公开(公告)号：US5006707A

公开(公告)日：1991-04-09

申请号：US467479

申请日：1990-01-19

申请人： Nobufumi Mori ,  Masahiro Ohnishi ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

发明人： Nobufumi Mori ,  Masahiro Ohnishi ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

IPC分类号： G01T1/29 ,  H01J37/22 ,  H01J37/244

CPC分类号： H01J37/224 ,  G01T1/2014 ,  H01J2237/2443

摘要： Each of two-dimensional sensors is exposed to an electron beam, which has passed through a sample, in a vacuum in order to store the energy from the electron beam on the two-dimensional sensor, and is then exposed to light or heat in order to release the stored energy as emitted light. The emitted light is photoelectrically detected and an image signal is thereby obtained which represents an electron microscope image of the sample. Read-out conditions which are to be used when the emitted light is detected are determined from an electron beam exposure amount which was set when the energy from the electron beam was stored on each two-dimensional sensor. Signals representing the read-out conditions determined for the two-dimensional sensors are stored in a storage device so that it is clear which read-out conditions correspond to which two-dimensional sensor. When light emitted by a two-dimensional sensor is to be detected, a signal which represents the read-out conditions corresponding to the two-dimensional sensor is read from the storage device, and the read-out conditions are set.

摘要翻译： 每个二维传感器在真空中暴露于已经通过样品的电子束，以将来自电子束的能量存储在二维传感器上，然后依次暴露于光或热 释放存储的能量作为发射光。 发射的光被光电检测，并且由此获得表示样品的电子显微镜图像的图像信号。 当检测到发射光时使用的读出条件是根据在每个二维传感器上存储来自电子束的能量而设定的电子束曝光量来确定的。 表示为二维传感器确定的读出条件的信号被存储在存储装置中，使得清楚哪个读出条件对应于哪个二维传感器。 当要检测由二维传感器发出的光时，从存储装置中读取表示与二维传感器对应的读出条件的信号，并设定读出条件。

公开(公告)号：US4810886A

公开(公告)日：1989-03-07

申请号：US140989

申请日：1988-01-05

申请人： Nobufumi Mori ,  Takayuki Katoh ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

发明人： Nobufumi Mori ,  Takayuki Katoh ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

IPC分类号： H01J37/16 ,  H01J37/22 ,  H01J37/26 ,  H01J37/244

CPC分类号： H01J37/224 ,  H01J37/261

摘要： A transmission-type electron microscope using a sensitive two-dimensional sensor in its micrograph-taking section acts as a recording medium for an electron beam. When the sensor is illuminated with an electron beam, it stores the energy of the beam. When the sensor is subsequently illuminated with light, it releases the stored energy as light. In accordance with the invention, at least a portion of the micrograph-taking section includes a member for reducing the amount of x-rays produced or a member for absorbing x-rays to shield the sensor from x-rays.

摘要翻译： 在其显微摄影部分中使用敏感二维传感器的透射型电子显微镜用作电子束的记录介质。 当传感器用电子束照射时，它会存储光束的能量。 当传感器随后用光照射时，它将光能释放储存的能量。 根据本发明，显微摄影部分的至少一部分包括用于减少产生的X射线量的部件或用于吸收x射线的部件，以防止传感器从X射线屏蔽。

公开(公告)号：US4873440A

公开(公告)日：1989-10-10

申请号：US137691

申请日：1987-12-24

申请人： Nobufumi Mori ,  Takayuki Katoh ,  Tetsuo Oikawa ,  Yoshiyasu Harada ,  Junji Miyahara

发明人： Nobufumi Mori ,  Takayuki Katoh ,  Tetsuo Oikawa ,  Yoshiyasu Harada ,  Junji Miyahara

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/224

摘要： In a system for outputting an electron microscope image, a two-dimensional sensor for storing electron beam energy thereon is exposed to an electron beam passing through a specimen in a vacuum to have the electron beam energy stored on the two-dimensional sensor, and is then exposed to light or heat to release the stored energy as light emission. The emitted light is photoelectrically detected to obtain image signals, and an electron beam image of the specimen is output on the basis of the image signals. The specimen is divided into a plurality of divisions, and the storage of the electron beam energy is carried out for each of the divisions. The image signals obtained at the divisions are combined to form composite image signals that represent an overall specimen image formed by a group of the divisions, and the image signals at the divisions are corrected so that signal values of the boundary areas of adjacent divisions become approximately equal to each other.

