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公开(公告)号:US07105074B2
公开(公告)日:2006-09-12
申请号:US10202279
申请日:2002-07-22
申请人: Osamu Tamada , Tsuyoshi Mitsuhashi , Minobu Matsunaga , Katsushi Yoshioka , Kenji Sugimoto , Kaoru Aoki , Moritaka Yano , Satoshi Yamamoto , Masakazu Sanada , Takashi Nagao , Mitsumasa Kodama
发明人: Osamu Tamada , Tsuyoshi Mitsuhashi , Minobu Matsunaga , Katsushi Yoshioka , Kenji Sugimoto , Kaoru Aoki , Moritaka Yano , Satoshi Yamamoto , Masakazu Sanada , Takashi Nagao , Mitsumasa Kodama
CPC分类号: H01L21/6715 , H01L21/31133
摘要: A substrate treating apparatus is provided for eliminating wasteful consumption of a treating solution in a treating mode in which the treating solution is delivered in a strip form to a substrate from a treating solution delivery nozzle sweeping over the substrate. In a first aspect of the invention, collecting vessels are arranged around a developing cup surrounding a wafer supported by a wafer holder. The collecting vessels collect part of a developer delivered from a discharge opening of a developer delivery nozzle outwardly of a surface of the wafer. In a second aspect of the invention, collecting vessels are arranged below a developer delivery nozzle, with collecting openings of the collecting vessels opposed to a discharge opening or openings of the delivery nozzle. The collecting vessels are moved longitudinally of the discharge openings according to a position of the developer delivery nozzle relative to the wafer.
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公开(公告)号:US06832863B2
公开(公告)日:2004-12-21
申请号:US10458719
申请日:2003-06-09
申请人: Kenji Sugimoto , Minobu Matsunaga , Masakazu Sanada , Katsushi Yoshioka , Kaoru Aoki , Moritaka Yano , Satoshi Yamamoto , Tsuyoshi Mitsuhashi , Takashi Nagao , Mitsumasa Kodama
发明人: Kenji Sugimoto , Minobu Matsunaga , Masakazu Sanada , Katsushi Yoshioka , Kaoru Aoki , Moritaka Yano , Satoshi Yamamoto , Tsuyoshi Mitsuhashi , Takashi Nagao , Mitsumasa Kodama
IPC分类号: G03D500
CPC分类号: H01L21/67173 , G03F7/70691 , H01L21/67178 , H01L21/67184 , H01L21/67276 , Y10S414/135 , Y10S414/14
摘要: A series of substrate transport paths for transporting substrates is arranged on upper and lower stories. Substrates are transferable between the substrate transport path on the first story and the substrate transport path on the second story. The paths include a going-only path for transporting the substrates forward, and a return-only path for transporting the substrates in the opposite direction, these paths being arranged on the upper and lower stories. An indexer connects one end of the substrate transport path on one story to one end of the substrate transport path on the other story. An interface connects the other end of the substrate transport path on one story to the other end of the substrate transport path on the other story. This construction efficiently reduces a waiting time due to interference between the substrates transported along the going-only path and the substrates transported along the return-only path.
