公开(公告)号：US06311506B1

公开(公告)日：2001-11-06

申请号：US09348459

申请日：1999-07-07

申请人： Norio Takahashi ,  Tsutomu Hatanaka ,  Toshiyuki Kamei

发明人： Norio Takahashi ,  Tsutomu Hatanaka ,  Toshiyuki Kamei

IPC分类号： F25B4106

CPC分类号： F25B41/04 ,  F25B2700/197 ,  F25B2700/21171

摘要： A control unit is disclosed for controlling a refrigerating machine in such a way that a refrigerating power exceeding the required performance is secured while the control unit has a function of bypassing hot gas by means of a hot gas bypass line. A temperature-responsive valve is mounted in the hot gas bypass line in addition to a pressure regulating valve. If a preset temperature Tr of a brine becomes equal to or higher than a given temperature (0° C.), the temperature-responsive valve opens the bypass line. If the preset temperature Tr becomes lower than the given temperature, the temperature-responsive valve closes the bypass line.

摘要翻译： 公开了一种用于控制冷冻机的控制单元，使得在控制单元具有通过热气旁通管旁路热气的功能的同时确保超过所需性能的制冷功率。 温度响应阀除了压力调节阀之外还安装在热气旁通管路中。 如果盐水的预设温度Tr等于或高于给定温度（0°C），则温度响应阀打开旁路管路。 如果预设温度Tr低于给定温度，则温度响应阀关闭旁路管路。

公开(公告)号：US6148909A

公开(公告)日：2000-11-21

申请号：US236371

申请日：1999-01-25

申请人： Masashi Osanai ,  Shunsuke Miyamoto ,  Tomohisa Sato ,  Hiroaki Takechi ,  Tsutomu Hatanaka ,  Norio Takahashi ,  Toshiyuki Kamei ,  Takumi Sugihara ,  Isao Shibata ,  Hironori Akiba

发明人： Masashi Osanai ,  Shunsuke Miyamoto ,  Tomohisa Sato ,  Hiroaki Takechi ,  Tsutomu Hatanaka ,  Norio Takahashi ,  Toshiyuki Kamei ,  Takumi Sugihara ,  Isao Shibata ,  Hironori Akiba

IPC分类号： F04B49/06 ,  F04B41/00 ,  F25B1/00 ,  G05D23/00 ,  G05D23/19 ,  F25B29/00

CPC分类号： G05D23/1919

摘要： A temperature control system which performs control of an object whose temperature is to be controlled as accurately as possible. The system comprises: a chiller located in a fluid circulating and supplying system, for cooling a thermal fluid returning from a vacuum chamber, a first flow control valve located in the fluid circulating and supplying system in a position between the chiller and the vacuum chamber, a bypass passage for splitting and supplying thermal fluid returning from the vacuum chamber to a position between the first flow control valve and the vacuum chamber, before it reaches the chiller, a second flow control valve located in the bypass passage, and a halogen lamp heater located in the fluid circulating and supplying system in a position between a confluence point of the bypass passage and the vacuum chamber, for adjusting the temperature of the thermal fluid passing therethrough to a set temperature.

摘要翻译： 一种温度控制系统，其对要温度控制的物体尽可能准确地进行控制。 该系统包括：位于流体循环供应系统中的冷却器，用于冷却从真空室返回的热流体;位于冷却器和真空室之间位置的流体循环供应系统中的第一流量控制阀， 旁通通道，用于将从真空室返回的热流体分流并供应到第一流量控制阀和真空室之间的位置，到达冷却器之前，位于旁路通道中的第二流量控制阀和卤素灯加热器 位于流体循环和供给系统中的位于旁路通道的汇合点和真空室之间的位置，用于将通过其的热流体的温度调节到设定温度。

公开(公告)号：US20140014644A1

公开(公告)日：2014-01-16

申请号：US14008373

申请日：2012-03-28

申请人： Hironori Akiba ,  Kazuhiko Kubota ,  Tsutomu Hatanaka ,  Yuichi Sakai ,  Akira Yonemizu ,  Kazuhiko Ooshima

发明人： Hironori Akiba ,  Kazuhiko Kubota ,  Tsutomu Hatanaka ,  Yuichi Sakai ,  Akira Yonemizu ,  Kazuhiko Ooshima