摘要翻译： 在用于输出电子显微镜图像的系统中，用于在其上存储电子束能的二维传感器暴露于在真空中通过样本的电子束，以将电子束能量存储在二维传感器上，并且是 然后暴露于光或热以释放储存的能量作为发光。 发射的光被光电检测以获得图像信号，并且基于图像信号输出样本的电子束图像。 样本被分成多个部分，并且对于每个部分执行电子束能量的存储。 在分割处获得的图像信号被组合以形成表示由一组分割形成的总体样本图像的合成图像信号，并且校正分割处的图像信号，使得相邻分区的边界区域的信号值变为约 相等。

公开(公告)号：US4801801A

公开(公告)日：1989-01-31

申请号：US59501

申请日：1987-06-08

申请人： Nobufumi Mori ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

发明人： Nobufumi Mori ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

IPC分类号： H01J37/147 ,  H01J37/22 ,  H01J37/26 ,  G01N23/04

CPC分类号： H01J37/224 ,  H01J37/26

摘要： A transmission-type electron microscope comprises a lens system including an electron gun for producing an electron beam that is focused and directed to a specimen. The lens system forms a magnified electron optical image of the specimen from the electron beam transmitted through the specimen. A two-dimensional sensor is mounted in the plane in which the magnified image is formed, the sensor acting to store the energy of the electron beam impinging on it and to release the stored energy as light when illuminated with light or heated. An electron beam-deflecting means is mounted in the lens system and acting to tilt the focal plane in which the magnified lens image is formed, in such a way that a straight line extending from the main optical axis of the electron beam between the electron gun and the specimen does not interset the two-dimensional sensor.

摘要翻译： 透射型电子显微镜包括透镜系统，该透镜系统包括用于产生聚焦并指向样本的电子束的电子枪。 透镜系统从通过样品的电子束形成样品的放大电子光学图像。 二维传感器安装在其中形成放大图像的平面中，传感器用于存储电子束的能量照射在其上，并在用光照射或加热时将其作为光释放。 电子束偏转装置安装在透镜系统中，用于使形成放大透镜图像的焦平面倾斜，使得从电子枪的主光轴延伸的直线在电子枪 样品不会混合二维传感器。

公开(公告)号：US4651220A

公开(公告)日：1987-03-17

申请号：US786080

申请日：1985-10-10

申请人： Yuichi Hosoi ,  Junji Miyahara ,  Nobufumi Mori ,  Kenji Takahashi

发明人： Yuichi Hosoi ,  Junji Miyahara ,  Nobufumi Mori ,  Kenji Takahashi

IPC分类号： G01Q30/02 ,  G01Q30/04 ,  G01T1/29 ,  H01J37/22 ,  H04N1/10

CPC分类号： H01J37/224 ,  G01T1/2012

摘要： A stimulable phosphor sheet is exposed to an electron beam having passed through a specimen in an electron microscope to record a first magnified image of the specimen on the sheet. A stimulating energy is applied to the sheet for discharging light therefrom which represents the first magnified image. The light discharged from the image sensor is photoelectrically detected to reproduce the first magnified image which can be observed to attain a desired focused condition and/or a desired field on the electron microscope. Then, the same or another stimulable phosphor sheet is exposed to the electron beam to record a second magnified image of the specimen on the sheet, and the second magnified image is reproduced as a final image under the desired focused condition and/or with the desired field.

