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公开(公告)号：US11733535B2
公开(公告)日：2023-08-22
申请号：US17029157
申请日：2020-09-23
发明人： Francesco Aieta , Mikhail Kats , Patrice Genevet , Federico Capasso , Mohammadreza Khorasaninejad
CPC分类号： G02B27/4211 , G02B1/002 , G02B5/008 , G02B5/203 , H01Q15/10 , G02B5/1809
摘要： Multi-wavelength light is directed to an optic including a substrate and achromatic metasurface optical components deposited on a surface of the substrate. The achromatic metasurface optical components comprise a pattern of dielectric resonators. The dielectric resonators have nonperiodic gap distances between adjacent dielectric resonators; and each dielectric resonator has a width, w, that is distinct from the width of other dielectric resonators. A plurality of wavelengths of interest selected from the wavelengths of the multi-wavelength light are deflected with the achromatic metasurface optical components at a shared angle or to or from a focal point at a shared focal length.
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公开(公告)号：US20210109364A1
公开(公告)日：2021-04-15
申请号：US17029157
申请日：2020-09-23
发明人： Francesco Aieta , Mikhail Kats , Patrice Genevet , Federico Capasso , Mohammadreza Khorasaninejad
摘要： Multi-wavelength light is directed to an optic including a substrate and achromatic metasurface optical components deposited on a surface of the substrate. The achromatic metasurface optical components comprise a pattern of dielectric resonators. The dielectric resonators have nonperiodic gap distances between adjacent dielectric resonators; and each dielectric resonator has a width, w, that is distinct from the width of other dielectric resonators. A plurality of wavelengths of interest selected from the wavelengths of the multi-wavelength light are deflected with the achromatic metasurface optical components at a shared angle or to or from a focal point at a shared focal length.
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公开(公告)号：US10816815B2
公开(公告)日：2020-10-27
申请号：US15534642
申请日：2015-12-10
发明人： Francesco Aieta , Mikhail Kats , Patrice Genevet , Federico Capasso , Mohammadreza Khorasaninejad
摘要： Multi-wavelength light is directed to an optic including a substrate and achromatic metasurface optical components deposited on a surface of the substrate. The achromatic metasurface optical components comprise a pattern of dielectric resonators. The dielectric resonators have distances between adjacent dielectric resonators; and each dielectric resonator has a width, w, that is distinct from the width of other dielectric resonators. A plurality of wavelengths of interest selected from the wavelengths of the multi-wavelength light are deflected with the achromatic metasurface optical components at a shared angle or to or from a focal point at a shared focal length.
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公开(公告)号：US20190086683A1
公开(公告)日：2019-03-21
申请号：US15534642
申请日：2015-12-10
发明人： Francesco Aieta , Mikhail Kats , Patrice Genevet , Federico Capasso , Mohammadreza Khorasaninejad
CPC分类号： G02B27/4211 , G02B1/002 , G02B5/008 , G02B5/1809 , G02B5/203 , H01Q15/10
摘要： Multi-wavelength light is directed to an optic including a substrate and achromatic metasurface optical components deposited on a surface of the substrate. The achromatic metasurface optical components comprise a pattern of dielectric resonators. The dielectric resonators have distances between adjacent dielectric resonators; and each dielectric resonator has a width, w, that is distinct from the width of other dielectric resonators. A plurality of wavelengths of interest selected from the wavelengths of the multi-wavelength light are deflected with the achromatic metasurface optical components at a shared angle or to or from a focal point at a shared focal length.
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公开(公告)号：US20240118554A1
公开(公告)日：2024-04-11
申请号：US18220764
申请日：2023-07-11
发明人： Francesco Aieta , Mikhail Kats , Patrice Genevet , Federico Capasso , Mohammadreza Khorasaninejad
CPC分类号： G02B27/4211 , G02B1/002 , G02B5/008 , G02B5/203 , H01Q15/10 , G02B5/1809
摘要： Multi-wavelength light is directed to an optic including a substrate and metasurface optical components deposited on a surface of the substrate. The metasurface optical components comprise a pattern of silicon dielectric resonators with nonperiodic gap distances between adjacent dielectric resonators. Incident light directed to the metasurface optical components is scattered and phase-shifted by the configuration of the gap distances and the widths and thicknesses of the dielectric resonators. Each dielectric resonator has a rectangular cross-section such that a first phase shift is imparted for a transverse-electric (TE) component of the incident light and a second phase shift is imparted for a transverse-magnetic (TM) component of the incident light.
