公开(公告)号：US07105074B2

公开(公告)日：2006-09-12

申请号：US10202279

申请日：2002-07-22

申请人： Osamu Tamada ,  Tsuyoshi Mitsuhashi ,  Minobu Matsunaga ,  Katsushi Yoshioka ,  Kenji Sugimoto ,  Kaoru Aoki ,  Moritaka Yano ,  Satoshi Yamamoto ,  Masakazu Sanada ,  Takashi Nagao ,  Mitsumasa Kodama

发明人： Osamu Tamada ,  Tsuyoshi Mitsuhashi ,  Minobu Matsunaga ,  Katsushi Yoshioka ,  Kenji Sugimoto ,  Kaoru Aoki ,  Moritaka Yano ,  Satoshi Yamamoto ,  Masakazu Sanada ,  Takashi Nagao ,  Mitsumasa Kodama

IPC分类号： B05B3/00 ,  B08B3/00

CPC分类号： H01L21/6715 ,  H01L21/31133

摘要： A substrate treating apparatus is provided for eliminating wasteful consumption of a treating solution in a treating mode in which the treating solution is delivered in a strip form to a substrate from a treating solution delivery nozzle sweeping over the substrate. In a first aspect of the invention, collecting vessels are arranged around a developing cup surrounding a wafer supported by a wafer holder. The collecting vessels collect part of a developer delivered from a discharge opening of a developer delivery nozzle outwardly of a surface of the wafer. In a second aspect of the invention, collecting vessels are arranged below a developer delivery nozzle, with collecting openings of the collecting vessels opposed to a discharge opening or openings of the delivery nozzle. The collecting vessels are moved longitudinally of the discharge openings according to a position of the developer delivery nozzle relative to the wafer.

公开(公告)号：US06832863B2

公开(公告)日：2004-12-21

申请号：US10458719

申请日：2003-06-09

申请人： Kenji Sugimoto ,  Minobu Matsunaga ,  Masakazu Sanada ,  Katsushi Yoshioka ,  Kaoru Aoki ,  Moritaka Yano ,  Satoshi Yamamoto ,  Tsuyoshi Mitsuhashi ,  Takashi Nagao ,  Mitsumasa Kodama

发明人： Kenji Sugimoto ,  Minobu Matsunaga ,  Masakazu Sanada ,  Katsushi Yoshioka ,  Kaoru Aoki ,  Moritaka Yano ,  Satoshi Yamamoto ,  Tsuyoshi Mitsuhashi ,  Takashi Nagao ,  Mitsumasa Kodama

IPC分类号： G03D500

CPC分类号： H01L21/67173 ,  G03F7/70691 ,  H01L21/67178 ,  H01L21/67184 ,  H01L21/67276 ,  Y10S414/135 ,  Y10S414/14

摘要： A series of substrate transport paths for transporting substrates is arranged on upper and lower stories. Substrates are transferable between the substrate transport path on the first story and the substrate transport path on the second story. The paths include a going-only path for transporting the substrates forward, and a return-only path for transporting the substrates in the opposite direction, these paths being arranged on the upper and lower stories. An indexer connects one end of the substrate transport path on one story to one end of the substrate transport path on the other story. An interface connects the other end of the substrate transport path on one story to the other end of the substrate transport path on the other story. This construction efficiently reduces a waiting time due to interference between the substrates transported along the going-only path and the substrates transported along the return-only path.

摘要翻译： 用于传送基板的一系列基板传送路径被布置在上层和下层。 基底可以在第一层的基底输送路径和第二层的基底输送路径之间转移。 这些路径包括用于向前传送基板的唯一路径，以及用于沿相反方向传送基板的返回路径，这些路径布置在上部和下部故事物上。 分度器将另一个故事的基底传送路径的一端连接到基底传送路径的一端。 一个界面将一个故事的基板传送路径的另一端连接到另一个故事的基板传送路径的另一端。 这种构造有效地减少了由沿着仅路径传送的基板与沿着返回路径传送的基板之间的干涉导致的等待时间。

公开(公告)号：US06558053B2

公开(公告)日：2003-05-06

申请号：US10125229

申请日：2002-04-18

申请人： Kazuhito Shigemori ,  Masakazu Sanada ,  Minobu Matsunaga ,  Katsushi Yoshioka ,  Kenji Sugimoto ,  Kaoru Aoki ,  Moritaka Yano ,  Satoshi Yamamoto ,  Tsuyoshi Mitsuhashi ,  Takashi Nagao ,  Mitsumasa Kodama ,  Yukihiko Inagaki ,  Yoshihisa Yamada