摘要翻译： 将可刺激的荧光体片暴露于通过电子显微镜中的样品的电子束，以将样品的第一放大图像记录在片材上。 刺激能量被施加到片材上，用于从其中排出代表第一放大图像的光。 从图像传感器排出的光被光电检测，以再现可以观察到的第一放大图像，以获得期望的聚焦条件和/或电子显微镜上所需的场。 然后，将相同或另一种可刺激的荧光粉片暴露于电子束，以将样品的第二放大图像记录在片材上，并且将第二放大图像作为最终图像在期望的聚焦条件和/或期望的条件下再现 领域。

公开(公告)号：US4922098A

公开(公告)日：1990-05-01

申请号：US259427

申请日：1988-10-11

申请人： Nobufumi Mori ,  Yuichi Hosoi ,  Junji Miyahara

发明人： Nobufumi Mori ,  Yuichi Hosoi ,  Junji Miyahara

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/224 ,  H01J37/26

摘要： An electron microscope has a two-dimensional sensor located at the image-formation plane. The two-dimensional sensor stores electron beam energy and emits light upon exposure to light or heat. The filament is located at a position displaced from the principal optical axis of the electron beam so that the image of the filament may not be recorded on the two-dimensional sensor. The two-dimensional sensor is, for example, made of stimulable phosphor.

摘要翻译： 电子显微镜具有位于图像形成平面处的二维传感器。 二维传感器存储电子束能量并在暴露于光或热时发光。 灯丝位于从电子束的主光轴偏移的位置，使得灯丝的图像可能不被记录在二维传感器上。 二维传感器例如由可激发的荧光体制成。

公开(公告)号：US4700071A

公开(公告)日：1987-10-13

申请号：US818663

申请日：1986-01-14

申请人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi ,  Junji Miyahara

发明人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi ,  Junji Miyahara

IPC分类号： H01J37/26 ,  G01Q30/02 ,  G01Q30/04 ,  G01T1/29 ,  H01J37/22 ,  H04N1/407 ,  G01N23/04 ,  H01J37/24

CPC分类号： H01J37/224 ,  G01T1/2014 ,  H04N1/4076

摘要： A two-dimensional image sensor such as a stimulable phosphor sheet is exposed under vacuum to an electron beam that has passed through a specimen to cause the two-dimensional image sensor to store the energy of the electron beam, then stimulating energy is applied to the two-dimensional image sensor for discharging light therefrom which represents the stored energy of the electron beam, and the light discharged from the two-dimensional image sensor is photoelectrically detected to produce an image signal. A reference image signal is also produced in a similar manner by exposing the two-dimensional image sensor to an electron beam that has not passed through the specimen. One of the first-mentioned image signal and the reference image signal is subtracted from the other per pixel to generate a difference signal, from which an electron microscope image of the specimen is reproduced.

摘要翻译： 诸如可刺激的荧光体片的二维图像传感器在真空下暴露于已经通过样本的电子束，以使二维图像传感器存储电子束的能量，然后将刺激能量施加到 二维图像传感器用于从其中排出表示电子束的存储能量的光，并且从二维图像传感器放出的光被光电检测以产生图像信号。 通过将二维图像传感器暴露于未通过样本的电子束，也以类似的方式产生参考图像信号。 从每个像素的另一个中减去首先提到的图像信号和参考图像信号之一，以产生差分信号，再现样本的电子显微镜图像。

公开(公告)号：US4694171A

公开(公告)日：1987-09-15

申请号：US801819

申请日：1985-11-26

申请人： Yuichi Hosoi ,  Nobufumi Mori ,  Kenji Takahashi ,  Junji Miyahara

发明人： Yuichi Hosoi ,  Nobufumi Mori ,  Kenji Takahashi ,  Junji Miyahara

IPC分类号： H01J37/26 ,  H01J37/22 ,  H01J37/21

CPC分类号： H01J37/224

摘要： A two-dimensional image sensor is exposed under vacuum to an electron beam having passed through a specimen, and instantaneous light emitted from the image sensor upon exposure to the electron beam is detected with an image intensifier to reproduce an image observed to attain a desired focused condition and/or a desired field. After the image has been focused by the operator while observing the image, the image sensor is exposed under vacuum to an electron beam having been transmitted through the specimen to store the energy of the electron beam representative of the image of the specimen on the image sensor. Then, stimulating energy is applied to the image sensor for discharging light therefrom which represents the stored energy of the electron beam. The light discharged from the image sensor is photoelectrically detected to reproduce the transmitted electron-beam image of the specimen as a final output image thereof under the desired focused condition and/or with said desired field.

