公开(公告)号：US20230288258A1

公开(公告)日：2023-09-14

申请号：US18121446

申请日：2023-03-14

Applicant: Obsidian Sensors, Inc.

Inventor： John HONG ,  Bing WEN ,  Sean ANDREWS ,  Heesun SHIN ,  Edward CHAN ,  Tallis CHANG ,  Ming YING

IPC: G01J3/45 ,  G01J3/02

CPC classification number: G01J3/45 ,  G01J3/0297 ,  G02B6/2935

Abstract: Systems and methods for spectrometry are disclosed. In some embodiments, the system comprises a Fourier Transform Spectrometer (FTS) comprising a waveguide and a delay element. In some embodiments, the method comprises determining a power spectral density of an input optical signal via the FTS.

公开(公告)号：US20240379694A1

公开(公告)日：2024-11-14

申请号：US18689802

申请日：2022-09-07

Applicant: OBSIDIAN SENSORS, INC.

Inventor： Heesun SHIN ,  Bing WEN ,  Edward CHAN ,  Sean ANDREWS ,  Tallis CHANG ,  John HONG

IPC: H01L27/146

Abstract: Electronic devices comprising pixels for sensing, methods for operating the electronic devices, and methods for manufacturing the electronic devices are disclosed. In some embodiments, the electronic devices comprise hinges for supporting the pixels. In some embodiments, the electronic devices are configured to provide a bias voltage to the pixels.

公开(公告)号：US20230061174A1

公开(公告)日：2023-03-02

申请号：US17896978

申请日：2022-08-26

Applicant: Obsidian Sensors, Inc.

Inventor： John HONG ,  Tallis CHANG ,  Bing WEN ,  Edward CHAN ,  Sean ANDREWS ,  Heesun SHIN

IPC: B81B7/02 ,  B81C1/00

Abstract: Microelectromechanical system (MEMS) devices, methods of operating the MEMS device, and methods of manufacturing the MEMS device are disclosed. In some embodiments, the MEMS device includes a glass substrate; an electrode on the glass substrate; a hinge mechanically coupled to the electrode; a membrane mirror mechanically coupled to the hinge; a TFT on the glass substrate and electrically coupled to the electrode; and a control circuit comprising: a multiplexer configured to turn on or turn off the TFT; and a drive source configured to provide a drive signal for charging the electrode through the TFT. An amplitude of the drive signal corresponds to an amount of charge, and the amount of charge generates an electrostatic force for actuating the hinge and a portion of the membrane mirror mechanically coupled to the hinge. In some embodiments, the MEMS devices comprise a charge transfer circuit for providing the amount of charge.

公开(公告)号：US20210294093A1

公开(公告)日：2021-09-23

申请号：US17207433

申请日：2021-03-19

Applicant: Obsidian Sensors, Inc.

Inventor： John HONG ,  Tallis CHANG ,  Bing WEN ,  Edward CHAN ,  Sean ANDREWS ,  Heesun SHIN

IPC: G02B26/08 ,  B81B7/02 ,  B81C1/00

Abstract: Microelectromechanical system (MEMS) devices, methods of operating the MEMS device, and methods of manufacturing the MEMS device are disclosed. In some embodiments, the MEMS device includes a glass substrate; an electrode on the glass substrate; a hinge mechanically coupled to the electrode; a membrane mirror mechanically coupled to the hinge; a TFT on the glass substrate and electrically coupled to the electrode; and a control circuit comprising: a multiplexer configured to turn on or turn off the TFT; and a drive source configured to provide a drive signal for charging the electrode through the TFT. An amplitude of the drive signal corresponds to an amount of charge, and the amount of charge generates an electrostatic force for actuating the hinge and a portion of the membrane mirror mechanically coupled to the hinge.

公开(公告)号：US20250123444A1

公开(公告)日：2025-04-17

申请号：US18915202

申请日：2024-10-14

Applicant: Obsidian Sensors, Inc.

Inventor： Karl JOHNSON ,  John HONG ,  Bing WEN ,  Sean ANDREWS ,  Heesun SHIN ,  Edward CHAN ,  Tallis CHANG

IPC: G02B6/35

Abstract: An integrated MEMS waveguide modulator, including: a static, non-suspended waveguide to guide light traveling through the waveguide; and a dielectric slab movable into and out of an evanescent field surrounding the waveguide using an actuation mechanism, wherein the dielectric slab is movable between a first position that is farthest away possible for the slab from the waveguide and a second position that is closest possible for the slab from the waveguide, wherein dispersion characteristic of the light is controlled by moving the dielectric slab from an unactuated mode that is at the first position to an actuated mode that is at the second position, and wherein the dielectric slab is layered to include non-uniform refractive index profile.

公开(公告)号：US20240359974A1

公开(公告)日：2024-10-31

申请号：US18750995

申请日：2024-06-21

Applicant: OBSIDIAN SENSORS, INC.

Inventor： John HONG ,  Tallis CHANG ,  Bing WEN ,  Edward CHAN ,  Sean ANDREWS ,  Heesun SHIN

IPC: B81C1/00

CPC classification number: B81C1/00373 ,  B81C1/00158

Abstract: Membrane fabrication including: depositing a bottom Molybdenum (Mo) layer; depositing a polyimide (PI) layer and defining a first release hole; curing the PI layer; depositing a top Mo layer; and defining and etching a second release hole within the first release hole.

公开(公告)号：US20230036855A1

公开(公告)日：2023-02-02

申请号：US17815895

申请日：2022-07-28

Applicant: Obsidian Sensors, Inc.

Inventor： Heesun SHIN ,  John HONG ,  Tallis CHANG ,  Bing WEN

IPC: H01L27/12 ,  H01L27/10 ,  B81B7/02 ,  H01L27/01 ,  H01L27/13

Abstract: Circuitries for controlling a power consuming device are disclosed. Methods for operating the circuitries and manufacturing the circuitries are also disclosed. In some embodiments, the circuit comprises a first thin-film transistor (TFT), a second TFT, and a storage capacitor. The first TFT is configured to output a current to a power consuming device. The second TFT is configured to provide a control voltage to the first TFT for controlling an amount of the current. The storage capacitor is configured to store the control voltage.