发明人： Kazuhito Shigemori ,  Masakazu Sanada ,  Minobu Matsunaga ,  Katsushi Yoshioka ,  Kenji Sugimoto ,  Kaoru Aoki ,  Moritaka Yano ,  Satoshi Yamamoto ,  Tsuyoshi Mitsuhashi ,  Takashi Nagao ,  Mitsumasa Kodama ,  Yukihiko Inagaki ,  Yoshihisa Yamada

IPC分类号： G03D500

CPC分类号： H01L21/67161 ,  H01L21/6715 ,  H01L21/67167 ,  H01L21/67178

摘要： A substrate processing apparatus includes a coating section, a developing section, a heat-treating section and a transport mechanism. The coating section has first processing units each for performing a coverage process to supply a photoresist solution to a substrate and cover a surface of the substrate with the photoresist solution, a second processing unit for spinning the substrate, after the coverage process, at high speed to make the photoresist solution into a film, dry the photoresist film, and clean the substrate. All substrates are processed with the same coating conditions to suppress differences in quality among the substrates. The first and second processing units perform the respective processes concurrently to improve the throughput of substrate processing.

公开(公告)号：US20070041610A1

公开(公告)日：2007-02-22

申请号：US11446127

申请日：2006-06-05

申请人： Yasuhiko Kaneko ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Yukio Kumazawa ,  Noriaki Seki

发明人： Yasuhiko Kaneko ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Yukio Kumazawa ,  Noriaki Seki

IPC分类号： G06K9/00

CPC分类号： G06T1/20

摘要： A processing device has plural processing modules executing a processing; and plural connectors each having a linking section, an associating section, and a controller. The linking section is able to link with at least one other connector at an input side or an output side. The associating section associates the connector with one of the processing modules. In accordance with a linked state, the controller controls the processing module associated by the associating section.

摘要翻译： 处理装置具有执行处理的多个处理模块; 以及多个连接器，每个具有连接部分，关联部分和控制器。 连接部分能够在输入侧或输出侧与至少一个其它连接器连接。 关联部分将连接器与其中一个处理模块相关联。 根据链接状态，控制器控制由关联部分相关联的处理模块。

公开(公告)号：US08041153B2

公开(公告)日：2011-10-18

申请号：US13006549

申请日：2011-01-14

申请人： Yasuhiko Kaneko ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Yukio Kumazawa ,  Noriaki Seki

发明人： Yasuhiko Kaneko ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Yukio Kumazawa ,  Noriaki Seki

IPC分类号： G06K9/60

CPC分类号： G06T1/20

摘要： A processing device has plural processing modules executing a processing; and plural connectors each having a linking section, an associating section, and a controller. The linking section is able to link with at least one other connector at an input side or an output side. The associating section associates the connector with one of the processing modules. In accordance with a linked state, the controller controls the processing module associated by the associating section.

摘要翻译： 处理装置具有执行处理的多个处理模块; 以及多个连接器，每个具有连接部分，关联部分和控制器。 连接部分能够在输入侧或输出侧与至少一个其它连接器连接。 关联部分将连接器与其中一个处理模块相关联。 根据链接状态，控制器控制由关联部分相关联的处理模块。

公开(公告)号：US20110109637A1

公开(公告)日：2011-05-12

申请号：US13006549

申请日：2011-01-14

申请人： Yasuhiko KANEKO ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Yukio Kumazawa ,  Noriaki Seki

发明人： Yasuhiko KANEKO ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Yukio Kumazawa ,  Noriaki Seki

IPC分类号： G06T1/20

CPC分类号： G06T1/20

摘要： A processing device has plural processing modules executing a processing; and plural connectors each having a linking section, an associating section, and a controller. The linking section is able to link with at least one other connector at an input side or an output side. The associating section associates the connector with one of the processing modules. In accordance with a linked state, the controller controls the processing module associated by the associating section.

摘要翻译： 处理装置具有执行处理的多个处理模块; 以及多个连接器，每个具有连接部分，关联部分和控制器。 连接部分能够在输入侧或输出侧与至少一个其它连接器连接。 关联部分将连接器与其中一个处理模块相关联。 根据链接状态，控制器控制由关联部分相关联的处理模块。

公开(公告)号：US07916974B2

公开(公告)日：2011-03-29

申请号：US11446127

申请日：2006-06-05

申请人： Yasuhiko Kaneko ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Yukio Kumazawa ,  Noriaki Seki

发明人： Yasuhiko Kaneko ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Yukio Kumazawa ,  Noriaki Seki

IPC分类号： G06K9/60

CPC分类号： G06T1/20

摘要： A processing device has plural processing modules executing a processing; and plural connectors each having a linking section, an associating section, and a controller. The linking section is able to link with at least one other connector at an input side or an output side. The associating section associates the connector with one of the processing modules. In accordance with a linked state, the controller controls the processing module associated by the associating section.

