公开(公告)号：US10428422B2

公开(公告)日：2019-10-01

申请号：US15586488

申请日：2017-05-04

Applicant: PHILTECH Inc.

Inventor： Yuji Furumura ,  Noriyoshi Shimizu ,  Shinji Nishihara ,  Eri Haikata ,  Masato Ishikawa

IPC: C23C16/455 ,  C23C16/30 ,  H01L31/0216 ,  C23C16/40 ,  G02F1/1333 ,  H01L51/52

Abstract: A film-forming method for forming a film in a film-forming apparatus includes generating first gas molecular species and second gas molecular species by causing the first source gas and the second source gas accumulated in the accumulation mechanisms to pass through respective instantaneously-heating units, sharply raising partial pressure of the first gas molecular species and partial pressure of the second gas molecular species by projectingly supplying the first gas molecular species and the second gas molecular species to the reaction chamber in which the substrate has been placed, which has been depressurized, and which has a constant capacity; bringing the first gas molecular species or the second gas molecular species into reaction by alternately repeatedly guiding the first gas molecular species or the second gas molecular species to a surface of the substrate, and forming a compound film on the surface of the substrate.

公开(公告)号：US09915483B2

公开(公告)日：2018-03-13

申请号：US14567103

申请日：2014-12-11

Applicant: PHILTECH Inc.

Inventor： Yuji Furumura ,  Naomi Mura ,  Shinji Nishihara ,  Noriyoshi Shimizu

IPC: F28F7/00 ,  F28F3/08 ,  F28F3/12 ,  F28F13/06 ,  F22B1/28 ,  F28D21/00

CPC classification number: F28F3/08 ,  F22B1/288 ,  F28D2021/0019 ,  F28F3/12 ,  F28F13/06

Abstract: A small-sized fluid heating/cooling apparatus for heating or cooling a large amount of gas or liquid at a low cost. Structures where a flow passage for a fluid is formed in a heated or cooled base formed in a plate shape or a column shape, and a fluid which has passed through the narrowed flow passage impinges on a wall of a side face of the base vertically to perform heat exchange are connected in series. Heat exchange is instantaneously performed in a small space and manufacture of a mechanism performing such an operation is easy. A material constituting the flow passage may be a metal or ceramics, and a small-sized fluid heat exchanging apparatus can be manufactured at a low cost.

公开(公告)号：US09709340B2

公开(公告)日：2017-07-18

申请号：US14538326

申请日：2014-11-11

Applicant: PHILTECH Inc.

Inventor： Yuji Furumura ,  Naomi Mura ,  Shinji Nishihara ,  Noriyoshi Shimizu

IPC: F28D7/02 ,  F28F3/12 ,  F28F13/06 ,  F28F21/02 ,  F28F21/04 ,  F28F21/08

CPC classification number: F28F3/12 ,  F28F13/06 ,  F28F21/02 ,  F28F21/04 ,  F28F21/083

Abstract: In a small-sized fluid heat exchanging apparatus that heats or cools a huge amount of gas or liquid, a structure makes fluid having a high flow speed impinge perpendicularly against a wall. A flow passage is divided into a high-speed flow passage and a low-speed flow passage, and the high-speed flow passage and the low-speed flow passage are arranged so as to intersect perpendicularly with each other, according to guidelines for the shape of the flow passage. A flow passage designed according to the guidelines provides highly-efficient heat exchange.

公开(公告)号：US09340736B2

公开(公告)日：2016-05-17

申请号：US14679952

申请日：2015-04-06

Applicant: PHILTECH Inc.

Inventor： Yuji Furumura ,  Naomi Mura ,  Shinji Nishihara ,  Noriyoshi Shimizu

IPC: C10J3/00 ,  C10J3/02 ,  C10J3/20 ,  C10J3/22 ,  C23C16/448 ,  C10J3/80 ,  C23C16/44 ,  B01J19/00 ,  B01J19/02 ,  B01J19/24

CPC classification number: C10J3/80 ,  C10J3/20 ,  C10J3/74 ,  C10J2200/15 ,  C10J2300/0916 ,  C10J2300/092 ,  C10J2300/1253 ,  C23C16/4488

Abstract: A solid gasification apparatus includes a reaction chamber thermally insulated by a heat insulating material, a heat beam fluid heat exchange apparatus that produces a first heated gas and a second heated gas, and a unit that includes a gas flow path. The unit sprays the first heated gas against a material solid in a reaction chamber to heat the material solid, and, simultaneously, makes the material solid react with the first heated gas to produce a produced gas containing the element of the material solid. The unit makes a second heated gas contact and react with the produced gas.

Abstract translation: 固体气化装置包括由绝热材料热绝缘的反应室，产生第一加热气体和第二加热气体的热束流体热交换装置，以及包括气体流路的单元。 单元将第一加热气体相对于反应室中的材料固体喷射以加热材料固体，并且同时使材料固体与第一加热气体反应，以产生含有材料固体元素的产生气体。 该装置使第二次加热的气体接触并与产生的气体反应。

公开(公告)号：US20150315501A1

公开(公告)日：2015-11-05

申请号：US14679952

申请日：2015-04-06

Applicant: PHILTECH Inc.

Inventor： Yuji Furumura ,  Naomi Mura ,  Shinji Nishihara ,  Noriyoshi Shimizu

IPC: C10J3/80 ,  C10J3/20

CPC classification number: C10J3/80 ,  C10J3/20 ,  C10J3/74 ,  C10J2200/15 ,  C10J2300/0916 ,  C10J2300/092 ,  C10J2300/1253 ,  C23C16/4488

Abstract: A solid gasification apparatus includes a reaction chamber thermally insulated by a heat insulating material, a heat beam fluid heat exchange apparatus that produces a first heated gas and a second heated gas, and a unit that includes a gas flow path. The unit spays the first heated gas against a material solid in a reaction chamber to heat the material solid, and, simultaneously, makes the material solid react with the first heated gas to produce a produced gas containing the element of the material solid. The unit makes a second heated gas contact and react with the produced gas.

Abstract translation: 固体气化装置包括由绝热材料热绝缘的反应室，产生第一加热气体和第二加热气体的热束流体热交换装置，以及包括气体流路的单元。 单元将第一加热气体相对于反应室中的材料固体喷射以加热材料固体，并且同时使材料固体与第一加热气体反应，以产生含有材料固体元素的产生气体。 该装置使第二次加热的气体接触并与产生的气体反应。