IPC分类号： H01L21/02

CPC分类号： H01L21/02002 ,  H01L21/67103 ,  H01L21/68728 ,  H01L21/68785 ,  H05B3/143

摘要： A heating device includes a substrate in a form of a face plate that is positioned above a base plate, on which a wafer is placed, and to which a film heater for heating wafer is provided, columns that are vertically provided between the base plate and the face plate and support the face plate, and tension members that pull the face plate toward the base plate. The columns and the tension members are positioned to support or pull at least a part of the face plate corresponding to a placement region of the wafer. Each of the tension members includes a shaft having an upper end locked by the face plate and a lower end penetrating the base plate and a coil spring that is positioned on the base plate and biases the lower end of the shaft downward.

摘要翻译： 加热装置包括位于基板上方的面板形状的基板，晶片被放置在基板上，并且设置有用于加热晶片的薄膜加热器，垂直设置在基板和 面板和支撑面板，以及将面板拉向底板的张紧构件。 柱和张紧构件定位成支撑或拉动对应于晶片的放置区域的面板的至少一部分。 每个张力构件包括具有被面板锁定的上端和穿过基板的下端的轴，以及定位在基板上的螺旋弹簧，并且将轴的下端偏压到下方。

公开(公告)号：US20140014643A1

公开(公告)日：2014-01-16

申请号：US14008287

申请日：2012-03-28

申请人： Hironori Akiba ,  Kazuhiko Kubota ,  Tsutomu Hatanaka ,  Yuichi Sakai ,  Akira Yonemizu ,  Kazuhiko Ooshima

发明人： Hironori Akiba ,  Kazuhiko Kubota ,  Tsutomu Hatanaka ,  Yuichi Sakai ,  Akira Yonemizu ,  Kazuhiko Ooshima

IPC分类号： H01L21/67

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H01L21/68728 ,  H01L21/68785

摘要： A heating device includes a base plate and a face plate that is provided above the base plate and on which a wafer is placed. The face plate includes an aluminum substrate, a film heater that is provided to the aluminum substrate and heats the wafer, and a gap ball that is disposed on the aluminum substrate and interposed between the aluminum substrate and the wafer. The aluminum substrate is provided with a second attachment hole into which the gap ball is press-fitted. The gap ball is held only by an inner wall of the second attachment hole by being press-fitted.

摘要翻译： 加热装置包括基板和面板，其设置在基板上方并且放置有晶片。 面板包括铝基板，设置在铝基板上并加热晶片的薄膜加热器，以及设置在铝基板上且介于铝基板和晶片之间的间隙球。 铝基板设置有第二安装孔，间隙球被压配入其中。 间隙球仅由第二安装孔的内壁通过压配而保持。

公开(公告)号：US06592645B1

公开(公告)日：2003-07-15

申请号：US09889490

申请日：2001-07-18

申请人： Hideto Mizutani ,  Minoru Yoneda ,  Toshihiro Sugaya ,  Hiroyoshi Urasumi ,  Chiyo Honda ,  Hiroshi Nakao ,  Tsutomu Hatanaka ,  Shinji Ohgama ,  Kiyoshi Fukai ,  Kazuhiko Nagano ,  Shigefumi Kamisaka ,  Kazunobu Abe

发明人： Hideto Mizutani ,  Minoru Yoneda ,  Toshihiro Sugaya ,  Hiroyoshi Urasumi ,  Chiyo Honda ,  Hiroshi Nakao ,  Tsutomu Hatanaka ,  Shinji Ohgama ,  Kiyoshi Fukai ,  Kazuhiko Nagano ,  Shigefumi Kamisaka ,  Kazunobu Abe

IPC分类号： B22F918

CPC分类号： H01G4/008 ,  B22F9/22 ,  B22F2998/10 ,  B22F2999/00 ,  B22F9/026

摘要： A process for the production of fine powder of metallic nickel which comprises a first step of dissolving nickel carbonate and/or nickel hydroxide in aqueous ammonia or in an aqueous solution of ammonia and at least one selected from the group consisting of ammonium carbonate, ammonium hydrogencarbonate, a carbonate of an alkali metal and a hydrogencarbonate of an alkali metal to prepare an aqueous solution of a nickel salt; converting the aqueous solution of a nickel salt to a W/O emulsion, and then removing volatile components including ammonia from the droplets to form precipitates of nickel carbonate in the droplets, thereby providing fine spherical particles of nickel carbonate; and a second step of heating the particles of nickel carbonate in the presence of a fusion preventive agent that is a compound of at least one element selected from the group consisting of alkaline earth elements, aluminum, silicon and rare earth elements in an atmosphere of hydrogen, thereby reducing the nickel carbonate to metallic nickel.

