MEMS sensors and systems
    1.
    发明授权

    公开(公告)号:US11624657B2

    公开(公告)日:2023-04-11

    申请号:US17267789

    申请日:2019-08-09

    摘要: Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems for transmitting and detecting radiation. The devices and methods described herein are applicable to terahertz radiation. In some embodiments, the MEMS devices and systems are used in imaging applications. In some embodiments, a microelectromechanical system comprises a glass substrate configured to pass radiation from a first surface of the glass substrate through a second surface of the glass substrate, the glass substrate comprising TFT circuitry; a lid comprising a surface; spacers separating the lid and glass substrate; a cavity defined by the spacers, surface of the lid, and second surface of the glass substrate; a pixel in the cavity, positioned on the second surface of the glass substrate, electrically coupled to the TFT circuitry, and comprising an absorber to detect the radiation; and a reflector to direct the radiation to the absorbers and positioned on the lid.

    THIN-FILM TRANSISTOR CONTROL CIRCUITS

    公开(公告)号:US20230036855A1

    公开(公告)日:2023-02-02

    申请号:US17815895

    申请日:2022-07-28

    摘要: Circuitries for controlling a power consuming device are disclosed. Methods for operating the circuitries and manufacturing the circuitries are also disclosed. In some embodiments, the circuit comprises a first thin-film transistor (TFT), a second TFT, and a storage capacitor. The first TFT is configured to output a current to a power consuming device. The second TFT is configured to provide a control voltage to the first TFT for controlling an amount of the current. The storage capacitor is configured to store the control voltage.

    Readout circuits and methods
    3.
    发明授权

    公开(公告)号:US11555744B2

    公开(公告)日:2023-01-17

    申请号:US17048046

    申请日:2019-04-17

    摘要: Methods of sensor readout and calibration and circuits for performing the methods are disclosed. In some embodiments, the methods include driving an active sensor at a voltage. In some embodiments, the methods include use of a calibration sensor, and the circuits include the calibration sensor. In some embodiments, the methods include use of a calibration current source and circuits include the calibration current source. In some embodiments, a sensor circuit includes a Sigma-Delta ADC. In some embodiments, a column of sensors is readout using first and second readout circuits during a same row time.

    Generating high resolution images

    公开(公告)号:US09936129B2

    公开(公告)日:2018-04-03

    申请号:US15183528

    申请日:2016-06-15

    IPC分类号: H04N5/232 H04N5/225 H04N5/262

    摘要: Techniques are disclosed for generating a high resolution image from a plurality of images captured from a plurality of sensors. The pixels in one sensor have at least one of different size, shape, or orientation than pixels in another sensor. The difference in size, shape, or orientation of the pixels and the interconnection of pixels on respective sensors provides a high level of certainty that there will be sufficient difference in the captured images, with limited loss in image content, to generate a relatively high resolution image from the images captured by the respective sensors.

    CROSSOVERS FOR VACUUM PACKAGING
    7.
    发明申请

    公开(公告)号:US20220411261A1

    公开(公告)日:2022-12-29

    申请号:US17801230

    申请日:2021-02-19

    IPC分类号: B81C1/00 B81B7/00

    摘要: In some embodiments, electromechanical systems including a semiconductor layer that has a planar surface and includes conductive and adjacent non-conductive regions and a hermetic seal applied above the planar surface and methods of manufacturing the systems are disclosed. In some embodiments, electromechanical devices that include first and second planar semiconductor layers are disclosed. Each of the semiconductor layers includes conductive regions, and at least one conductive region from each of the layers is electrically coupled to each other. Methods of manufacturing the electromechanical devices are also disclosed.

    MEMS SENSORS AND SYSTEMS
    9.
    发明申请

    公开(公告)号:US20210164839A1

    公开(公告)日:2021-06-03

    申请号:US17267789

    申请日:2019-08-09

    IPC分类号: G01J5/02 G01J5/20 B81B3/00

    摘要: Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems for transmitting and detecting radiation. The devices and methods described herein are applicable to terahertz radiation. In some embodiments, the MEMS devices and systems are used in imaging applications. In some embodiments, a microelectromechanical system comprises a glass substrate configured to pass radiation from a first surface of the glass substrate through a second surface of the glass substrate, the glass substrate comprising TFT circuitry; a lid comprising a surface; spacers separating the lid and glass substrate; a cavity defined by the spacers, surface of the lid, and second surface of the glass substrate; a pixel in the cavity, positioned on the second surface of the glass substrate, electrically coupled to the TFT circuitry, and comprising an absorber to detect the radiation; and a reflector to direct the radiation to the absorbers and positioned on the lid.

    READOUT CIRCUITS AND METHODS
    10.
    发明申请

    公开(公告)号:US20210102844A1

    公开(公告)日:2021-04-08

    申请号:US17048046

    申请日:2019-04-17

    摘要: Methods of sensor readout and calibration and circuits for performing the methods are disclosed. In some embodiments, the methods include driving an active sensor at a voltage. In some embodiments, the methods include use of a calibration sensor, and the circuits include the calibration sensor. In some embodiments, the methods include use of a calibration current source and circuits include the calibration current source. In some embodiments, a sensor circuit includes a Sigma-Delta ADC. In some embodiments, a column of sensors is readout using first and second readout circuits during a same row time.