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公开(公告)号：US11815668B2
公开(公告)日：2023-11-14
申请号：US17824823
申请日：2022-05-25
发明人： Robert C. Devlin , Mohammadreza Khorasaninejad , Federico Capasso , Hongkun Park , Alexander Arthur High
IPC分类号： G02B1/00 , G02B1/02 , G02B13/14 , H01L31/02 , G03F7/00 , G03F7/40 , C23C16/56 , C23C16/455 , C23C16/04
CPC分类号： G02B13/14 , C23C16/042 , C23C16/45525 , C23C16/45555 , C23C16/56 , G02B1/002 , G02B1/005 , G03F7/0005 , G03F7/40 , H01L31/02 , G02B1/02
摘要： A method of fabricating a visible spectrum optical component includes: providing a substrate; forming a resist layer over a surface of the substrate; patterning the resist layer to form a patterned resist layer defining openings exposing portions of the surface of the substrate; performing deposition to form a dielectric film over the patterned resist layer and over the exposed portions of the surface of the substrate, wherein a top surface of the dielectric film is above a top surface of the patterned resist layer; removing a top portion of the dielectric film to expose the top surface of the patterned resist layer and top surfaces of dielectric units within the openings of the patterned resist layer; and removing the patterned resist layer to retain the dielectric units over the substrate.
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公开(公告)号：US12025812B2
公开(公告)日：2024-07-02
申请号：US18220764
申请日：2023-07-11
发明人： Francesco Aieta , Mikhail Kats , Patrice Genevet , Federico Capasso , Mohammadreza Khorasaninejad
CPC分类号： G02B27/4211 , G02B1/002 , G02B5/008 , G02B5/203 , H01Q15/10 , G02B5/1809
摘要： Multi-wavelength light is directed to an optic including a substrate and metasurface optical components deposited on a surface of the substrate. The metasurface optical components comprise a pattern of silicon dielectric resonators with nonperiodic gap distances between adjacent dielectric resonators. Incident light directed to the metasurface optical components is scattered and phase-shifted by the configuration of the gap distances and the widths and thicknesses of the dielectric resonators. Each dielectric resonator has a rectangular cross-section such that a first phase shift is imparted for a transverse-electric (TE) component of the incident light and a second phase shift is imparted for a transverse-magnetic (TM) component of the incident light.
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公开(公告)号：US11092717B2
公开(公告)日：2021-08-17
申请号：US16091104
申请日：2017-04-05
发明人： Federico Capasso , Wei-Ting Chen , Robert C. Devlin , Mohammadreza Khorasaninejad , Jaewon Oh , Alexander Yutong Zhu , Charles Roques-Carmes , Ishan Mishra
摘要： A meta-lens having a phase profile includes a substrate and a plurality of nanostructures disposed on the substrate. Each individual nanostructure of the nanostructures imparts a light phase shift that varies depending on a location of the individual nanostructure on the substrate. The light phase shifts of the nanostructures define the phase profile of the meta-lens. The varying light phase shifts can be realized by, e.g., changing orientations of nanofins or changing diameters of nanopillars.
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公开(公告)号：US10408416B2
公开(公告)日：2019-09-10
申请号：US15885622
申请日：2018-01-31
发明人： Mohammadreza Khorasaninejad , Zhujun Shi , Alexander Y. Zhu , Wei Ting Chen , Vyshakh Sanjeev , Federico Capasso
IPC分类号： G02B5/18 , B82Y20/00 , B82Y40/00 , G01B9/02 , F21V5/00 , F21K9/64 , F21V5/04 , F21V5/10 , H04N13/25
摘要： An optical device includes a substrate, a reflective layer disposed over the substrate, and a metalens disposed over the reflective layer. The metalens includes a plurality of nanopillars, the plurality of nanopillars together specifying a phase profile such that the metalens has a focal length that is substantially constant over a wavelength range of an incident light of about 490 nm to about 550 nm.
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公开(公告)号：US11366296B2
公开(公告)日：2022-06-21
申请号：US15778208
申请日：2016-11-23
发明人： Robert C. Devlin , Mohammadreza Khorasaninejad , Federico Capasso , Hongkun Park , Alexander Arthur High
IPC分类号： G02B1/02 , G02B13/14 , G02B1/00 , H01L31/02 , G03F7/00 , G03F7/40 , C23C16/56 , C23C16/455 , C23C16/04
摘要： A method of fabricating a visible spectrum optical component includes: providing a substrate; forming a resist layer over a surface of the substrate; patterning the resist layer to form a patterned resist layer defining openings exposing portions of the surface of the substrate; performing deposition to form a dielectric film over the patterned resist layer and over the exposed portions of the surface of the substrate, wherein a top surface of the dielectric film is above a top surface of the patterned resist layer; removing a top portion of the dielectric film to expose the top surface of the patterned resist layer and top surfaces of dielectric units within the openings of the patterned resist layer; and removing the patterned resist layer to retain the dielectric units over the substrate.
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