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公开(公告)号:US20230326624A1
公开(公告)日:2023-10-12
申请号:US18043510
申请日:2021-09-02
Inventor: Takashi SASAKI , Seiji TAGUCHI , Yoshihisa NAGASAKI , Toshiyuki TAKIZAWA
CPC classification number: H01B3/10 , H01L29/517 , H01L21/28194 , H01G4/105 , H01G4/33
Abstract: An oxide insulator film contains a first metal oxide and a second metal oxide. An electrical conductivity of the second metal oxide is lower than an electrical conductivity of the first metal oxide. The oxide insulator film includes particles of the first metal oxide which are dispersed in a matrix including the second metal oxide.