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公开(公告)号:US20160209639A1
公开(公告)日:2016-07-21
申请号:US15085828
申请日:2016-03-30
Applicant: PHOTRONICS, INC.
Inventor: Christopher J. Progler
CPC classification number: G02B26/004 , E06B3/6722 , F24S10/502 , F24S50/80 , F24S70/14 , F28D20/0034 , G01N27/44704 , G01N27/44782 , G02F1/0147 , G02F1/13338 , G02F1/29 , G02F2201/30 , G02F2203/62 , G06F3/041 , G06F3/0412 , H01L35/30 , Y02E10/44 , Y02E60/142 , Y10T137/2213 , Y10T137/2224
Abstract: A microfluidic panel including at least one substrate, one or more channels formed in the substrate, and fluid disposed within the one or more channels. The fluid is selected to store thermal energy and the microfluidic panel is adapted to convert the thermal energy into useable energy or condition the energy to adjust optical wavelength passband of the panel.
Abstract translation: 一种微流体面板,包括至少一个衬底,在衬底中形成的一个或多个通道,以及设置在一个或多个通道内的流体。 选择流体以存储热能,并且微流体面板适于将热能转换成可用能量或调节能量以调节面板的光学波长通带。
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公开(公告)号:US12164225B2
公开(公告)日:2024-12-10
申请号:US17245113
申请日:2021-04-30
Applicant: Photronics, Inc.
Inventor: Mohamed Ramadan , Michael Green , Young Ham , Christopher J. Progler
IPC: G03F1/70 , G06F30/398 , G06T7/00 , G06T7/13 , G06T7/70 , G06F119/18
Abstract: Methods and systems for building a photomask from obtained pattern information relating to a photomask that exhibits defects on wafer. Spatial domain analysis is conducted on the pattern information so that corrective photomask structures can be generated and applied to a photomask layout. A photomask is built using the corrective photomask structures. The photomask is verified for effectiveness.
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公开(公告)号:US09933611B2
公开(公告)日:2018-04-03
申请号:US15085828
申请日:2016-03-30
Applicant: PHOTRONICS, INC.
Inventor: Christopher J. Progler
IPC: G01N21/00 , G01N27/00 , G02B26/00 , F28D20/00 , G02F1/01 , G01N27/447 , G06F3/041 , H01L35/30 , F24J2/20 , F24J2/40 , F24J2/48 , G02F1/29 , E06B3/67 , G02F1/1333
CPC classification number: G02B26/004 , E06B3/6722 , F24S10/502 , F24S50/80 , F24S70/14 , F28D20/0034 , G01N27/44704 , G01N27/44782 , G02F1/0147 , G02F1/13338 , G02F1/29 , G02F2201/30 , G02F2203/62 , G06F3/041 , G06F3/0412 , H01L35/30 , Y02E10/44 , Y02E60/142 , Y10T137/2213 , Y10T137/2224
Abstract: A microfluidic panel including at least one substrate, one or more channels formed in the substrate, and fluid disposed within the one or more channels. The fluid is selected to store thermal energy and the microfluidic panel is adapted to convert the thermal energy into useable energy or condition the energy to adjust optical wavelength passband of the panel.
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公开(公告)号:US09304334B2
公开(公告)日:2016-04-05
申请号:US14160142
申请日:2014-01-21
Applicant: PHOTRONICS, INC.
Inventor: Christopher J. Progler
IPC: G01N21/00 , G01N27/00 , G02F1/01 , F28D20/00 , G01N27/447 , G06F3/041 , H01L35/30 , F24J2/20 , F24J2/40 , F24J2/48 , E06B3/67 , G02F1/1333
CPC classification number: G02B26/004 , E06B3/6722 , F24S10/502 , F24S50/80 , F24S70/14 , F28D20/0034 , G01N27/44704 , G01N27/44782 , G02F1/0147 , G02F1/13338 , G02F1/29 , G02F2201/30 , G02F2203/62 , G06F3/041 , G06F3/0412 , H01L35/30 , Y02E10/44 , Y02E60/142 , Y10T137/2213 , Y10T137/2224
Abstract: A microfluidic panel including at least one substrate, one or more channels formed in the substrate, and fluid disposed within the one or more channels. The fluid is selected to store thermal energy and the microfluidic panel is adapted to convert the thermal energy into useable energy or condition the energy to adjust optical wavelength passband of the panel.
Abstract translation: 一种微流体面板,包括至少一个衬底,在衬底中形成的一个或多个通道,以及设置在一个或多个通道内的流体。 选择流体以存储热能,并且微流体面板适于将热能转换成可用能量或调节能量以调节面板的光学波长通带。
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公开(公告)号:US20210341832A1
公开(公告)日:2021-11-04
申请号:US17245113
申请日:2021-04-30
Applicant: Photronics, Inc.
Inventor: Mohamed Ramadan , Michael Green , Young Ham , Christopher J. Progler
Abstract: Methods and systems for building a photomask from obtained pattern information relating to a photomask that exhibits defects on wafer. Spatial domain analysis is conducted on the pattern information so that corrective photomask structures can be generated and applied to a photomask layout. A photomask is built using the corrective photomask structures. The photomask is verified for effectiveness.
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公开(公告)号:US20140204450A1
公开(公告)日:2014-07-24
申请号:US14160142
申请日:2014-01-21
Applicant: PHOTRONICS, INC.
Inventor: Christopher J. Progler
CPC classification number: G02B26/004 , E06B3/6722 , F24S10/502 , F24S50/80 , F24S70/14 , F28D20/0034 , G01N27/44704 , G01N27/44782 , G02F1/0147 , G02F1/13338 , G02F1/29 , G02F2201/30 , G02F2203/62 , G06F3/041 , G06F3/0412 , H01L35/30 , Y02E10/44 , Y02E60/142 , Y10T137/2213 , Y10T137/2224
Abstract: A microfluidic panel including at least one substrate, one or more channels formed in the substrate, and fluid disposed within the one or more channels. The fluid is selected to store thermal energy and the microfluidic panel is adapted to convert the thermal energy into useable energy or condition the energy to adjust optical wavelength passband of the panel.
Abstract translation: 一种微流体面板,包括至少一个衬底,在衬底中形成的一个或多个通道,以及设置在一个或多个通道内的流体。 选择流体以存储热能,并且微流体面板适于将热能转换成可用能量或调节能量以调节面板的光学波长通带。
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