公开(公告)号：US11150092B2

公开(公告)日：2021-10-19

申请号：US16340863

申请日：2017-12-19

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takashi Imanaka ,  Shoichi Taji ,  Soichiro Hiraoka ,  Katsuya Morinaka

IPC: G01C19/5769 ,  G01C19/5733 ,  G01C19/5747 ,  B81B7/00 ,  B81C1/00 ,  B81B7/02 ,  H01L29/84

Abstract: A sensor includes a sensor substrate, and an upper lid substrate joined to an upper surface of the sensor substrate. The sensor substrate includes a fixed part, a deformable beam connected to the fixed part, and a weight connected to the beam. The weight is movable relative to the fixed part. The upper lid substrate includes a first part containing silicon and a second part joined to the first part and containing glass. The first part includes a projection protruding toward the sensor substrate relative to the second part. The sensor has high accuracy or high reliability.

公开(公告)号：US11692826B2

公开(公告)日：2023-07-04

申请号：US17599212

申请日：2020-03-05

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Shoichi Taji ,  Hiroyuki Aizawa ,  Soichiro Hiraoka

IPC: G01C19/5733 ,  G01C19/5769

CPC classification number: G01C19/5733 ,  G01C19/5769

Abstract: An anchor member supports a frame-shaped member. A first input electrode is located outside the frame-shaped member and separate from the frame-shaped member and fixed to a substrate. A second input electrode includes an electrode portion located outside the frame-shaped member and connected to the frame-shaped member. The second input electrode is displaceable in a prescribed direction. A first reference electrode is inside the frame-shaped member and fixed to the substrate. A second reference electrode includes an electrode portion located inside of the frame-shaped member and connected to the frame-shaped member. The second reference electrode is displaceable in the prescribed direction. In the structural component, the first input electrode and the electrode portion of the second input electrode are located between the frame-shaped member and a weight member in the prescribed direction in plan view in a thickness direction defined with respect to the substrate.

公开(公告)号：US09423304B2

公开(公告)日：2016-08-23

申请号：US14915509

申请日：2015-03-13

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Ryosuke Meshii ,  Toshinari Noda ,  Hiroki Kamiguchi ,  Takashi Kubo ,  Nobuo Sashinaka ,  Shoichi Taji ,  Naoki Ota ,  Naoto Onodera

IPC: G01J5/34

CPC classification number: G01J5/34 ,  G01J5/10 ,  H01L37/025

Abstract: An infrared ray detecting element includes: a substrate having a cavity; an infrared ray detecting portion including, sequentially stacked, a lower electrode layer, a detection layer, and an upper electrode layer; first and second support portions which support the infrared ray detecting portion above the cavity; and first and second external lead portions for leading electrical signals outputted from the infrared ray detecting portion, to the outside. The first support portion includes, sequentially stacked, a first upper wiring pattern, a first insulating layer, and a first lower wiring pattern. The upper electrode layer is connected to the first external lead portion via the first upper wiring pattern. The second support portion includes, sequentially stacked, a second upper wiring pattern, a second insulating layer, and a second lower wiring pattern. The lower electrode layer is connected to the second external lead portion via the second lower wiring pattern.

Abstract translation: 红外线检测元件包括：具有空腔的基板; 红外线检测部分，包括依次层叠下电极层，检测层和上电极层; 第一和第二支撑部分，其支撑在腔体上方的红外线检测部分; 以及用于将从红外线检测部分输出的电信号引导到外部的第一和第二外部引线部分。 第一支撑部包括依次堆叠的第一上布线图案，第一绝缘层和第一下布线图案。 上电极层经由第一上布线图案连接到第一外引线部分。 第二支撑部包括依次堆叠的第二上布线图案，第二绝缘层和第二下布线图案。 下部电极层经由第二下部布线图案与第二外部引线部连接。