摘要翻译： 一种制造金属镍微细粉末的方法，该方法包括将碳酸镍和/或氢氧化镍溶解在氨水或氨水溶液中的至少一种和碳酸铵，碳酸氢铵 ，碱金属的碳酸盐和碱金属的碳酸氢盐以制备镍盐水溶液; 将镍盐水溶液转化成W / O乳液，然后从液滴中除去包括氨在内的挥发性成分，从而在液滴中形成碳酸镍的沉淀物，由此提供细小的碳酸镍球形颗粒; 在第二步骤中，在氢气气氛中，在选自碱土元素，铝，硅和稀土元素中的至少一种元素的化合物的熔融预防剂存在下，加热碳酸镍颗粒 ，从而将碳酸镍还原为金属镍。

公开(公告)号：US06197273B1

公开(公告)日：2001-03-06

申请号：US09463021

申请日：2000-03-22

申请人： Kazuhiko Nagano ,  Kazunobu Abe ,  Shigefumi Kamisaka ,  Kiyoshi Fukai ,  Tsutomu Hatanaka ,  Shinji Ohgama ,  Hiroshi Nakao ,  Minoru Yoneda ,  Hideto Mizutani

发明人： Kazuhiko Nagano ,  Kazunobu Abe ,  Shigefumi Kamisaka ,  Kiyoshi Fukai ,  Tsutomu Hatanaka ,  Shinji Ohgama ,  Hiroshi Nakao ,  Minoru Yoneda ,  Hideto Mizutani

IPC分类号： C01B3124

CPC分类号： C01G53/06 ,  B01J23/70 ,  B01J37/00 ,  B22F9/026 ,  C01B13/328 ,  C01G3/00 ,  C01G3/02 ,  C01G51/04 ,  C01G51/06 ,  C01G53/04 ,  C01P2002/02 ,  C01P2002/72 ,  C01P2004/03 ,  C01P2004/32 ,  C01P2004/51 ,  C01P2004/61 ,  C01P2004/62

摘要： The invention provides a process for production of fine spherical particles of a carbonate or a hydroxide of nickel, cobalt or copper which comprises: dissolving a carbonate or a hydroxide of nickel, cobalt or copper having the general formula (I) M(CO3)x/2.(OH)y wherein M represents Ni, Co or Cu, and x and y are numerals satisfying the followings: 0≦x≦2, 0≦y≦2 and x+y=2, in aqueous ammonia, converting the resulting solution to a W/O emulsion containing droplets of the solution in a non-aqueous medium, and then removing volatile components including ammonia from within the droplets, thereby precipitating a basic carbonate or a hydroxide of a metal selected from nickel, cobalt and copperin the droplets. The fine spherical particles of a carbonate or a hydroxide of nickel, cobalt or copper obtained according to the process of the invention are especially useful as a precursor for the manufacture of uniform, fine spherical particles of nickel, copper or cobalt metal, as well as useful as themselves as a catalyst for use in organic synthesis, a carrier, a pigment, a filler or a glaze.

摘要翻译： 本发明提供一种生产镍，钴或铜的碳酸盐或氢氧化物的细球形颗粒的方法，其包括：将通式（I）的其中M表示Ni的镍，钴或铜的碳酸盐或氢氧化物溶解， Co或Cu，x和y是在氨水中将满足以下条件的数字：0 <= x <= 2,0 <= y <= 2和x + y = 2，将所得溶液转化成W / O乳液 在非水介质中含有溶液的液滴，然后从液滴内除去包括氨的挥发性组分，从而沉淀出液滴中选自镍，钴和铜的金属的碱性碳酸盐或氢氧化物。微球形颗粒 根据本发明的方法获得的镍，钴或铜的碳酸盐或氢氧化物特别可用作制造镍，铜或钴金属的均匀的细小球形颗粒的前体，并且作为其自身可用作 用于有机合成的催化剂，载体，颜料，填料或釉料。