摘要:
An apparatus for injecting constant quantitative chemicals which is capable of injecting a chemical solution into ultra pure water without generating particulate contamination, and furthermore, the injection interval of the chemical solution to the cleaning nozzle is controlled in units of seconds within a range of a few seconds to 10 or more seconds, and the switching of the type of chemical solution and the changeover to ultra pure water cleaning can be conducted in a short period of time of approximately 1 second.The apparatus includes a chemical solution injection system having a chemical solution retaining part for retaining the chemical solution, a control system for pressurization and depressurization for controlling the pressure of the chemical solution in the chemical solution retaining part at regular intervals, an injection control system which operates in concert with the control of the pressure of the chemical solution, and is structured so as to conduct the intermittent injection and instantaneous mixing function of the chemical solution from the chemical solution injection system to the ultra pure water flow path, and the injection stoppage function, and a chemical solution replenishment system which is structured so as to operate in concert with the control of the chemical solution and to be capable of replenishing the chemical solution in the chemical solution retaining part from a chemical solution source.
摘要:
A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译:可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间,并且可以使得提供较少气体的流体供应/排出系统 在使用多个阀的情况下的逆流。 本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。 驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。 构件“a”由磁性材料制成,并且在其与轴之间具有空间。 平行于轴设置的线圈通过电磁感应使组件“a”上下移动,并利用弹簧力来封闭和打开阀座与阀座之间的一部分。
摘要:
A tightening device comprises an upper plate, a lower plate disposed below the upper plate in parallel thereto, a nut rotating gear supported by the lower plate so as to be rotatable in a horizontal plane, and a spur gear provided on an underside of the upper plate and meshable with the nut rotating gear for rotating the nut rotating gear. The upper plate has a portion fittable to a flange of an externally threaded member for preventing the rotation of the threaded member, while the nut rotating gear has a portion fittable to a nut. With the nut manually tightened on the threaded member in advance, the flange fitting portion of the upper plate is fitted to the flange, the nut is fitted in the fitting portion of the nut rotating gear, and the spur gear is thereafter rotated, whereby the nut rotating gear is driven to tighten up the nut on the threaded member.
摘要:
A reference range of tightening torques is predetermined relative to the rotation angle of a threaded member as normally tightened. In tightening up a nut on an externally threaded member, the tightening torque is detected by a torque sensor every time the nut is rotated through a specified angle, and whether the tightening torque relative to the rotation angle is within the reference range is judged by a microcomputer. The result of judgment is indicated by a light-emitting diode and a buzzer.
摘要:
A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译:可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间,并且可以使得提供较少气体的流体供应/排出系统 在使用多个阀的情况下的逆流。 本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。 驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。 构件“a”由磁性材料制成,并且在其与轴之间具有空间。 平行于轴设置的线圈通过电磁感应使组件“a”上下移动,并利用弹簧力来封闭和打开阀座与阀座之间的一部分。
摘要:
Provided are a heating method making it possible that when a gas inside the body of a piping member, such as a pipe, is heated, the heating efficiency is improved; and a gas-heating piping member making it possible to perform such a heating method easily.A heat keeping member 4 which can transmit a gas to be heated is inserted to the inside of a piping member body 1 into which the gas can be passed in a state that the heat keeping member is brought into close contact with the inside, and further the piping member body 1 is heated from the outside thereof by means of a heating means 2.
摘要:
A method for testing leakage of a pipe passage employs a flow rate of gas used in testing supplied to the inside of a pipe passage undergoing testing hermetically sealed on one side while detecting flow rate with a flow measuring device and pressure with a pressure detector, and detecting temperature of the gas used, and inputting the detected values of pressure, flow rate and temperature into a computation treatment apparatus, and internal capacity VL of the pipe passage is computed as VL=(supplied flow rate Q×pressure applied time Δt)/(pressure rise value ΔP2), and next, the volume QL leaked from the pipe passage is computed as QL=(pressure drop value ΔP2′×internal capacity VL)/(pressure drop time Δt′).
摘要:
A pipe joint comprises a first joint member of synthetic resin having an annular recessed portion in an end face thereof, and a second joint member of synthetic resin having an annular ridge on an end face thereof. The ridge is fitted in the opening of the recessed portion, with a synthetic resin gasket fitted in the recessed portion. When the pipe joint is properly tightened up, the outer surface of the ridge of the second joint member is pressed against the inner surface of the recessed portion of the first joint member with the gasket interposed therebetween in intimate contact with the surfaces approximately over the entire areas thereof.
摘要:
A pipe joint 1 comprises a first joint member 2 of synthetic resin having an annular recessed portion 7 in an end face thereof, and a second joint member 3 of synthetic resin having an annular ridge 8 on an end face thereof. The ridge 8 is fitted in the opening of the recessed portion 7, with a synthetic resin gasket 4 fitted in the recessed portion 7. When the pipe joint 1 is properly tightened up, the outer surface of the ridge 8 of the second joint member 3 is pressed against the inner surface of the recessed portion 7 of the first joint member 2 with the gasket 4 interposed therebetween in intimate contact the surfaces approximately over the entire areas thereof, a portion 2d of the end face of the first joint member 2 positioned radially inwardly of the recessed portion is then in intimate contact with a portion 3d of the end face of the second joint member 3 positioned radially inwardly of the ridge approximately over the entire surface areas thereof, a portion 2e of the end face of the first joint member 2 positioned radially outwardly of the recessed portion is then in intimate contact with a portion 3e of the end face of the second joint member 3 positioned radially outwardly of the ridge approximately over the entire surface areas thereof.