摘要翻译： 将二维图像传感器在真空下暴露于已经通过样本的电子束，并且用图像增强器检测在暴露于电子束时从图像传感器发射的瞬时光，以再现观察到的图像以获得期望的聚焦 条件和/或期望的领域。 在观察图像之后，操作者对图像进行聚焦之后，图像传感器在真空下暴露于已经透过样本的电子束，以将代表样本图像的电子束的能量存储在图像传感器上 。 然后，刺激能量被施加到图像传感器，用于从其中排出代表电子束存储的能量的光。 从图像传感器放出的光被光电检测，以在期望的聚焦条件和/或所需的场下再现作为其最终输出图像的样本的透射电子束图像。

公开(公告)号：US4695725A

公开(公告)日：1987-09-22

申请号：US806466

申请日：1985-12-09

申请人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi ,  Junji Miyahara

发明人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi ,  Junji Miyahara

IPC分类号： G01Q30/02 ,  G01Q30/16 ,  H01J37/153 ,  H01J37/22 ,  H01J37/26 ,  H01J37/21

CPC分类号： H01J37/224 ,  H01J37/153 ,  H01J37/265

摘要： A two-dimensional image sensor is exposed under vacuum to an electron beam having passed through a specimen in an electron microscope to enable the image sensor to store the energy of the electron beam. Then, stimulating energy is applied to the image sensor to discharge the stored energy as light. The light discharged from the image sensor is photoelectrically detected to produce an image signal. A defocus value of the image is detected on the basis of the image signal. The image signal is also subject electrically to the Fourier transform to produce a converted image signal indicative of a ring pattern. The degree of one ring, the length of minor and major axes of the ring, and the angle of inclination of the major axis are computed from the converted image signal for computing currents to be fed to a stigmeter of the electron microscope to eliminate astigmatism.

摘要翻译： 将二维图像传感器在真空下暴露于通过电子显微镜中的样本的电子束，以使图像传感器能够存储电子束的能量。 然后，将刺激能量施加到图像传感器以将存储的能量作为光放电。 从图像传感器排出的光被光电检测以产生图像信号。 基于图像信号检测图像的散焦值。 图像信号也经电子对付傅立叶变换以产生表示环形图案的转换图像信号。 从转换的图像信号计算一个环的程度，环的小轴和长轴的长度以及长轴的倾斜角，以计算要供给到电子显微镜的测针的电流以消除散光。

公开(公告)号：US4803359A

公开(公告)日：1989-02-07

申请号：US610582

申请日：1984-05-15

申请人： Yuichi Hosoi ,  Junji Miyahara

发明人： Yuichi Hosoi ,  Junji Miyahara

IPC分类号： G01T1/20 ,  G01T1/29 ,  H01L27/146 ,  G03C5/16

CPC分类号： G01T1/2018 ,  G01T1/2012 ,  G01T1/2014 ,  H01L27/14609 ,  H01L27/14621 ,  H01L27/14643

摘要： A method for detecting radiation image which comprises steps of: causing a radiation image storage panel which comprises a phosphor layer containing a stimulable phosphor to absorb a radiation having passed through an object or radiated from an object; placing said radiation image storage panel and a photosensor composed of numerous photosensitive elements in regular and two-dimensional arrangement together in layers, and irradiating the panel with an electromagnetic wave to release the radiation energy stored in the panel as stimulated emission; and photoelectrically detecting the stimulated emission with said photosensor. A method for detecting radiation image using a radiation image detector which comprises a photosensitive member composed of numerous photosensitive elements and a phosphor layer containing a stimulable phosphor provided thereon is also disclosed.

摘要翻译： 一种用于检测辐射图像的方法，包括以下步骤：使包括含有可刺激磷光体的荧光体层的辐射图像存储面板吸收已经通过物体或从物体辐射的辐射; 将所述放射线图像存储面板和由多个光敏元件组成的光敏元件以规则和二维排列的方式一起放置在一起，并且用电磁波照射面板以释放作为受激发射存储在面板中的辐射能量; 并用所述光电传感器光电检测受激发射。 还公开了一种使用辐射图像检测器检测辐射图像的方法，所述辐射图像检测器包括由许多光敏元件组成的感光元件和包含其上提供的可激发荧光体的荧光体层。