THIN-FILM TRANSISTOR CONTROL CIRCUITS

    公开(公告)号:US20230036855A1

    公开(公告)日:2023-02-02

    申请号:US17815895

    申请日:2022-07-28

    摘要: Circuitries for controlling a power consuming device are disclosed. Methods for operating the circuitries and manufacturing the circuitries are also disclosed. In some embodiments, the circuit comprises a first thin-film transistor (TFT), a second TFT, and a storage capacitor. The first TFT is configured to output a current to a power consuming device. The second TFT is configured to provide a control voltage to the first TFT for controlling an amount of the current. The storage capacitor is configured to store the control voltage.

    CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES

    公开(公告)号:US20230061174A1

    公开(公告)日:2023-03-02

    申请号:US17896978

    申请日:2022-08-26

    IPC分类号: B81B7/02 B81C1/00

    摘要: Microelectromechanical system (MEMS) devices, methods of operating the MEMS device, and methods of manufacturing the MEMS device are disclosed. In some embodiments, the MEMS device includes a glass substrate; an electrode on the glass substrate; a hinge mechanically coupled to the electrode; a membrane mirror mechanically coupled to the hinge; a TFT on the glass substrate and electrically coupled to the electrode; and a control circuit comprising: a multiplexer configured to turn on or turn off the TFT; and a drive source configured to provide a drive signal for charging the electrode through the TFT. An amplitude of the drive signal corresponds to an amount of charge, and the amount of charge generates an electrostatic force for actuating the hinge and a portion of the membrane mirror mechanically coupled to the hinge. In some embodiments, the MEMS devices comprise a charge transfer circuit for providing the amount of charge.

    ACTIVE MATRIX PROGRAMMABLE MIRROR

    公开(公告)号:US20210294093A1

    公开(公告)日:2021-09-23

    申请号:US17207433

    申请日:2021-03-19

    IPC分类号: G02B26/08 B81B7/02 B81C1/00

    摘要: Microelectromechanical system (MEMS) devices, methods of operating the MEMS device, and methods of manufacturing the MEMS device are disclosed. In some embodiments, the MEMS device includes a glass substrate; an electrode on the glass substrate; a hinge mechanically coupled to the electrode; a membrane mirror mechanically coupled to the hinge; a TFT on the glass substrate and electrically coupled to the electrode; and a control circuit comprising: a multiplexer configured to turn on or turn off the TFT; and a drive source configured to provide a drive signal for charging the electrode through the TFT. An amplitude of the drive signal corresponds to an amount of charge, and the amount of charge generates an electrostatic force for actuating the hinge and a portion of the membrane mirror mechanically coupled to the hinge.

    CROSSOVERS FOR VACUUM PACKAGING
    5.
    发明申请

    公开(公告)号:US20220411261A1

    公开(公告)日:2022-12-29

    申请号:US17801230

    申请日:2021-02-19

    IPC分类号: B81C1/00 B81B7/00

    摘要: In some embodiments, electromechanical systems including a semiconductor layer that has a planar surface and includes conductive and adjacent non-conductive regions and a hermetic seal applied above the planar surface and methods of manufacturing the systems are disclosed. In some embodiments, electromechanical devices that include first and second planar semiconductor layers are disclosed. Each of the semiconductor layers includes conductive regions, and at least one conductive region from each of the layers is electrically coupled to each other. Methods of manufacturing the electromechanical devices are also disclosed.

    MEMS SENSORS AND SYSTEMS
    7.
    发明申请

    公开(公告)号:US20210164839A1

    公开(公告)日:2021-06-03

    申请号:US17267789

    申请日:2019-08-09

    IPC分类号: G01J5/02 G01J5/20 B81B3/00

    摘要: Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems for transmitting and detecting radiation. The devices and methods described herein are applicable to terahertz radiation. In some embodiments, the MEMS devices and systems are used in imaging applications. In some embodiments, a microelectromechanical system comprises a glass substrate configured to pass radiation from a first surface of the glass substrate through a second surface of the glass substrate, the glass substrate comprising TFT circuitry; a lid comprising a surface; spacers separating the lid and glass substrate; a cavity defined by the spacers, surface of the lid, and second surface of the glass substrate; a pixel in the cavity, positioned on the second surface of the glass substrate, electrically coupled to the TFT circuitry, and comprising an absorber to detect the radiation; and a reflector to direct the radiation to the absorbers and positioned on the lid.

    READOUT CIRCUITS AND METHODS
    8.
    发明申请

    公开(公告)号:US20210102844A1

    公开(公告)日:2021-04-08

    申请号:US17048046

    申请日:2019-04-17

    摘要: Methods of sensor readout and calibration and circuits for performing the methods are disclosed. In some embodiments, the methods include driving an active sensor at a voltage. In some embodiments, the methods include use of a calibration sensor, and the circuits include the calibration sensor. In some embodiments, the methods include use of a calibration current source and circuits include the calibration current source. In some embodiments, a sensor circuit includes a Sigma-Delta ADC. In some embodiments, a column of sensors is readout using first and second readout circuits during a same row time.