, be a so-called Bradbury-Nielson Gate that consists of a set of two electrically isolated sets of equally spaced wires that lie substantially in the same plane and alternate in potential. The method utilized to provide is to first fabricate a frame of an insulating substrate having a hole and depositing metal film patterns such that conductive portions are formed on either side of the hole. Conductive portions on either side form a series of terminating pads on the portion of the substrate closest to the hole and a bus bar. Grid wires are then formed by stretching a section of wire with desired constant tension across the hole and bonding the ends of the wire to a respective one of the pads on one side and bus bar on the other side. The method provides a rapid, inexpensive way to fabricate such modulating devices.

    摘要翻译： 提供用于门的栅格的技术，例如用于在光谱仪器中门控离子或其他颗粒物流。 电线的网格可以是例如所谓的Bradbury-Nielson门，其由两组基本上位于同一平面中且交替潜在的等间隔的导线的两组电隔离组合组成。 用于提供的方法是首先制造具有孔的绝缘基板的框架并沉积金属膜图案，使得导电部分形成在孔的任一侧上。 任一侧上的导电部分形成在最靠近该孔的基板部分上的一系列端接焊盘和汇流条。 然后通过将所需的恒定张力的一段导线拉伸穿过该孔并且将导线的端部粘合到另一侧的一侧上的焊盘和另一侧的母线上而形成网格线。 该方法提供了制造这种调制装置的快速，便宜的方式。

    Gating grid and method of manufacture
    6.
    发明授权
    Gating grid and method of manufacture 失效
    门格栅和制造方法

    公开(公告)号：US07569835B2

    公开(公告)日：2009-08-04

    申请号：US11714691

    申请日：2007-03-06

    申请人： Brian G. Frederick ,  Lawrence J. LeGore ,  Rosemary Smith ,  Scott Collins ,  Robert H. Jackson, III

    发明人： Brian G. Frederick ,  Lawrence J. LeGore ,  Rosemary Smith ,  Scott Collins ,  Robert H. Jackson, III

    IPC分类号： H01J29/52 ,  H01J37/063 ,  G01D59/44 ,  H01J49/00

    CPC分类号： H01J49/061 ,  Y10S438/927 ,  Y10S438/977 ,  Y10T29/49046 ,  Y10T29/49117

    摘要： The present invention relates generally to grids for gating a stream of charged particles and methods for manufacturing the same. In one embodiment, the present invention relates to a Bradbury-Nielson gate having transmission line grid elements. In one embodiment is a feed structure for a gating grid where a drive source is coupled to a feeding transmission line with the same geometry as the chopper and continues with the same geometry to a termination transmission line. Also included is a method for fabricating a gate for charged particles which includes micromachining at least two gate elements from at least one wafer, wherein each gate element includes at least one grid element; metalizing the grid elements; and assembling the gate elements such that the grid elements of the gate elements are interleaved, thereby forming a Bradbury Nielson gate.

    摘要翻译： 本发明一般涉及用于选通带电粒子流的栅格及其制造方法。 在一个实施例中，本发明涉及具有传输线网格元件的Bradbury-Nielson门。 在一个实施例中是用于门控格栅的馈送结构，其中驱动源耦合到与斩波器具有相同几何形状的馈电传输线，并且以相同的几何形状连续地连接到终端传输线。 还包括一种用于制造带电粒子的栅极的方法，其包括从至少一个晶片微加工至少两个栅极元件，其中每个栅极元件包括至少一个栅格元件; 金属化网格元素; 以及组装门元件，使得门元件的栅格元件交错，从而形成Bradbury Nielson门。