摘要翻译: 用于传送基板的一系列基板传送路径被布置在上层和下层。 基底可以在第一层的基底输送路径和第二层的基底输送路径之间转移。 这些路径包括用于向前传送基板的唯一路径,以及用于沿相反方向传送基板的返回路径,这些路径布置在上部和下部故事物上。 分度器将另一个故事的基底传送路径的一端连接到基底传送路径的一端。 一个界面将一个故事的基板传送路径的另一端连接到另一个故事的基板传送路径的另一端。 这种构造有效地减少了由沿着仅路径传送的基板与沿着返回路径传送的基板之间的干涉导致的等待时间。
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公开(公告)号:US06558053B2
公开(公告)日:2003-05-06
申请号:US10125229
申请日:2002-04-18
申请人: Kazuhito Shigemori , Masakazu Sanada , Minobu Matsunaga , Katsushi Yoshioka , Kenji Sugimoto , Kaoru Aoki , Moritaka Yano , Satoshi Yamamoto , Tsuyoshi Mitsuhashi , Takashi Nagao , Mitsumasa Kodama , Yukihiko Inagaki , Yoshihisa Yamada
发明人: Kazuhito Shigemori , Masakazu Sanada , Minobu Matsunaga , Katsushi Yoshioka , Kenji Sugimoto , Kaoru Aoki , Moritaka Yano , Satoshi Yamamoto , Tsuyoshi Mitsuhashi , Takashi Nagao , Mitsumasa Kodama , Yukihiko Inagaki , Yoshihisa Yamada
IPC分类号: G03D500
CPC分类号: H01L21/67161 , H01L21/6715 , H01L21/67167 , H01L21/67178
摘要: A substrate processing apparatus includes a coating section, a developing section, a heat-treating section and a transport mechanism. The coating section has first processing units each for performing a coverage process to supply a photoresist solution to a substrate and cover a surface of the substrate with the photoresist solution, a second processing unit for spinning the substrate, after the coverage process, at high speed to make the photoresist solution into a film, dry the photoresist film, and clean the substrate. All substrates are processed with the same coating conditions to suppress differences in quality among the substrates. The first and second processing units perform the respective processes concurrently to improve the throughput of substrate processing.
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4.
公开(公告)号:US08041153B2
公开(公告)日:2011-10-18
申请号:US13006549
申请日:2011-01-14
申请人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Yukio Kumazawa , Noriaki Seki
发明人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Yukio Kumazawa , Noriaki Seki
IPC分类号: G06K9/60
CPC分类号: G06T1/20
摘要: A processing device has plural processing modules executing a processing; and plural connectors each having a linking section, an associating section, and a controller. The linking section is able to link with at least one other connector at an input side or an output side. The associating section associates the connector with one of the processing modules. In accordance with a linked state, the controller controls the processing module associated by the associating section.
摘要翻译: 处理装置具有执行处理的多个处理模块; 以及多个连接器,每个具有连接部分,关联部分和控制器。 连接部分能够在输入侧或输出侧与至少一个其它连接器连接。 关联部分将连接器与其中一个处理模块相关联。 根据链接状态,控制器控制由关联部分相关联的处理模块。
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5.
公开(公告)号:US20110109637A1
公开(公告)日:2011-05-12
申请号:US13006549
申请日:2011-01-14
申请人: Yasuhiko KANEKO , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Yukio Kumazawa , Noriaki Seki
发明人: Yasuhiko KANEKO , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Yukio Kumazawa , Noriaki Seki
IPC分类号: G06T1/20
CPC分类号: G06T1/20
摘要: A processing device has plural processing modules executing a processing; and plural connectors each having a linking section, an associating section, and a controller. The linking section is able to link with at least one other connector at an input side or an output side. The associating section associates the connector with one of the processing modules. In accordance with a linked state, the controller controls the processing module associated by the associating section.
摘要翻译: 处理装置具有执行处理的多个处理模块; 以及多个连接器,每个具有连接部分,关联部分和控制器。 连接部分能够在输入侧或输出侧与至少一个其它连接器连接。 关联部分将连接器与其中一个处理模块相关联。 根据链接状态,控制器控制由关联部分相关联的处理模块。
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公开(公告)号:US07916974B2
公开(公告)日:2011-03-29
申请号:US11446127
申请日:2006-06-05
申请人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Yukio Kumazawa , Noriaki Seki
发明人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Yukio Kumazawa , Noriaki Seki
IPC分类号: G06K9/60
CPC分类号: G06T1/20
摘要: A processing device has plural processing modules executing a processing; and plural connectors each having a linking section, an associating section, and a controller. The linking section is able to link with at least one other connector at an input side or an output side. The associating section associates the connector with one of the processing modules. In accordance with a linked state, the controller controls the processing module associated by the associating section.
