公开(公告)号：US11150092B2

公开(公告)日：2021-10-19

申请号：US16340863

申请日：2017-12-19

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takashi Imanaka ,  Shoichi Taji ,  Soichiro Hiraoka ,  Katsuya Morinaka

IPC: G01C19/5769 ,  G01C19/5733 ,  G01C19/5747 ,  B81B7/00 ,  B81C1/00 ,  B81B7/02 ,  H01L29/84

Abstract: A sensor includes a sensor substrate, and an upper lid substrate joined to an upper surface of the sensor substrate. The sensor substrate includes a fixed part, a deformable beam connected to the fixed part, and a weight connected to the beam. The weight is movable relative to the fixed part. The upper lid substrate includes a first part containing silicon and a second part joined to the first part and containing glass. The first part includes a projection protruding toward the sensor substrate relative to the second part. The sensor has high accuracy or high reliability.

公开(公告)号：US20160084870A1

公开(公告)日：2016-03-24

申请号：US14785605

申请日：2014-04-17

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takashi Imanaka ,  Khai Jun Kek ,  Rie Okamoto ,  Tsuyoshi Sakaue ,  Hiroshi Nakatsuka

IPC: G01P15/08 ,  G01C19/5783 ,  G01L19/06

CPC classification number: G01P15/08 ,  G01C19/5783 ,  G01L19/06 ,  G01L19/0618 ,  G01P15/123 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0871

Abstract: A sensor includes a first substrate, a supporter connected to the first substrate, a weight facing the first substrate, a beam of which first end is connected to the supporter and of which second end is connected to the weight, a second substrate facing the weight, and a first projection disposed on the first substrate. This senor allows effectively preventing the beam from a breakage caused by the beam twisted due to a rotation of the weight when an impact is applied to the sensor. The sensor thus can improve anti-impact property.

Abstract translation: 传感器包括第一基板，连接到第一基板的支撑件，面向第一基板的重物，第一端连接到支撑件并且其第二端连接到重物的梁，面向重物的第二基板 以及设置在第一基板上的第一突起。 该传感器允许有效地防止由于当对传感器施加冲击时由于重量的旋转而使梁扭曲引起的断裂。 因此，传感器可以提高抗冲击性能。

公开(公告)号：US10191078B2

公开(公告)日：2019-01-29

申请号：US15156329

申请日：2016-05-17

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Atsuhiro Fujii ,  Takashi Imanaka ,  Yuichi Miyoshi ,  Hiroyuki Aizawa

IPC: G01P15/12 ,  G01P15/08 ,  G01P21/00

Abstract: An acceleration sensor includes a detection device, an opposed electrode, and a top lid. The detection device includes an active layer, a base layer, an oxide layer disposed between the active layer and the base layer, a first insulating layer, a contact portion, and a self-check electrode. The first insulating layer is disposed on the active layer at a side opposite to the oxide layer and provided with a first opening. The contact portion is disposed on a part of the first insulating layer at a side opposite to the active layer and includes a first metal layer connected to the active layer through the first opening. The opposed electrode is disposed at a location opposing the self-check electrode, and the top lid supports the opposed electrode.

公开(公告)号：US20150059430A1

公开(公告)日：2015-03-05

申请号：US14394871

申请日：2013-04-18

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takashi Imanaka ,  Hiroyuki Aizawa ,  Takeshi Yokota

IPC: G01P21/00 ,  G01P15/12

CPC classification number: G01P21/00 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  G01P2015/0842

Abstract: An inertial force sensor includes a fixed part, a beam connected to the fixed part, a plummet connected to another end of the beam and being displaceable due to inertial force to cause the beam to deform, a conductive part provided at the plummet, a strain-sensitive resistor provided at the beam for detecting a deformation of the first beam, first and second fault diagnostic electrodes provided at the fixed part, a first fault diagnostic wiring for connecting the first fault diagnostic electrode to the conductive part through the beam, and a second fault diagnostic wiring for connecting the second fault diagnostic electrode to the conductive part through the beam. The inertial force sensor does not continue to output an erroneous output signal when a crack occurs in the plummet, thus having high reliability.

Abstract translation: 惯性力传感器包括固定部分，连接到固定部分的梁，连接到梁的另一端并且由于惯性力可移动以使梁变形的对接头，设置在对中的导电部分，应变 设置在所述光束处的用于检测所述第一光束的变形的敏感电阻器，设置在所述固定部分的第一和第二故障诊断电极，用于通过所述光束将所述第一故障诊断电极连接到所述导电部件的第一故障诊断线，以及 用于通过光束将第二故障诊断电极连接到导电部件的第二故障诊断布线。 惯性力传感器在出口处出现裂纹时不会输出错误的输出信号，因此具有高可靠性。