公开(公告)号：US20070006133A1

公开(公告)日：2007-01-04

申请号：US11446226

申请日：2006-06-05

申请人： Yasuhiko Kaneko ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Noriaki Seki ,  Yukio Kumazawa

发明人： Yasuhiko Kaneko ,  Junichi Kaneko ,  Satoshi Yamamoto ,  Michitaka Hariya ,  Takashi Nagao ,  Noriaki Seki ,  Yukio Kumazawa

IPC分类号： G06F9/44

CPC分类号： G06F8/20

摘要： A connector has a linking section, an associating section, and a controller. The linking section can link with at least one other connector at an input side or an output side. The associating section associates the connector with a processing module that executes a predetermined processing. The controller recognizes a linked state with other connectors, and, in accordance with the linked state, controls the processing module associated by the associating section.

摘要翻译： 连接器具有连接部分，关联部分和控制器。 连接部分可以在输入侧或输出侧与至少一个其它连接器连接。 关联部分将连接器与执行预定处理的处理模块相关联。 控制器识别与其他连接器的链接状态，并且根据链接状态来控制由关联部分关联的处理模块。

公开(公告)号：US20140008933A1

公开(公告)日：2014-01-09

申请号：US14003101

申请日：2012-03-23

申请人： Takashi Nagao ,  Hiroyuki Mori ,  Toshihiko Nakano

发明人： Takashi Nagao ,  Hiroyuki Mori ,  Toshihiko Nakano

IPC分类号： B60R5/04

CPC分类号： B60R5/044 ,  B60R5/047

摘要： A tonneau cover device includes a tonneau cover coupled to a hatchback door. A movable guide arranged on the tonneau cover is guided by a fixed guide arranged in the vehicle to guide the tonneau cover. The movable guide is separated from the fixed guide when the hatchback door opens. A controller moves the tonneau cover to an extension position when the hatchback door closes and a storage position when the hatchback door opens. A detector detects whether movement of the tonneau cover is obstructed due to contact with an object. The controller temporarily interrupts movement of the tonneau cover when the detector detects that the movement of the tonneau cover to the storage position has been obstructed and restarts the movement of the tonneau cover to the storage position when determining that the movable guide has been separated from the fixed guide as the hatchback door opens.

摘要翻译： 一种吨位盖装置包括联接到两厢门的吨罩。 布置在吨舱盖上的可移动导向件由布置在车辆中的固定导向器引导，以引导吨盖。 当两厢车门打开时，活动导轨与固定导轨分离。 当两厢车门关闭时，控制器将吨位盖移动到扩展位置，当两厢车门打开时，控制器将其移动到扩展位置。 检测器检测到由于与物体的接触而阻碍了吨位盖的移动。 当检测器检测到该吨位盖移动到存储位置时，该控制器暂时中断该吨位盖的运动，并且当确定该可移动导向件与 固定导轨作为两厢门打开。

公开(公告)号：US08203733B2

公开(公告)日：2012-06-19

申请号：US11797477

申请日：2007-05-03

申请人： Youichi Isaka ,  Yukio Kumazawa ,  Takashi Nagao ,  Takashi Igarashi ,  Yusuke Sugimoto ,  Kazuyuki Itagaki ,  Junichi Kaneko

发明人： Youichi Isaka ,  Yukio Kumazawa ,  Takashi Nagao ,  Takashi Igarashi ,  Yusuke Sugimoto ,  Kazuyuki Itagaki ,  Junichi Kaneko

IPC分类号： G06F3/12

CPC分类号： G06T1/20

摘要： An image processing apparatus according to an aspect of the invention includes a first storage unit, a second storage unit, a control unit, and a construction unit. A program of at least one module including a buffer module among modules of an image processing unit is stored in the first storage unit. An image processing program and a shared library can be additionally stored in the second storage unit. The image processing program is used to perform image processing and a program of a module generation unit is registered in the shared library. The control unit instructs at least one module in the image processing unit to perform image processing during construction of the image processing unit. The construction unit constructs the image processing unit.

摘要翻译： 根据本发明的一个方面的图像处理装置包括第一存储单元，第二存储单元，控制单元和结构单元。 在第一存储单元中存储了包括图像处理单元的模块之间的缓冲器模块的至少一个模块的程序。 图像处理程序和共享库可以另外存储在第二存储单元中。 图像处理程序用于执行图像处理，并且在共享库中注册模块生成单元的程序。 控制单元指示图像处理单元中的至少一个模块在图像处理单元的构造期间执行图像处理。 构造单元构建图像处理单元。