METHOD OF PRODUCTION OF SIC SINGLE CRYSTAL
    3.
    发明申请
    METHOD OF PRODUCTION OF SIC SINGLE CRYSTAL 有权
    生产SIC单晶的方法

    公开(公告)号:US20120118221A1

    公开(公告)日:2012-05-17

    申请号:US13383604

    申请日:2009-07-17

    IPC分类号: C30B19/12

    摘要: The present invention provides a method of production of an SiC single crystal using the solution method which prevents the formation of defects due to seed tough, i.e., causing a seed crystal to touch the melt, and thereby causes growth of an Si single crystal reduced in defect density. The method of the present invention is a method of production of an SiC single crystal by causing an SiC seed crystal to touch a melt containing Si in a graphite crucible to thereby cause growth of the SiC single crystal on the SiC seed crystal, characterized by making the SiC seed crystal touch the melt, then making the melt rise in temperature once to a temperature higher than the temperature at the time of touch and also higher than the temperature for causing growth.

    摘要翻译: 本发明提供一种使用这种溶液法制造SiC单晶的方法,该方法防止由于种子韧性而形成的缺陷,即使晶种接触熔体,从而使Si单晶的生长减少 缺陷密度。 本发明的方法是通过使SiC晶种与石墨坩埚中含有Si的熔体接触从而使SiC单晶在SiC晶种上生长而制造SiC单晶的方法,其特征在于, SiC晶体接触熔体,然后使熔体温度上升一次至高于触摸时温度的温度,并且还高于引起生长的温度。

    Method of production of sic single crystal
    5.
    发明授权
    Method of production of sic single crystal 有权
    单晶生产方法

    公开(公告)号:US09587327B2

    公开(公告)日:2017-03-07

    申请号:US13383604

    申请日:2009-07-17

    摘要: A method of production of a SiC single crystal uses the solution method to prevent the formation of defects due to seed touch, i.e., causing a seed crystal to touch the melt, and thereby cause growth of a SiC single crystal reduced in defect density. According to the method, a SiC seed crystal touches a melt containing Si in a graphite crucible to thereby cause growth of the SiC single crystal on the SiC seed crystal. The method includes making the SiC seed crystal touch the melt, and then making the melt rise in temperature once to a temperature higher than the temperature at the time of touch and also higher than the temperature for causing growth.

    摘要翻译: SiC单晶的制造方法使用溶液法防止由于种子接触引起的缺陷的形成,即使晶种接触熔融物,从而导致SiC单晶的生长缺陷密度降低。 根据该方法,SiC晶种在石墨坩埚中接触含有Si的熔融物,从而使SiC单晶在SiC晶种上生长。 该方法包括使SiC晶种接触熔体,然后使熔体升温一度至比接触时温度高的温度,并且高于引起生长的温度。