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公开(公告)号:US20070006133A1
公开(公告)日:2007-01-04
申请号:US11446226
申请日:2006-06-05
申请人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Noriaki Seki , Yukio Kumazawa
发明人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Noriaki Seki , Yukio Kumazawa
IPC分类号: G06F9/44
CPC分类号: G06F8/20
摘要: A connector has a linking section, an associating section, and a controller. The linking section can link with at least one other connector at an input side or an output side. The associating section associates the connector with a processing module that executes a predetermined processing. The controller recognizes a linked state with other connectors, and, in accordance with the linked state, controls the processing module associated by the associating section.
摘要翻译: 连接器具有连接部分,关联部分和控制器。 连接部分可以在输入侧或输出侧与至少一个其它连接器连接。 关联部分将连接器与执行预定处理的处理模块相关联。 控制器识别与其他连接器的链接状态,并且根据链接状态来控制由关联部分关联的处理模块。
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8.
公开(公告)号:US20070041610A1
公开(公告)日:2007-02-22
申请号:US11446127
申请日:2006-06-05
申请人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Yukio Kumazawa , Noriaki Seki
发明人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Yukio Kumazawa , Noriaki Seki
IPC分类号: G06K9/00
CPC分类号: G06T1/20
摘要: A processing device has plural processing modules executing a processing; and plural connectors each having a linking section, an associating section, and a controller. The linking section is able to link with at least one other connector at an input side or an output side. The associating section associates the connector with one of the processing modules. In accordance with a linked state, the controller controls the processing module associated by the associating section.
摘要翻译: 处理装置具有执行处理的多个处理模块; 以及多个连接器,每个具有连接部分,关联部分和控制器。 连接部分能够在输入侧或输出侧与至少一个其它连接器连接。 关联部分将连接器与其中一个处理模块相关联。 根据链接状态,控制器控制由关联部分相关联的处理模块。
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公开(公告)号:US11167637B2
公开(公告)日:2021-11-09
申请号:US14390693
申请日:2012-04-12
申请人: Satoshi Yamamoto , Chiaki Kataoka , Masaki Akagi
发明人: Satoshi Yamamoto , Chiaki Kataoka , Masaki Akagi
IPC分类号: B60K15/04
摘要: To obtain a fuel filler structure for a fuel tank wherein when causing an opening and closing valve to close, it can be ensured that the opening and closing valve does not rapidly rotate to a closed position in which it closes a fuel fill inlet, and when causing the opening and closing valve to open, the opening and closing valve can be opened with a small force. A fuel filler structure is equipped with a damper on the near side of a flapper valve in the insertion direction of a fuel nozzle. When the flapper valve rotates to an open position, the damper does not act on the flapper valve, and when the flapper valve rotates to a closed position, the damper acts on the flapper valve.
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公开(公告)号:US10534236B2
公开(公告)日:2020-01-14
申请号:US15737115
申请日:2016-06-17
申请人: Satoshi Yamamoto , Daisuke Goto , Toshiya Sagisaka , Masato Shinoda , Mamiko Inoue , Fuminari Kaneko , Tohru Yashiro
发明人: Satoshi Yamamoto , Daisuke Goto , Toshiya Sagisaka , Masato Shinoda , Mamiko Inoue , Fuminari Kaneko , Tohru Yashiro
IPC分类号: G02F1/15 , C07D265/28 , G09F9/30 , C09K9/02 , C08F20/36 , C07D265/38 , G02F1/1516
摘要: Provided is an electrochromic compound represented by the following general formula (I) or (II) where R1 to R13 are each independently a hydrogen atom, a halogen atom, a monovalent organic group, or a polymerizable functional group, and at least one of the R1 to the R13 is a polymerizable functional group.
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